Emission site control in carbon nanotube field emitters by focused ion and laser irradiation
Identifieur interne : 00C780 ( Main/Repository ); précédent : 00C779; suivant : 00C781Emission site control in carbon nanotube field emitters by focused ion and laser irradiation
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Abstract
Multiwalled carbon nanotubes on aluminum or indium tin oxide layers were irradiated with gallium focused ion beams (FIBs) to induce defects and increase emission sites of carbon nanotubes (CNTs). A turn-on voltage was found to decrease from 460 to 220 V by ion irradiation at a dose of 1×1015/cm2, corresponding to turn-on fields from 3.7 to 1.8 V/μm. However, noticeable improvements in emission characteristics were not observed as a result of high-dose FIB irradiation at and above 1×1016/cm2. Because of the local temperature rise due to the intense FIB this irradiation resulted in melting of CNTs. The third harmonic of a neodymium-doped yttrium fluoride (Nd:YLF) laser light was irradiated over screen-printed CNT cathodes, which resulted in turn-on voltage decreasing from 400 to 320 V, corresponding to turn-on fields from 3.2 to 2.6 V/μm, with increased emissions by a factor of 6. © 2003 American Vacuum Society.
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<record><TEI><teiHeader><fileDesc><titleStmt><title xml:lang="en" level="a">Emission site control in carbon nanotube field emitters by focused ion and laser irradiation</title><author><name sortKey="Sawada, A" uniqKey="Sawada A">A. Sawada</name><affiliation wicri:level="1"><inist:fA14 i1="01"><s1>Research Center for Materials Science at Extreme Conditions and Graduate School of Engineering Science, Osaka University, 1-3 Machikaneyama, Toyonaka, Osaka 560-8531, Japan</s1><sZ>1 aut.</sZ><sZ>2 aut.</sZ><sZ>3 aut.</sZ><sZ>4 aut.</sZ><sZ>5 aut.</sZ></inist:fA14><country xml:lang="fr">Japon</country><wicri:regionArea>Research Center for Materials Science at Extreme Conditions and Graduate School of Engineering Science, Osaka University, 1-3 Machikaneyama, Toyonaka, Osaka 560-8531</wicri:regionArea><wicri:noRegion>Osaka 560-8531</wicri:noRegion></affiliation></author><author><name sortKey="Iriguchi, M" uniqKey="Iriguchi M">M. Iriguchi</name><affiliation wicri:level="1"><inist:fA14 i1="01"><s1>Research Center for Materials Science at Extreme Conditions and Graduate School of Engineering Science, Osaka University, 1-3 Machikaneyama, Toyonaka, Osaka 560-8531, Japan</s1><sZ>1 aut.</sZ><sZ>2 aut.</sZ><sZ>3 aut.</sZ><sZ>4 aut.</sZ><sZ>5 aut.</sZ></inist:fA14><country xml:lang="fr">Japon</country><wicri:regionArea>Research Center for Materials Science at Extreme Conditions and Graduate School of Engineering Science, Osaka University, 1-3 Machikaneyama, Toyonaka, Osaka 560-8531</wicri:regionArea><wicri:noRegion>Osaka 560-8531</wicri:noRegion></affiliation></author><author><name sortKey="Zhao, W J" uniqKey="Zhao W">W. J. Zhao</name><affiliation wicri:level="1"><inist:fA14 i1="01"><s1>Research Center for Materials Science at Extreme Conditions and Graduate School of Engineering Science, Osaka University, 1-3 Machikaneyama, Toyonaka, Osaka 560-8531, Japan</s1><sZ>1 aut.</sZ><sZ>2 aut.</sZ><sZ>3 aut.</sZ><sZ>4 aut.</sZ><sZ>5 aut.</sZ></inist:fA14><country xml:lang="fr">Japon</country><wicri:regionArea>Research Center for Materials Science at Extreme Conditions and Graduate School of Engineering Science, Osaka University, 1-3 Machikaneyama, Toyonaka, Osaka 560-8531</wicri:regionArea><wicri:noRegion>Osaka 560-8531</wicri:noRegion></affiliation></author><author><name sortKey="Ochiai, C" uniqKey="Ochiai C">C. Ochiai</name><affiliation wicri:level="1"><inist:fA14 i1="01"><s1>Research Center for Materials Science at Extreme Conditions and Graduate School of Engineering Science, Osaka University, 1-3 Machikaneyama, Toyonaka, Osaka 560-8531, Japan</s1><sZ>1 aut.</sZ><sZ>2 aut.</sZ><sZ>3 aut.</sZ><sZ>4 aut.</sZ><sZ>5 aut.</sZ></inist:fA14><country xml:lang="fr">Japon</country><wicri:regionArea>Research Center for Materials Science at Extreme Conditions and Graduate School of Engineering Science, Osaka University, 1-3 Machikaneyama, Toyonaka, Osaka 560-8531</wicri:regionArea><wicri:noRegion>Osaka 560-8531</wicri:noRegion></affiliation></author><author><name sortKey="Takai, M" uniqKey="Takai M">M. Takai</name><affiliation wicri:level="1"><inist:fA14 i1="01"><s1>Research Center for Materials Science at Extreme Conditions and Graduate School of Engineering Science, Osaka University, 1-3 Machikaneyama, Toyonaka, Osaka 560-8531, Japan</s1><sZ>1 aut.</sZ><sZ>2 aut.</sZ><sZ>3 aut.</sZ><sZ>4 aut.</sZ><sZ>5 aut.</sZ></inist:fA14><country xml:lang="fr">Japon</country><wicri:regionArea>Research Center for Materials Science at Extreme Conditions and Graduate School of Engineering Science, Osaka University, 1-3 Machikaneyama, Toyonaka, Osaka 560-8531</wicri:regionArea><wicri:noRegion>Osaka 560-8531</wicri:noRegion></affiliation></author></titleStmt><publicationStmt><idno type="inist">03-0093291</idno><date when="2003-01">2003-01</date><idno type="stanalyst">PASCAL 03-0093291 AIP</idno><idno type="RBID">Pascal:03-0093291</idno><idno type="wicri:Area/Main/Corpus">00DC69</idno><idno type="wicri:Area/Main/Repository">00C780</idno></publicationStmt><seriesStmt><idno type="ISSN">1071-1023</idno><title level="j" type="abbreviated">J. vac. sci. technol., B., Microelectron. nanometer struct. process. meas. phenom.</title><title level="j" type="main">Journal of vacuum science and technology. B. Microelectronics and nanometer structures. Processing, measurement and phenomena</title></seriesStmt></fileDesc><profileDesc><textClass><keywords scheme="KwdEn" xml:lang="en"><term>Carbon nanotubes</term><term>Cathodes</term><term>Electron field emission</term><term>Experimental study</term><term>Focused ion beam technology</term><term>Ion beam effects</term><term>Laser beam effects</term><term>Melting</term></keywords><keywords scheme="Pascal" xml:lang="fr"><term>7970</term><term>6180J</term><term>7920D</term><term>6182</term><term>Etude expérimentale</term><term>Nanotube carbone</term><term>Cathode</term><term>Emission électronique champ</term><term>Technologie faisceau ion focalisé</term><term>Effet faisceau ion</term><term>Effet faisceau laser</term><term>Fusion</term></keywords></textClass></profileDesc></teiHeader><front><div type="abstract" xml:lang="en">Multiwalled carbon nanotubes on aluminum or indium tin oxide layers were irradiated with gallium focused ion beams (FIBs) to induce defects and increase emission sites of carbon nanotubes (CNTs). A turn-on voltage was found to decrease from 460 to 220 V by ion irradiation at a dose of 1×10<sup>15</sup>/cm<sup>2</sup>, corresponding to turn-on fields from 3.7 to 1.8 V/μm. However, noticeable improvements in emission characteristics were not observed as a result of high-dose FIB irradiation at and above 1×10<sup>16</sup>/cm<sup>2</sup>. Because of the local temperature rise due to the intense FIB this irradiation resulted in melting of CNTs. The third harmonic of a neodymium-doped yttrium fluoride (Nd:YLF) laser light was irradiated over screen-printed CNT cathodes, which resulted in turn-on voltage decreasing from 400 to 320 V, corresponding to turn-on fields from 3.2 to 2.6 V/μm, with increased emissions by a factor of 6. © 2003 American Vacuum Society.</div></front></TEI><inist><standard h6="B"><pA><fA01 i1="01" i2="1"><s0>1071-1023</s0></fA01><fA02 i1="01"><s0>JVTBD9</s0></fA02><fA03 i2="1"><s0>J. vac. sci. technol., B., Microelectron. nanometer struct. process. meas. phenom.</s0></fA03><fA05><s2>21</s2></fA05><fA06><s2>1</s2></fA06><fA08 i1="01" i2="1" l="ENG"><s1>Emission site control in carbon nanotube field emitters by focused ion and laser irradiation</s1></fA08><fA11 i1="01" i2="1"><s1>SAWADA (A.)</s1></fA11><fA11 i1="02" i2="1"><s1>IRIGUCHI (M.)</s1></fA11><fA11 i1="03" i2="1"><s1>ZHAO (W. 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