Sputtering effects in a helicon plasma with an additional immersed antenna
Identifieur interne : 00AE89 ( Main/Exploration ); précédent : 00AE88; suivant : 00AE90Sputtering effects in a helicon plasma with an additional immersed antenna
Auteurs :Source :
- Plasma Sources Science and Technology [ 0963-0252 ] ; 2003-02-01.
English descriptors
- KwdEn :
- Antenna, Antenna material, Antennae system, Axial distance, Clean source wall, Clean tube, Copper coating, Copper cylinder, Density jump, Diffusion chamber, Direct contact, Dramatic changes, Electron temperature, Faraday shield, Glass wall, Gure, Helicon, Helicon antenna, Helicon plasma, Helicon systems, Normal construction, Open diamonds, Phase difference, Plasma, Plasma density, Plasma parameters, Plasma research laboratory, Plasma sources, Same frequency, Second copper antenna, Small antenna, Source tube, Source wall, Sputtering effects, Technol, Thick coating, Thick copper coating, Thin copper coating, Total power input, Traditional helicon source, Wall conditions.
- Teeft :
- Antenna, Antenna material, Antennae system, Axial distance, Clean source wall, Clean tube, Copper coating, Copper cylinder, Density jump, Diffusion chamber, Direct contact, Dramatic changes, Electron temperature, Faraday shield, Glass wall, Gure, Helicon, Helicon antenna, Helicon plasma, Helicon systems, Normal construction, Open diamonds, Phase difference, Plasma, Plasma density, Plasma parameters, Plasma research laboratory, Plasma sources, Same frequency, Second copper antenna, Small antenna, Source tube, Source wall, Sputtering effects, Technol, Thick coating, Thick copper coating, Thin copper coating, Total power input, Traditional helicon source, Wall conditions.
Url:
DOI: 10.1088/0963-0252/12/1/311
Affiliations:
Links toward previous steps (curation, corpus...)
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- to stream Istex, to step Curation: 002820
- to stream Istex, to step Checkpoint: 001A95
- to stream Main, to step Merge: 00BC28
- to stream Main, to step Curation: 00AE89
Le document en format XML
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<term>Axial distance</term>
<term>Clean source wall</term>
<term>Clean tube</term>
<term>Copper coating</term>
<term>Copper cylinder</term>
<term>Density jump</term>
<term>Diffusion chamber</term>
<term>Direct contact</term>
<term>Dramatic changes</term>
<term>Electron temperature</term>
<term>Faraday shield</term>
<term>Glass wall</term>
<term>Gure</term>
<term>Helicon</term>
<term>Helicon antenna</term>
<term>Helicon plasma</term>
<term>Helicon systems</term>
<term>Normal construction</term>
<term>Open diamonds</term>
<term>Phase difference</term>
<term>Plasma</term>
<term>Plasma density</term>
<term>Plasma parameters</term>
<term>Plasma research laboratory</term>
<term>Plasma sources</term>
<term>Same frequency</term>
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<term>Small antenna</term>
<term>Source tube</term>
<term>Source wall</term>
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<term>Technol</term>
<term>Thick coating</term>
<term>Thick copper coating</term>
<term>Thin copper coating</term>
<term>Total power input</term>
<term>Traditional helicon source</term>
<term>Wall conditions</term>
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<term>Antenna material</term>
<term>Antennae system</term>
<term>Axial distance</term>
<term>Clean source wall</term>
<term>Clean tube</term>
<term>Copper coating</term>
<term>Copper cylinder</term>
<term>Density jump</term>
<term>Diffusion chamber</term>
<term>Direct contact</term>
<term>Dramatic changes</term>
<term>Electron temperature</term>
<term>Faraday shield</term>
<term>Glass wall</term>
<term>Gure</term>
<term>Helicon</term>
<term>Helicon antenna</term>
<term>Helicon plasma</term>
<term>Helicon systems</term>
<term>Normal construction</term>
<term>Open diamonds</term>
<term>Phase difference</term>
<term>Plasma</term>
<term>Plasma density</term>
<term>Plasma parameters</term>
<term>Plasma research laboratory</term>
<term>Plasma sources</term>
<term>Same frequency</term>
<term>Second copper antenna</term>
<term>Small antenna</term>
<term>Source tube</term>
<term>Source wall</term>
<term>Sputtering effects</term>
<term>Technol</term>
<term>Thick coating</term>
<term>Thick copper coating</term>
<term>Thin copper coating</term>
<term>Total power input</term>
<term>Traditional helicon source</term>
<term>Wall conditions</term>
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