Ultrafast Bessel beams for high aspect ratio taper free micromachining of glass
Identifieur interne : 007430 ( Main/Curation ); précédent : 007429; suivant : 007431Ultrafast Bessel beams for high aspect ratio taper free micromachining of glass
Auteurs : M. K. Bhuyan [France] ; F. Courvoisier [France] ; P.-A. Lacourt [France] ; M. Jacquot [France] ; L. Furfaro [France] ; M. J. Withford [Australie] ; J. M. Dudley [France]Source :
- Proceedings of SPIE, the International Society for Optical Engineering [ 0277-786X ] ; 2010.
Descripteurs français
- Pascal (Inist)
- Microusinage, Optique ultrarapide, Traitement par laser, Modulateur optique spatial, Application laser, Optique non linéaire, Positionnement, Faisceau Bessel, Faisceau gaussien, Eau, Verre, Matériau diélectrique, Microfluidique, DNA, 0130C, 4265, 4279H, 4265R, 4785N, 8783, 4262C, Laboratoire sur puce.
- Wicri :
English descriptors
- KwdEn :
Abstract
Although ultrafast lasers have demonstrated much success in structuring and ablating dielectrics on the micrometer scale and below, high aspect ratio structuring remains a challenge. Specifically, microfluidics or lab-on-chip DNA sequencing systems require high aspect ratio sub-10 μm wide channels with no taper. Micro-dicing also requires machining with vertical walls. Backside water assisted ultrafast laser processing with Gaussian beams allows the production of high aspect ratio microchannels but requires sub-micron sample positioning and precise control of translation velocity. In this context, we propose a new approach based on Bessel beams that exhibit a focal range exceeding the Rayleigh range by over one order of magnitude. An SLM-based setup allows us to produce a Bessel beam with central core diameter of 1.5 μm FWHM extending over a longitudinal range of 150 μm. A working window in the parameter space has been identified that allows the reliable production of high aspect ratio taper-free microchannels without sample translation. We report a systematic investigation of the damage morphology dependence on focusing geometry and energy per pulse.
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<profileDesc><textClass><keywords scheme="KwdEn" xml:lang="en"><term>Bessel beam</term>
<term>DNA</term>
<term>Dielectric materials</term>
<term>Gaussian beam</term>
<term>Glass</term>
<term>Lab-on-a-chip</term>
<term>Laser assisted processing</term>
<term>Laser beam applications</term>
<term>Microfluidics</term>
<term>Micromachining</term>
<term>Nonlinear optics</term>
<term>Positioning</term>
<term>Spatial light modulators</term>
<term>Ultrafast optics</term>
<term>Water</term>
</keywords>
<keywords scheme="Pascal" xml:lang="fr"><term>Microusinage</term>
<term>Optique ultrarapide</term>
<term>Traitement par laser</term>
<term>Modulateur optique spatial</term>
<term>Application laser</term>
<term>Optique non linéaire</term>
<term>Positionnement</term>
<term>Faisceau Bessel</term>
<term>Faisceau gaussien</term>
<term>Eau</term>
<term>Verre</term>
<term>Matériau diélectrique</term>
<term>Microfluidique</term>
<term>DNA</term>
<term>0130C</term>
<term>4265</term>
<term>4279H</term>
<term>4265R</term>
<term>4785N</term>
<term>8783</term>
<term>4262C</term>
<term>Laboratoire sur puce</term>
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<front><div type="abstract" xml:lang="en">Although ultrafast lasers have demonstrated much success in structuring and ablating dielectrics on the micrometer scale and below, high aspect ratio structuring remains a challenge. Specifically, microfluidics or lab-on-chip DNA sequencing systems require high aspect ratio sub-10 μm wide channels with no taper. Micro-dicing also requires machining with vertical walls. Backside water assisted ultrafast laser processing with Gaussian beams allows the production of high aspect ratio microchannels but requires sub-micron sample positioning and precise control of translation velocity. In this context, we propose a new approach based on Bessel beams that exhibit a focal range exceeding the Rayleigh range by over one order of magnitude. An SLM-based setup allows us to produce a Bessel beam with central core diameter of 1.5 μm FWHM extending over a longitudinal range of 150 μm. A working window in the parameter space has been identified that allows the reliable production of high aspect ratio taper-free microchannels without sample translation. We report a systematic investigation of the damage morphology dependence on focusing geometry and energy per pulse.</div>
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