AustralieFrV1, Main, Curation, bibRecord, 007430

Ultrafast Bessel beams for high aspect ratio taper free micromachining of glass

Identifieur interne : 007430 ( Main/Curation ); précédent : 007429; suivant : 007431

Ultrafast Bessel beams for high aspect ratio taper free micromachining of glass

Auteurs : M. K. Bhuyan [France] ; F. Courvoisier [France] ; P.-A. Lacourt [France] ; M. Jacquot [France] ; L. Furfaro [France] ; M. J. Withford [Australie] ; J. M. Dudley [France]

Source :

Proceedings of SPIE, the International Society for Optical Engineering [ 0277-786X ] ; 2010.

RBID : Pascal:11-0013881

Descripteurs français

Pascal (Inist)
- Microusinage, Optique ultrarapide, Traitement par laser, Modulateur optique spatial, Application laser, Optique non linéaire, Positionnement, Faisceau Bessel, Faisceau gaussien, Eau, Verre, Matériau diélectrique, Microfluidique, DNA, 0130C, 4265, 4279H, 4265R, 4785N, 8783, 4262C, Laboratoire sur puce.
Wicri :
- topic : Eau, Verre.

English descriptors

KwdEn :
- Bessel beam, DNA, Dielectric materials, Gaussian beam, Glass, Lab-on-a-chip, Laser assisted processing, Laser beam applications, Microfluidics, Micromachining, Nonlinear optics, Positioning, Spatial light modulators, Ultrafast optics, Water.

Abstract

Although ultrafast lasers have demonstrated much success in structuring and ablating dielectrics on the micrometer scale and below, high aspect ratio structuring remains a challenge. Specifically, microfluidics or lab-on-chip DNA sequencing systems require high aspect ratio sub-10 μm wide channels with no taper. Micro-dicing also requires machining with vertical walls. Backside water assisted ultrafast laser processing with Gaussian beams allows the production of high aspect ratio microchannels but requires sub-micron sample positioning and precise control of translation velocity. In this context, we propose a new approach based on Bessel beams that exhibit a focal range exceeding the Rayleigh range by over one order of magnitude. An SLM-based setup allows us to produce a Bessel beam with central core diameter of 1.5 μm FWHM extending over a longitudinal range of 150 μm. A working window in the parameter space has been identified that allows the reliable production of high aspect ratio taper-free microchannels without sample translation. We report a systematic investigation of the damage morphology dependence on focusing geometry and energy per pulse.

Links toward previous steps (curation, corpus...)

to stream PascalFrancis, to step Corpus: Pour aller vers cette notice dans l'étape Curation :002147
to stream PascalFrancis, to step Curation: Pour aller vers cette notice dans l'étape Curation :003D80
to stream PascalFrancis, to step Checkpoint: Pour aller vers cette notice dans l'étape Curation :001F02
to stream Main, to step Merge: Pour aller vers cette notice dans l'étape Curation :007970

Links to Exploration step

Pascal:11-0013881

Le document en format XML

<record><TEI><teiHeader><fileDesc><titleStmt><title xml:lang="en" level="a">Ultrafast Bessel beams for high aspect ratio taper free micromachining of glass</title>
<author><name sortKey="Bhuyan, M K" sort="Bhuyan, M K" uniqKey="Bhuyan M" first="M. K." last="Bhuyan">M. K. Bhuyan</name>
<affiliation wicri:level="4"><inist:fA14 i1="01"><s1>FEMTO-ST Institute, Department of Optics P.M. Duffieux, UMR CNRS 6174, Université de Franche-Comté</s1>
<s2>25030 Besançon</s2>
<s3>FRA</s3>
<sZ>1 aut.</sZ>
<sZ>2 aut.</sZ>
<sZ>3 aut.</sZ>
<sZ>4 aut.</sZ>
<sZ>5 aut.</sZ>
<sZ>7 aut.</sZ>
</inist:fA14>
<country>France</country>
<placeName><region type="region" nuts="2">Bourgogne-Franche-Comté</region>
<region type="old region" nuts="2">Franche-Comté</region>
<settlement type="city">Besançon</settlement>
<settlement type="city" wicri:auto="siege">Besançon</settlement>
</placeName>
<orgName type="university">Université de Franche-Comté</orgName>
</affiliation>
</author>
<author><name sortKey="Courvoisier, F" sort="Courvoisier, F" uniqKey="Courvoisier F" first="F." last="Courvoisier">F. Courvoisier</name>
<affiliation wicri:level="4"><inist:fA14 i1="01"><s1>FEMTO-ST Institute, Department of Optics P.M. Duffieux, UMR CNRS 6174, Université de Franche-Comté</s1>
<s2>25030 Besançon</s2>
<s3>FRA</s3>
<sZ>1 aut.</sZ>
<sZ>2 aut.</sZ>
<sZ>3 aut.</sZ>
<sZ>4 aut.</sZ>
<sZ>5 aut.</sZ>
<sZ>7 aut.</sZ>
</inist:fA14>
<country>France</country>
<wicri:noRegion>25030 Besançon</wicri:noRegion>
<wicri:noRegion>Université de Franche-Comté</wicri:noRegion>
<placeName><settlement type="city" wicri:auto="siege">Besançon</settlement>
<region type="region" nuts="2">Franche-Comté</region>
</placeName>
<orgName type="university">Université de Franche-Comté</orgName>
<orgName type="institution" wicri:auto="newGroup">Université de Bourgogne Franche-Comté</orgName>
</affiliation>
</author>
<author><name sortKey="Lacourt, P A" sort="Lacourt, P A" uniqKey="Lacourt P" first="P.-A." last="Lacourt">P.-A. Lacourt</name>
<affiliation wicri:level="4"><inist:fA14 i1="01"><s1>FEMTO-ST Institute, Department of Optics P.M. Duffieux, UMR CNRS 6174, Université de Franche-Comté</s1>
<s2>25030 Besançon</s2>
<s3>FRA</s3>
<sZ>1 aut.</sZ>
<sZ>2 aut.</sZ>
<sZ>3 aut.</sZ>
<sZ>4 aut.</sZ>
<sZ>5 aut.</sZ>
<sZ>7 aut.</sZ>
</inist:fA14>
<country>France</country>
<placeName><region type="region" nuts="2">Bourgogne-Franche-Comté</region>
<region type="old region" nuts="2">Franche-Comté</region>
<settlement type="city">Besançon</settlement>
<settlement type="city" wicri:auto="siege">Besançon</settlement>
</placeName>
<orgName type="university">Université de Franche-Comté</orgName>
</affiliation>
</author>
<author><name sortKey="Jacquot, M" sort="Jacquot, M" uniqKey="Jacquot M" first="M." last="Jacquot">M. Jacquot</name>
<affiliation wicri:level="4"><inist:fA14 i1="01"><s1>FEMTO-ST Institute, Department of Optics P.M. Duffieux, UMR CNRS 6174, Université de Franche-Comté</s1>
<s2>25030 Besançon</s2>
<s3>FRA</s3>
<sZ>1 aut.</sZ>
<sZ>2 aut.</sZ>
<sZ>3 aut.</sZ>
<sZ>4 aut.</sZ>
<sZ>5 aut.</sZ>
<sZ>7 aut.</sZ>
</inist:fA14>
<country>France</country>
<wicri:noRegion>25030 Besançon</wicri:noRegion>
<wicri:noRegion>Université de Franche-Comté</wicri:noRegion>
<placeName><settlement type="city" wicri:auto="siege">Besançon</settlement>
<region type="region" nuts="2">Franche-Comté</region>
</placeName>
<orgName type="university">Université de Franche-Comté</orgName>
<orgName type="institution" wicri:auto="newGroup">Université de Bourgogne Franche-Comté</orgName>
</affiliation>
</author>
<author><name sortKey="Furfaro, L" sort="Furfaro, L" uniqKey="Furfaro L" first="L." last="Furfaro">L. Furfaro</name>
<affiliation wicri:level="4"><inist:fA14 i1="01"><s1>FEMTO-ST Institute, Department of Optics P.M. Duffieux, UMR CNRS 6174, Université de Franche-Comté</s1>
<s2>25030 Besançon</s2>
<s3>FRA</s3>
<sZ>1 aut.</sZ>
<sZ>2 aut.</sZ>
<sZ>3 aut.</sZ>
<sZ>4 aut.</sZ>
<sZ>5 aut.</sZ>
<sZ>7 aut.</sZ>
</inist:fA14>
<country>France</country>
<placeName><region type="region" nuts="2">Bourgogne-Franche-Comté</region>
<region type="old region" nuts="2">Franche-Comté</region>
<settlement type="city">Besançon</settlement>
<settlement type="city" wicri:auto="siege">Besançon</settlement>
</placeName>
<orgName type="university">Université de Franche-Comté</orgName>
</affiliation>
</author>
<author><name sortKey="Withford, M J" sort="Withford, M J" uniqKey="Withford M" first="M. J." last="Withford">M. J. Withford</name>
<affiliation wicri:level="1"><inist:fA14 i1="02"><s1>CUDOS and MQ Photonics, Department of Physics, Macquarie University</s1>
<s2>New South Wales, 2109</s2>
<s3>AUS</s3>
<sZ>6 aut.</sZ>
</inist:fA14>
<country>Australie</country>
<wicri:noRegion>New South Wales, 2109</wicri:noRegion>
</affiliation>
</author>
<author><name sortKey="Dudley, J M" sort="Dudley, J M" uniqKey="Dudley J" first="J. M." last="Dudley">J. M. Dudley</name>
<affiliation wicri:level="4"><inist:fA14 i1="01"><s1>FEMTO-ST Institute, Department of Optics P.M. Duffieux, UMR CNRS 6174, Université de Franche-Comté</s1>
<s2>25030 Besançon</s2>
<s3>FRA</s3>
<sZ>1 aut.</sZ>
<sZ>2 aut.</sZ>
<sZ>3 aut.</sZ>
<sZ>4 aut.</sZ>
<sZ>5 aut.</sZ>
<sZ>7 aut.</sZ>
</inist:fA14>
<country>France</country>
<wicri:noRegion>25030 Besançon</wicri:noRegion>
<wicri:noRegion>Université de Franche-Comté</wicri:noRegion>
<placeName><settlement type="city" wicri:auto="siege">Besançon</settlement>
<region type="region" nuts="2">Franche-Comté</region>
</placeName>
<orgName type="university">Université de Franche-Comté</orgName>
<orgName type="institution" wicri:auto="newGroup">Université de Bourgogne Franche-Comté</orgName>
</affiliation>
</author>
</titleStmt>
<publicationStmt><idno type="wicri:source">INIST</idno>
<idno type="inist">11-0013881</idno>
<date when="2010">2010</date>
<idno type="stanalyst">PASCAL 11-0013881 INIST</idno>
<idno type="RBID">Pascal:11-0013881</idno>
<idno type="wicri:Area/PascalFrancis/Corpus">002147</idno>
<idno type="wicri:Area/PascalFrancis/Curation">003D80</idno>
<idno type="wicri:Area/PascalFrancis/Checkpoint">001F02</idno>
<idno type="wicri:explorRef" wicri:stream="PascalFrancis" wicri:step="Checkpoint">001F02</idno>
<idno type="wicri:doubleKey">0277-786X:2010:Bhuyan M:ultrafast:bessel:beams</idno>
<idno type="wicri:Area/Main/Merge">007970</idno>
<idno type="wicri:Area/Main/Curation">007430</idno>
</publicationStmt>
<sourceDesc><biblStruct><analytic><title xml:lang="en" level="a">Ultrafast Bessel beams for high aspect ratio taper free micromachining of glass</title>
<author><name sortKey="Bhuyan, M K" sort="Bhuyan, M K" uniqKey="Bhuyan M" first="M. K." last="Bhuyan">M. K. Bhuyan</name>
<affiliation wicri:level="4"><inist:fA14 i1="01"><s1>FEMTO-ST Institute, Department of Optics P.M. Duffieux, UMR CNRS 6174, Université de Franche-Comté</s1>
<s2>25030 Besançon</s2>
<s3>FRA</s3>
<sZ>1 aut.</sZ>
<sZ>2 aut.</sZ>
<sZ>3 aut.</sZ>
<sZ>4 aut.</sZ>
<sZ>5 aut.</sZ>
<sZ>7 aut.</sZ>
</inist:fA14>
<country>France</country>
<placeName><region type="region" nuts="2">Bourgogne-Franche-Comté</region>
<region type="old region" nuts="2">Franche-Comté</region>
<settlement type="city">Besançon</settlement>
<settlement type="city" wicri:auto="siege">Besançon</settlement>
</placeName>
<orgName type="university">Université de Franche-Comté</orgName>
</affiliation>
</author>
<author><name sortKey="Courvoisier, F" sort="Courvoisier, F" uniqKey="Courvoisier F" first="F." last="Courvoisier">F. Courvoisier</name>
<affiliation wicri:level="4"><inist:fA14 i1="01"><s1>FEMTO-ST Institute, Department of Optics P.M. Duffieux, UMR CNRS 6174, Université de Franche-Comté</s1>
<s2>25030 Besançon</s2>
<s3>FRA</s3>
<sZ>1 aut.</sZ>
<sZ>2 aut.</sZ>
<sZ>3 aut.</sZ>
<sZ>4 aut.</sZ>
<sZ>5 aut.</sZ>
<sZ>7 aut.</sZ>
</inist:fA14>
<country>France</country>
<wicri:noRegion>25030 Besançon</wicri:noRegion>
<wicri:noRegion>Université de Franche-Comté</wicri:noRegion>
<placeName><settlement type="city" wicri:auto="siege">Besançon</settlement>
<region type="region" nuts="2">Franche-Comté</region>
</placeName>
<orgName type="university">Université de Franche-Comté</orgName>
<orgName type="institution" wicri:auto="newGroup">Université de Bourgogne Franche-Comté</orgName>
</affiliation>
</author>
<author><name sortKey="Lacourt, P A" sort="Lacourt, P A" uniqKey="Lacourt P" first="P.-A." last="Lacourt">P.-A. Lacourt</name>
<affiliation wicri:level="4"><inist:fA14 i1="01"><s1>FEMTO-ST Institute, Department of Optics P.M. Duffieux, UMR CNRS 6174, Université de Franche-Comté</s1>
<s2>25030 Besançon</s2>
<s3>FRA</s3>
<sZ>1 aut.</sZ>
<sZ>2 aut.</sZ>
<sZ>3 aut.</sZ>
<sZ>4 aut.</sZ>
<sZ>5 aut.</sZ>
<sZ>7 aut.</sZ>
</inist:fA14>
<country>France</country>
<placeName><region type="region" nuts="2">Bourgogne-Franche-Comté</region>
<region type="old region" nuts="2">Franche-Comté</region>
<settlement type="city">Besançon</settlement>
<settlement type="city" wicri:auto="siege">Besançon</settlement>
</placeName>
<orgName type="university">Université de Franche-Comté</orgName>
</affiliation>
</author>
<author><name sortKey="Jacquot, M" sort="Jacquot, M" uniqKey="Jacquot M" first="M." last="Jacquot">M. Jacquot</name>
<affiliation wicri:level="4"><inist:fA14 i1="01"><s1>FEMTO-ST Institute, Department of Optics P.M. Duffieux, UMR CNRS 6174, Université de Franche-Comté</s1>
<s2>25030 Besançon</s2>
<s3>FRA</s3>
<sZ>1 aut.</sZ>
<sZ>2 aut.</sZ>
<sZ>3 aut.</sZ>
<sZ>4 aut.</sZ>
<sZ>5 aut.</sZ>
<sZ>7 aut.</sZ>
</inist:fA14>
<country>France</country>
<wicri:noRegion>25030 Besançon</wicri:noRegion>
<wicri:noRegion>Université de Franche-Comté</wicri:noRegion>
<placeName><settlement type="city" wicri:auto="siege">Besançon</settlement>
<region type="region" nuts="2">Franche-Comté</region>
</placeName>
<orgName type="university">Université de Franche-Comté</orgName>
<orgName type="institution" wicri:auto="newGroup">Université de Bourgogne Franche-Comté</orgName>
</affiliation>
</author>
<author><name sortKey="Furfaro, L" sort="Furfaro, L" uniqKey="Furfaro L" first="L." last="Furfaro">L. Furfaro</name>
<affiliation wicri:level="4"><inist:fA14 i1="01"><s1>FEMTO-ST Institute, Department of Optics P.M. Duffieux, UMR CNRS 6174, Université de Franche-Comté</s1>
<s2>25030 Besançon</s2>
<s3>FRA</s3>
<sZ>1 aut.</sZ>
<sZ>2 aut.</sZ>
<sZ>3 aut.</sZ>
<sZ>4 aut.</sZ>
<sZ>5 aut.</sZ>
<sZ>7 aut.</sZ>
</inist:fA14>
<country>France</country>
<placeName><region type="region" nuts="2">Bourgogne-Franche-Comté</region>
<region type="old region" nuts="2">Franche-Comté</region>
<settlement type="city">Besançon</settlement>
<settlement type="city" wicri:auto="siege">Besançon</settlement>
</placeName>
<orgName type="university">Université de Franche-Comté</orgName>
</affiliation>
</author>
<author><name sortKey="Withford, M J" sort="Withford, M J" uniqKey="Withford M" first="M. J." last="Withford">M. J. Withford</name>
<affiliation wicri:level="1"><inist:fA14 i1="02"><s1>CUDOS and MQ Photonics, Department of Physics, Macquarie University</s1>
<s2>New South Wales, 2109</s2>
<s3>AUS</s3>
<sZ>6 aut.</sZ>
</inist:fA14>
<country>Australie</country>
<wicri:noRegion>New South Wales, 2109</wicri:noRegion>
</affiliation>
</author>
<author><name sortKey="Dudley, J M" sort="Dudley, J M" uniqKey="Dudley J" first="J. M." last="Dudley">J. M. Dudley</name>
<affiliation wicri:level="4"><inist:fA14 i1="01"><s1>FEMTO-ST Institute, Department of Optics P.M. Duffieux, UMR CNRS 6174, Université de Franche-Comté</s1>
<s2>25030 Besançon</s2>
<s3>FRA</s3>
<sZ>1 aut.</sZ>
<sZ>2 aut.</sZ>
<sZ>3 aut.</sZ>
<sZ>4 aut.</sZ>
<sZ>5 aut.</sZ>
<sZ>7 aut.</sZ>
</inist:fA14>
<country>France</country>
<wicri:noRegion>25030 Besançon</wicri:noRegion>
<wicri:noRegion>Université de Franche-Comté</wicri:noRegion>
<placeName><settlement type="city" wicri:auto="siege">Besançon</settlement>
<region type="region" nuts="2">Franche-Comté</region>
</placeName>
<orgName type="university">Université de Franche-Comté</orgName>
<orgName type="institution" wicri:auto="newGroup">Université de Bourgogne Franche-Comté</orgName>
</affiliation>
</author>
</analytic>
<series><title level="j" type="main">Proceedings of SPIE, the International Society for Optical Engineering</title>
<title level="j" type="abbreviated">Proc. SPIE Int. Soc. Opt. Eng.</title>
<idno type="ISSN">0277-786X</idno>
<imprint><date when="2010">2010</date>
</imprint>
</series>
</biblStruct>
</sourceDesc>
<seriesStmt><title level="j" type="main">Proceedings of SPIE, the International Society for Optical Engineering</title>
<title level="j" type="abbreviated">Proc. SPIE Int. Soc. Opt. Eng.</title>
<idno type="ISSN">0277-786X</idno>
</seriesStmt>
</fileDesc>
<profileDesc><textClass><keywords scheme="KwdEn" xml:lang="en"><term>Bessel beam</term>
<term>DNA</term>
<term>Dielectric materials</term>
<term>Gaussian beam</term>
<term>Glass</term>
<term>Lab-on-a-chip</term>
<term>Laser assisted processing</term>
<term>Laser beam applications</term>
<term>Microfluidics</term>
<term>Micromachining</term>
<term>Nonlinear optics</term>
<term>Positioning</term>
<term>Spatial light modulators</term>
<term>Ultrafast optics</term>
<term>Water</term>
</keywords>
<keywords scheme="Pascal" xml:lang="fr"><term>Microusinage</term>
<term>Optique ultrarapide</term>
<term>Traitement par laser</term>
<term>Modulateur optique spatial</term>
<term>Application laser</term>
<term>Optique non linéaire</term>
<term>Positionnement</term>
<term>Faisceau Bessel</term>
<term>Faisceau gaussien</term>
<term>Eau</term>
<term>Verre</term>
<term>Matériau diélectrique</term>
<term>Microfluidique</term>
<term>DNA</term>
<term>0130C</term>
<term>4265</term>
<term>4279H</term>
<term>4265R</term>
<term>4785N</term>
<term>8783</term>
<term>4262C</term>
<term>Laboratoire sur puce</term>
</keywords>
<keywords scheme="Wicri" type="topic" xml:lang="fr"><term>Eau</term>
<term>Verre</term>
</keywords>
</textClass>
</profileDesc>
</teiHeader>
<front><div type="abstract" xml:lang="en">Although ultrafast lasers have demonstrated much success in structuring and ablating dielectrics on the micrometer scale and below, high aspect ratio structuring remains a challenge. Specifically, microfluidics or lab-on-chip DNA sequencing systems require high aspect ratio sub-10 μm wide channels with no taper. Micro-dicing also requires machining with vertical walls. Backside water assisted ultrafast laser processing with Gaussian beams allows the production of high aspect ratio microchannels but requires sub-micron sample positioning and precise control of translation velocity. In this context, we propose a new approach based on Bessel beams that exhibit a focal range exceeding the Rayleigh range by over one order of magnitude. An SLM-based setup allows us to produce a Bessel beam with central core diameter of 1.5 μm FWHM extending over a longitudinal range of 150 μm. A working window in the parameter space has been identified that allows the reliable production of high aspect ratio taper-free microchannels without sample translation. We report a systematic investigation of the damage morphology dependence on focusing geometry and energy per pulse.</div>
</front>
</TEI>
</record>

Pour manipuler ce document sous Unix (Dilib)

EXPLOR_STEP=$WICRI_ROOT/Wicri/Asie/explor/AustralieFrV1/Data/Main/Curation

HfdSelect -h $EXPLOR_STEP/biblio.hfd -nk 007430 | SxmlIndent | more

HfdSelect -h $EXPLOR_AREA/Data/Main/Curation/biblio.hfd -nk 007430 | SxmlIndent | more

Pour mettre un lien sur cette page dans le réseau Wicri

{{Explor lien
   |wiki=    Wicri/Asie
   |area=    AustralieFrV1
   |flux=    Main
   |étape=   Curation
   |type=    RBID
   |clé=     Pascal:11-0013881
   |texte=   Ultrafast Bessel beams for high aspect ratio taper free micromachining of glass
}}

This area was generated with Dilib version V0.6.33.
Data generation: Tue Dec 5 10:43:12 2017. Site generation: Tue Mar 5 14:07:20 2024

	Serveur d'exploration sur les relations entre la France et l'Australie
	Attention, ce site est en cours de développement ! Attention, site généré par des moyens informatiques à partir de corpus bruts. Les informations ne sont donc pas validées.

Serveur d'exploration sur les relations entre la France et l'Australie

Ultrafast Bessel beams for high aspect ratio taper free micromachining of glass

Ultrafast Bessel beams for high aspect ratio taper free micromachining of glass

Source :

Descripteurs français

English descriptors

Abstract

Links toward previous steps (curation, corpus...)

Links to Exploration step

Le document en format XML

Pour manipuler ce document sous Unix (Dilib)

Pour mettre un lien sur cette page dans le réseau Wicri