Hydrogen interaction on metal/hydrogenated amorphous silicon schottky structures: adsorption/desorption effects
Identifieur interne : 000411 ( PascalFrancis/Checkpoint ); précédent : 000410; suivant : 000412Hydrogen interaction on metal/hydrogenated amorphous silicon schottky structures: adsorption/desorption effects
Auteurs : K. Laïhem [Algérie] ; R. Cherfi [Algérie] ; M. Aoucher [Algérie]Source :
- Thin solid films [ 0040-6090 ] ; 2001.
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- Pascal (Inist)
- Wicri :
English descriptors
- KwdEn :
Abstract
In this work we study metal/hydrogenated amorphous silicon structures (metal/a-Si:H). The a-Si:H is deposited at a high rate by DC magnetron sputtering on N-type doped silicon substrate. The metal is deposited by DC sputtering on the a-Si:H. Nickel, magnesium and platinum are used. The current-voltage (I-V) curves show a rectifying contact. The hydrogen is injected in the vacuum chamber at low pressure (1 mbar) to interact with the metal/a-Si:H structure. The interaction effect is observed on the I-V characteristics and on the complex impedance behavior. These effects may be explained by a thermal activation of hydrogen adsorption/desorption phenomena which is localized in the interfacial zone. The hydrogen is chemisorbed in the interfacial zone and modifies its electrical charge.
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Pascal:01-0325373Le document en format XML
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<series><title level="j" type="main">Thin solid films</title>
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<idno type="ISSN">0040-6090</idno>
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<term>Amorphous hydrogenated material</term>
<term>Desorption</term>
<term>Experimental study</term>
<term>Hydrogen</term>
<term>IV characteristic</term>
<term>Magnesium</term>
<term>Metal-semiconductor contacts</term>
<term>Nickel</term>
<term>Platinum</term>
<term>Rectification</term>
<term>Schottky barrier diodes</term>
</keywords>
<keywords scheme="Pascal" xml:lang="fr"><term>Etude expérimentale</term>
<term>Contact métal semiconducteur</term>
<term>Caractéristique courant tension</term>
<term>Effet redresseur</term>
<term>Matériau amorphe hydrogéné</term>
<term>Nickel</term>
<term>Magnésium</term>
<term>Platine</term>
<term>Diode barrière Schottky</term>
<term>Adsorption</term>
<term>Désorption</term>
<term>Hydrogène</term>
<term>7330</term>
<term>7340E</term>
<term>Ni</term>
<term>Mg</term>
<term>Pt</term>
<term>a-Si:H</term>
</keywords>
<keywords scheme="Wicri" type="topic" xml:lang="fr"><term>Nickel</term>
<term>Magnésium</term>
<term>Platine</term>
<term>Hydrogène</term>
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<front><div type="abstract" xml:lang="en">In this work we study metal/hydrogenated amorphous silicon structures (metal/a-Si:H). The a-Si:H is deposited at a high rate by DC magnetron sputtering on N-type doped silicon substrate. The metal is deposited by DC sputtering on the a-Si:H. Nickel, magnesium and platinum are used. The current-voltage (I-V) curves show a rectifying contact. The hydrogen is injected in the vacuum chamber at low pressure (1 mbar) to interact with the metal/a-Si:H structure. The interaction effect is observed on the I-V characteristics and on the complex impedance behavior. These effects may be explained by a thermal activation of hydrogen adsorption/desorption phenomena which is localized in the interfacial zone. The hydrogen is chemisorbed in the interfacial zone and modifies its electrical charge.</div>
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<fA08 i1="01" i2="1" l="ENG"><s1>Hydrogen interaction on metal/hydrogenated amorphous silicon schottky structures: adsorption/desorption effects</s1>
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<fA09 i1="01" i2="1" l="ENG"><s1>Proceedings of Symposium O on Thin Film Materials for Large Area Electronics of the E-MRS 2000 Spring Conference, Strasbourg, France, May 30-June 2, 2000</s1>
</fA09>
<fA11 i1="01" i2="1"><s1>LAÏHEM (K.)</s1>
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<fA11 i1="02" i2="1"><s1>CHERFI (R.)</s1>
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<fA11 i1="03" i2="1"><s1>AOUCHER (M.)</s1>
</fA11>
<fA12 i1="01" i2="1"><s1>EQUER (Bernard)</s1>
<s9>ed.</s9>
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<fA12 i1="02" i2="1"><s1>ROCA I CABARROCAS (Pere)</s1>
<s9>ed.</s9>
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<s9>ed.</s9>
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<fA12 i1="04" i2="1"><s1>ROBERTSON (J.)</s1>
<s9>ed.</s9>
</fA12>
<fA12 i1="05" i2="1"><s1>BUERKLE (R.)</s1>
<s9>ed.</s9>
</fA12>
<fA14 i1="01"><s1>Laboratoire des Couches Minces et des Semiconducteurs, Institut de Physique, USTHB, BP 32 El Alia</s1>
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<s3>DZA</s3>
<sZ>1 aut.</sZ>
<sZ>2 aut.</sZ>
<sZ>3 aut.</sZ>
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<fA15 i1="01"><s1>LPICM, Ecole Polytechnique</s1>
<s2>91128 Palaiseau</s2>
<s3>FRA</s3>
<sZ>1 aut.</sZ>
<sZ>2 aut.</sZ>
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<fA18 i1="01" i2="1"><s1>European Material Research Society</s1>
<s3>EUR</s3>
<s9>patr.</s9>
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<fA20><s1>264-266</s1>
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<fA21><s1>2001</s1>
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<fA60><s1>P</s1>
<s2>C</s2>
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</fA66>
<fC01 i1="01" l="ENG"><s0>In this work we study metal/hydrogenated amorphous silicon structures (metal/a-Si:H). The a-Si:H is deposited at a high rate by DC magnetron sputtering on N-type doped silicon substrate. The metal is deposited by DC sputtering on the a-Si:H. Nickel, magnesium and platinum are used. The current-voltage (I-V) curves show a rectifying contact. The hydrogen is injected in the vacuum chamber at low pressure (1 mbar) to interact with the metal/a-Si:H structure. The interaction effect is observed on the I-V characteristics and on the complex impedance behavior. These effects may be explained by a thermal activation of hydrogen adsorption/desorption phenomena which is localized in the interfacial zone. The hydrogen is chemisorbed in the interfacial zone and modifies its electrical charge.</s0>
</fC01>
<fC02 i1="01" i2="3"><s0>001B70C30</s0>
</fC02>
<fC02 i1="02" i2="3"><s0>001B70C40E</s0>
</fC02>
<fC03 i1="01" i2="3" l="FRE"><s0>Etude expérimentale</s0>
<s5>01</s5>
</fC03>
<fC03 i1="01" i2="3" l="ENG"><s0>Experimental study</s0>
<s5>01</s5>
</fC03>
<fC03 i1="02" i2="3" l="FRE"><s0>Contact métal semiconducteur</s0>
<s5>02</s5>
</fC03>
<fC03 i1="02" i2="3" l="ENG"><s0>Metal-semiconductor contacts</s0>
<s5>02</s5>
</fC03>
<fC03 i1="03" i2="3" l="FRE"><s0>Caractéristique courant tension</s0>
<s5>03</s5>
</fC03>
<fC03 i1="03" i2="3" l="ENG"><s0>IV characteristic</s0>
<s5>03</s5>
</fC03>
<fC03 i1="04" i2="3" l="FRE"><s0>Effet redresseur</s0>
<s5>04</s5>
</fC03>
<fC03 i1="04" i2="3" l="ENG"><s0>Rectification</s0>
<s5>04</s5>
</fC03>
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<s5>05</s5>
</fC03>
<fC03 i1="05" i2="3" l="ENG"><s0>Amorphous hydrogenated material</s0>
<s5>05</s5>
</fC03>
<fC03 i1="06" i2="3" l="FRE"><s0>Nickel</s0>
<s2>NC</s2>
<s5>06</s5>
</fC03>
<fC03 i1="06" i2="3" l="ENG"><s0>Nickel</s0>
<s2>NC</s2>
<s5>06</s5>
</fC03>
<fC03 i1="07" i2="3" l="FRE"><s0>Magnésium</s0>
<s2>NC</s2>
<s5>07</s5>
</fC03>
<fC03 i1="07" i2="3" l="ENG"><s0>Magnesium</s0>
<s2>NC</s2>
<s5>07</s5>
</fC03>
<fC03 i1="08" i2="3" l="FRE"><s0>Platine</s0>
<s2>NC</s2>
<s5>08</s5>
</fC03>
<fC03 i1="08" i2="3" l="ENG"><s0>Platinum</s0>
<s2>NC</s2>
<s5>08</s5>
</fC03>
<fC03 i1="09" i2="3" l="FRE"><s0>Diode barrière Schottky</s0>
<s5>09</s5>
</fC03>
<fC03 i1="09" i2="3" l="ENG"><s0>Schottky barrier diodes</s0>
<s5>09</s5>
</fC03>
<fC03 i1="10" i2="3" l="FRE"><s0>Adsorption</s0>
<s5>10</s5>
</fC03>
<fC03 i1="10" i2="3" l="ENG"><s0>Adsorption</s0>
<s5>10</s5>
</fC03>
<fC03 i1="11" i2="3" l="FRE"><s0>Désorption</s0>
<s5>11</s5>
</fC03>
<fC03 i1="11" i2="3" l="ENG"><s0>Desorption</s0>
<s5>11</s5>
</fC03>
<fC03 i1="12" i2="3" l="FRE"><s0>Hydrogène</s0>
<s2>NC</s2>
<s5>12</s5>
</fC03>
<fC03 i1="12" i2="3" l="ENG"><s0>Hydrogen</s0>
<s2>NC</s2>
<s5>12</s5>
</fC03>
<fC03 i1="13" i2="3" l="FRE"><s0>7330</s0>
<s2>PAC</s2>
<s4>INC</s4>
<s5>56</s5>
</fC03>
<fC03 i1="14" i2="3" l="FRE"><s0>7340E</s0>
<s2>PAC</s2>
<s4>INC</s4>
<s5>57</s5>
</fC03>
<fC03 i1="15" i2="3" l="FRE"><s0>Ni</s0>
<s4>INC</s4>
<s5>92</s5>
</fC03>
<fC03 i1="16" i2="3" l="FRE"><s0>Mg</s0>
<s4>INC</s4>
<s5>93</s5>
</fC03>
<fC03 i1="17" i2="3" l="FRE"><s0>Pt</s0>
<s4>INC</s4>
<s5>94</s5>
</fC03>
<fC03 i1="18" i2="3" l="FRE"><s0>a-Si:H</s0>
<s4>INC</s4>
<s5>95</s5>
</fC03>
<fC07 i1="01" i2="3" l="FRE"><s0>Métal transition</s0>
<s5>16</s5>
</fC07>
<fC07 i1="01" i2="3" l="ENG"><s0>Transition elements</s0>
<s5>16</s5>
</fC07>
<fN21><s1>225</s1>
</fN21>
</pA>
<pR><fA30 i1="01" i2="1" l="ENG"><s1>Symposium on Thin Films for Large Area Electronics (LAE)</s1>
<s2>3</s2>
<s3>Strasbourg FRA</s3>
<s4>2000-06</s4>
</fA30>
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<affiliations><list><country><li>Algérie</li>
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<region><li>Wilaya d'Alger</li>
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<tree><country name="Algérie"><region name="Wilaya d'Alger"><name sortKey="Laihem, K" sort="Laihem, K" uniqKey="Laihem K" first="K." last="Laïhem">K. Laïhem</name>
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<name sortKey="Aoucher, M" sort="Aoucher, M" uniqKey="Aoucher M" first="M." last="Aoucher">M. Aoucher</name>
<name sortKey="Cherfi, R" sort="Cherfi, R" uniqKey="Cherfi R" first="R." last="Cherfi">R. Cherfi</name>
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