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Sacrificial etching < Sacrificial layer < Sacrum  Facettes :

List of bibliographic references

Number of relevant bibliographic references: 12.
Ident.Authors (with country if any)Title
000826 (2013) Novel Pd-In catalysts for alcohols electrooxidation in alkaline media
001322 (2012) Transfer of CuInS2 thin film by lift-off process and application to superstrate-type thin-film solar cells
002A84 (2011) Laser transfer of sol-gel ferroelectric thin films using an ITO release layer
002C18 (2011) InGaN super-lattice growth for fabrication of quantum dot containing microdisks
002D73 (2011) High Optical Quality InP-Based Nanopillars Fabricated by a Top-Down Approach
004104 (2010) GaAs/AlAs/InGaP heterostructure: a versatile material basis for cantilever designs
007297 (2007) Piezoresistance of suspended InAs/AlGaSb heterostructure nanobeam
007F50 (2007) AIII-BV nano-and microtubes fabricated on (1 1 0)-oriented GaAs-and GaP-substrate using the metal-organic vapor-phase epitaxy
009D28 (2005) Fringing effects of V-shape gate metal on GaAs/InGaP/InGaAs doped-channel field-effect transistors
00B539 (2004) High performance of 0.15μm quasi enhancement-mode (E-mode) In0.4GaAs/In0.4AlAs metamorphic HEMT's on gaas substrate using new triple-gate technology
00B680 (2004) Fabrication and characterization of high-uniformity and high-accuracy two-dimensional photonic-crystal slab waveguides on GaAs membranes involving InAs quantum dots
00D998 (2003) Application of multi-step formation during molecular beam epitaxy for fabricating novel nanomechanical structures

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