IndiumV3, Main, Repository, bibRecord, 004C43

SEM and XPS studies of nanohole arrays on InP(1 0 0) surfaces created by coupling AAO templates and low energy Ar+ ion sputtering

Identifieur interne : 004C43 ( Main/Repository ); précédent : 004C42; suivant : 004C44

SEM and XPS studies of nanohole arrays on InP(1 0 0) surfaces created by coupling AAO templates and low energy Ar+ ion sputtering

Auteurs : RBID : Pascal:10-0075168

Descripteurs français

Pascal (Inist)
- Microscopie électronique balayage, Spectre photoélectron RX, Réseau(arrangement), Semiconducteur III-V, Pulvérisation irradiation, Aluminium, Indium, Gouttelette, Faisceau ion, Phosphure d'indium, In P, InP, Al, Composé minéral.
Wicri :
- concept : Aluminium, Composé minéral.

English descriptors

KwdEn :
- Aluminium, Arrays, Droplets, III-V semiconductors, Indium, Indium phosphide, Inorganic compounds, Ion beams, Scanning electron microscopy, Sputtering, X-ray photoelectron spectra.

Abstract

The aim of the present study is to demonstrate the feasibility to form well-ordered nanoholes on InP(1 0 0) surfaces by low Ar⁺ ion sputtering process in UHV conditions from anodized aluminum oxide (AAO) templates. This process is a promising approach in creating ordered arrays of surface nanostructures with controllable size and morphology. To follow the Ar⁺ ion sputtering effects on the AAO/InP surfaces, X-ray photoelectron spectroscopy (XPS) was used to determine the different surface species. In_4d and P_2p core level spectra were recorded on different InP(1 00) surfaces after ions bombardment. XPS results showed the presence of metallic indium on both smooth InP(1 0 0) and AAO/InP(1 0 0) surfaces. Finally, we showed that this experiment led to the formation of metallic In dropplets about 10 nm in diameter on nanoholes patterned InP surface while the as-received InP(1 0 0) surface generated metallic In about 60 nm in diameter.

Links toward previous steps (curation, corpus...)

to stream Main, to step Corpus: 004A30

Links to Exploration step

Pascal:10-0075168

Le document en format XML

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<profileDesc><textClass><keywords scheme="KwdEn" xml:lang="en"><term>Aluminium</term>
<term>Arrays</term>
<term>Droplets</term>
<term>III-V semiconductors</term>
<term>Indium</term>
<term>Indium phosphide</term>
<term>Inorganic compounds</term>
<term>Ion beams</term>
<term>Scanning electron microscopy</term>
<term>Sputtering</term>
<term>X-ray photoelectron spectra</term>
</keywords>
<keywords scheme="Pascal" xml:lang="fr"><term>Microscopie électronique balayage</term>
<term>Spectre photoélectron RX</term>
<term>Réseau(arrangement)</term>
<term>Semiconducteur III-V</term>
<term>Pulvérisation irradiation</term>
<term>Aluminium</term>
<term>Indium</term>
<term>Gouttelette</term>
<term>Faisceau ion</term>
<term>Phosphure d'indium</term>
<term>In P</term>
<term>InP</term>
<term>Al</term>
<term>Composé minéral</term>
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<front><div type="abstract" xml:lang="en">The aim of the present study is to demonstrate the feasibility to form well-ordered nanoholes on InP(1 0 0) surfaces by low Ar<sup>+</sup>
 ion sputtering process in UHV conditions from anodized aluminum oxide (AAO) templates. This process is a promising approach in creating ordered arrays of surface nanostructures with controllable size and morphology. To follow the Ar<sup>+</sup>
 ion sputtering effects on the AAO/InP surfaces, X-ray photoelectron spectroscopy (XPS) was used to determine the different surface species. In<sub>4d</sub>
 and P<sub>2p</sub>
 core level spectra were recorded on different InP(1 00) surfaces after ions bombardment. XPS results showed the presence of metallic indium on both smooth InP(1 0 0) and AAO/InP(1 0 0) surfaces. Finally, we showed that this experiment led to the formation of metallic In dropplets about 10 nm in diameter on nanoholes patterned InP surface while the as-received InP(1 0 0) surface generated metallic In about 60 nm in diameter.</div>
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<fC01 i1="01" l="ENG"><s0>The aim of the present study is to demonstrate the feasibility to form well-ordered nanoholes on InP(1 0 0) surfaces by low Ar<sup>+</sup>
 ion sputtering process in UHV conditions from anodized aluminum oxide (AAO) templates. This process is a promising approach in creating ordered arrays of surface nanostructures with controllable size and morphology. To follow the Ar<sup>+</sup>
 ion sputtering effects on the AAO/InP surfaces, X-ray photoelectron spectroscopy (XPS) was used to determine the different surface species. In<sub>4d</sub>
 and P<sub>2p</sub>
 core level spectra were recorded on different InP(1 00) surfaces after ions bombardment. XPS results showed the presence of metallic indium on both smooth InP(1 0 0) and AAO/InP(1 0 0) surfaces. Finally, we showed that this experiment led to the formation of metallic In dropplets about 10 nm in diameter on nanoholes patterned InP surface while the as-received InP(1 0 0) surface generated metallic In about 60 nm in diameter.</s0>
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	Serveur d'exploration sur l'Indium
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Serveur d'exploration sur l'Indium

SEM and XPS studies of nanohole arrays on InP(1 0 0) surfaces created by coupling AAO templates and low energy Ar+ ion sputtering

SEM and XPS studies of nanohole arrays on InP(1 0 0) surfaces created by coupling AAO templates and low energy Ar+ ion sputtering

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