Improvement of Beam Characteristics by Superimposing a Magnetic Field on a Field Emission Gun
Identifieur interne : 001C80 ( Istex/Corpus ); précédent : 001C79; suivant : 001C81Improvement of Beam Characteristics by Superimposing a Magnetic Field on a Field Emission Gun
Auteurs : Akio Takaoka ; Katsumi Ura ; Takeshi Tomita ; Yoshiyasu HaradaSource :
- Microscopy [ 0022-0744 ] ; 1989.
Abstract
We show analytically and experimentally how beam characteristics of a field emission gun (FEG) are improved by the superposition of a magnetic field. Especially, under the condition of the fixed position of the gun crossover, the relation between the radius of probe beam and the probe current on the specimen plane of a transmission microscope is investigated and the cases with and without the magnetic field are compared. The tested FEG is a tetrode FEG which operates in pulsed mode at 100 kV and the magnet is attached from the outside of the gun chamber. Owing to the structural restriction of the magnet size, the distribution of magnetic field becomes considerably broad, that is, the value of the full width at half-maximum is about 110 mm. When the peak value of the applied field is 17 mT, the measured current density at a high current region is improved by about twice in comparison with the case without magnetic field and this improvement factor roughly agrees with the calculated one. When the field intensity is increased up to 23 mT, the current density becomes further doubled analytically. The ray tracing shows that the reduction of the aberration results mainly from the confinement of trajectories to the axial region by the superimposed field. If the magnetic field with a peak field of 61 mT is concentrated in the cathode region, it is expected that the current density is improved by a factor of about 30 under the condition of the fixed current.
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DOI: 10.1093/oxfordjournals.jmicro.a050730
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Musashino 3-1-2, Akishima, Tokyo, 196 Japan</mods:affiliation></affiliation></author></analytic><monogr></monogr><series><title level="j">Microscopy</title><idno type="ISSN">0022-0744</idno><idno type="eISSN">1477-9986</idno><imprint><publisher>Oxford University Press</publisher><date type="published" when="1989">1989</date><biblScope unit="volume">38</biblScope><biblScope unit="issue">2</biblScope><biblScope unit="page" from="83">83</biblScope><biblScope unit="page" to="94">94</biblScope></imprint><idno type="ISSN">0022-0744</idno></series><idno type="istex">8100AFDACB0DAB063956EF29B2D093FF19639986</idno><idno type="DOI">10.1093/oxfordjournals.jmicro.a050730</idno><idno type="ArticleID">38.2.83</idno></biblStruct></sourceDesc><seriesStmt><idno type="ISSN">0022-0744</idno></seriesStmt></fileDesc><profileDesc><textClass></textClass><langUsage><language ident="en">en</language></langUsage></profileDesc></teiHeader><front><div type="abstract">We show analytically and experimentally how beam characteristics of a field emission gun (FEG) are improved by the superposition of a magnetic field. Especially, under the condition of the fixed position of the gun crossover, the relation between the radius of probe beam and the probe current on the specimen plane of a transmission microscope is investigated and the cases with and without the magnetic field are compared. The tested FEG is a tetrode FEG which operates in pulsed mode at 100 kV and the magnet is attached from the outside of the gun chamber. Owing to the structural restriction of the magnet size, the distribution of magnetic field becomes considerably broad, that is, the value of the full width at half-maximum is about 110 mm. When the peak value of the applied field is 17 mT, the measured current density at a high current region is improved by about twice in comparison with the case without magnetic field and this improvement factor roughly agrees with the calculated one. When the field intensity is increased up to 23 mT, the current density becomes further doubled analytically. The ray tracing shows that the reduction of the aberration results mainly from the confinement of trajectories to the axial region by the superimposed field. If the magnetic field with a peak field of 61 mT is concentrated in the cathode region, it is expected that the current density is improved by a factor of about 30 under the condition of the fixed current.</div></front></TEI><istex><corpusName>oup</corpusName><author><json:item><name>Akio TAKAOKA</name><affiliations><json:string>Electron Beam Laboratory, Faculty of Engineering, Osaka University Yamada-oka 2-1, Suita, Osaka, 565 Japan</json:string></affiliations></json:item><json:item><name>Katsumi URA</name><affiliations><json:string>Electron Beam Laboratory, Faculty of Engineering, Osaka University Yamada-oka 2-1, Suita, Osaka, 565 Japan</json:string></affiliations></json:item><json:item><name>Takeshi TOMITA</name><affiliations><json:string>JEOL Ltd. Musashino 3-1-2, Akishima, Tokyo, 196 Japan</json:string></affiliations></json:item><json:item><name>Yoshiyasu HARADA</name><affiliations><json:string>JEOL Ltd. Musashino 3-1-2, Akishima, Tokyo, 196 Japan</json:string></affiliations></json:item></author><subject><json:item><lang><json:string>eng</json:string></lang><value>FULL-LENGTH PAPERS</value></json:item><json:item><lang><json:string>eng</json:string></lang><value>field emission gun</value></json:item><json:item><lang><json:string>eng</json:string></lang><value>magnetic-field-immersed FEG</value></json:item><json:item><lang><json:string>eng</json:string></lang><value>beam diameter</value></json:item><json:item><lang><json:string>eng</json:string></lang><value>probe current density</value></json:item><json:item><lang><json:string>eng</json:string></lang><value>ray tracing</value></json:item></subject><articleId><json:string>38.2.83</json:string></articleId><language><json:string>eng</json:string></language><abstract>We show analytically and experimentally how beam characteristics of a field emission gun (FEG) are improved by the superposition of a magnetic field. Especially, under the condition of the fixed position of the gun crossover, the relation between the radius of probe beam and the probe current on the specimen plane of a transmission microscope is investigated and the cases with and without the magnetic field are compared. The tested FEG is a tetrode FEG which operates in pulsed mode at 100 kV and the magnet is attached from the outside of the gun chamber. Owing to the structural restriction of the magnet size, the distribution of magnetic field becomes considerably broad, that is, the value of the full width at half-maximum is about 110 mm. When the peak value of the applied field is 17 mT, the measured current density at a high current region is improved by about twice in comparison with the case without magnetic field and this improvement factor roughly agrees with the calculated one. When the field intensity is increased up to 23 mT, the current density becomes further doubled analytically. The ray tracing shows that the reduction of the aberration results mainly from the confinement of trajectories to the axial region by the superimposed field. If the magnetic field with a peak field of 61 mT is concentrated in the cathode region, it is expected that the current density is improved by a factor of about 30 under the condition of the fixed current.</abstract><qualityIndicators><score>8</score><pdfVersion>1.2</pdfVersion><pdfPageSize>511 x 738 pts</pdfPageSize><refBibsNative>false</refBibsNative><keywordCount>6</keywordCount><abstractCharCount>1473</abstractCharCount><pdfWordCount>5254</pdfWordCount><pdfCharCount>28191</pdfCharCount><pdfPageCount>12</pdfPageCount><abstractWordCount>250</abstractWordCount></qualityIndicators><title>Improvement of Beam Characteristics by Superimposing a Magnetic Field on a Field Emission Gun</title><genre.original><json:string>research-article</json:string></genre.original><genre><json:string>research-article</json:string></genre><host><volume>38</volume><publisherId><json:string>jmicro</json:string></publisherId><pages><last>94</last><first>83</first></pages><issn><json:string>0022-0744</json:string></issn><issue>2</issue><genre><json:string>Journal</json:string></genre><language><json:string>unknown</json:string></language><eissn><json:string>1477-9986</json:string></eissn><title>Microscopy</title></host><categories><wos><json:string>MICROSCOPY</json:string></wos></categories><publicationDate>1989</publicationDate><copyrightDate>1989</copyrightDate><doi><json:string>10.1093/oxfordjournals.jmicro.a050730</json:string></doi><id>8100AFDACB0DAB063956EF29B2D093FF19639986</id><fulltext><json:item><original>true</original><mimetype>application/pdf</mimetype><extension>pdf</extension><uri>https://api.istex.fr/document/8100AFDACB0DAB063956EF29B2D093FF19639986/fulltext/pdf</uri></json:item><json:item><original>false</original><mimetype>application/zip</mimetype><extension>zip</extension><uri>https://api.istex.fr/document/8100AFDACB0DAB063956EF29B2D093FF19639986/fulltext/zip</uri></json:item><istex:fulltextTEI uri="https://api.istex.fr/document/8100AFDACB0DAB063956EF29B2D093FF19639986/fulltext/tei"><teiHeader><fileDesc><titleStmt><title level="a">Improvement of Beam Characteristics by Superimposing a Magnetic Field on a Field Emission Gun</title><respStmt xml:id="ISTEX-API" resp="Références bibliographiques récupérées via GROBID" name="ISTEX-API (INIST-CNRS)"></respStmt><respStmt xml:id="ISTEX-API" resp="Références bibliographiques récupérées via GROBID" name="ISTEX-API (INIST-CNRS)"></respStmt></titleStmt><publicationStmt><authority>ISTEX</authority><publisher>Oxford University Press</publisher><availability><p>OUP</p></availability><date>1989</date></publicationStmt><sourceDesc><biblStruct type="inbook"><analytic><title level="a">Improvement of Beam Characteristics by Superimposing a Magnetic Field on a Field Emission Gun</title><author><persName><forename type="first">Akio</forename><surname>TAKAOKA</surname></persName><affiliation>Electron Beam Laboratory, Faculty of Engineering, Osaka University Yamada-oka 2-1, Suita, Osaka, 565 Japan</affiliation></author><author><persName><forename type="first">Katsumi</forename><surname>URA</surname></persName><affiliation>Electron Beam Laboratory, Faculty of Engineering, Osaka University Yamada-oka 2-1, Suita, Osaka, 565 Japan</affiliation></author><author><persName><forename type="first">Takeshi</forename><surname>TOMITA</surname></persName><affiliation>JEOL Ltd. 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Especially, under the condition of the fixed position of the gun crossover, the relation between the radius of probe beam and the probe current on the specimen plane of a transmission microscope is investigated and the cases with and without the magnetic field are compared. The tested FEG is a tetrode FEG which operates in pulsed mode at 100 kV and the magnet is attached from the outside of the gun chamber. Owing to the structural restriction of the magnet size, the distribution of magnetic field becomes considerably broad, that is, the value of the full width at half-maximum is about 110 mm. When the peak value of the applied field is 17 mT, the measured current density at a high current region is improved by about twice in comparison with the case without magnetic field and this improvement factor roughly agrees with the calculated one. When the field intensity is increased up to 23 mT, the current density becomes further doubled analytically. The ray tracing shows that the reduction of the aberration results mainly from the confinement of trajectories to the axial region by the superimposed field. If the magnetic field with a peak field of 61 mT is concentrated in the cathode region, it is expected that the current density is improved by a factor of about 30 under the condition of the fixed current.</p></abstract><textClass><keywords scheme="keyword"><list><item><term>FULL-LENGTH PAPERS</term></item></list></keywords></textClass><textClass><keywords scheme="keyword"><list><head>Keywords</head><item><term>field emission gun</term></item><item><term>magnetic-field-immersed FEG</term></item><item><term>beam diameter</term></item><item><term>probe current density</term></item><item><term>ray tracing</term></item></list></keywords></textClass></profileDesc><revisionDesc><change when="1989">Published</change><change xml:id="refBibs-istex" who="#ISTEX-API" when="2016-3-15">References added</change><change xml:id="refBibs-istex" who="#ISTEX-API" when="2016-3-21">References added</change></revisionDesc></teiHeader></istex:fulltextTEI><json:item><original>false</original><mimetype>text/plain</mimetype><extension>txt</extension><uri>https://api.istex.fr/document/8100AFDACB0DAB063956EF29B2D093FF19639986/fulltext/txt</uri></json:item></fulltext><metadata><istex:metadataXml wicri:clean="corpus oup" wicri:toSee="no header"><istex:docType PUBLIC="-//NLM//DTD Journal Publishing DTD v2.3 20070202//EN" URI="journalpublishing.dtd" name="istex:docType"></istex:docType><istex:document><article article-type="research-article"><front><journal-meta><journal-id journal-id-type="hwp">jmicro</journal-id><journal-id journal-id-type="publisher-id">jmicro</journal-id><journal-id journal-id-type="pmc">jmicro</journal-id><journal-title>Microscopy</journal-title><issn pub-type="epub">1477-9986</issn><issn pub-type="ppub">0022-0744</issn><publisher><publisher-name>Oxford University Press</publisher-name></publisher></journal-meta><article-meta><article-id pub-id-type="publisher-id">38.2.83</article-id><article-id pub-id-type="doi">10.1093/oxfordjournals.jmicro.a050730</article-id><article-categories><subj-group><subject>FULL-LENGTH PAPERS</subject></subj-group></article-categories><title-group><article-title>Improvement of Beam Characteristics by Superimposing a Magnetic Field on a Field Emission Gun</article-title></title-group><contrib-group><contrib contrib-type="author"><name><surname>TAKAOKA</surname><given-names>Akio</given-names></name><xref ref-type="aff" rid="au1"><sup>*</sup></xref></contrib><contrib contrib-type="author"><name><surname>URA</surname><given-names>Katsumi</given-names></name><xref ref-type="aff" rid="au1"><sup>*</sup></xref></contrib><contrib contrib-type="author"><name><surname>TOMITA</surname><given-names>Takeshi</given-names></name><xref ref-type="aff" rid="au2"><sup>**</sup></xref></contrib><contrib contrib-type="author"><name><surname>HARADA</surname><given-names>Yoshiyasu</given-names></name><xref ref-type="aff" rid="au2"><sup>**</sup></xref></contrib><aff id="au1"><sup>*</sup><institution>Electron Beam Laboratory, Faculty of Engineering, Osaka University</institution> <addr-line>Yamada-oka 2-1, Suita, Osaka, 565 Japan</addr-line></aff><aff id="au2"><sup>**</sup><institution>JEOL Ltd.</institution> <addr-line>Musashino 3-1-2, Akishima, Tokyo, 196 Japan</addr-line></aff></contrib-group><pub-date pub-type="ppub"><year>1989</year></pub-date><volume>38</volume><issue>2</issue><fpage>83</fpage><lpage>94</lpage><history><date date-type="received"><day>13</day><month>7</month><year>1988</year></date><date date-type="accepted"><day>01</day><month>3</month><year>1989</year></date></history><copyright-statement>© 1989 Japanese Society of Electron Microscopy</copyright-statement><copyright-year>1989</copyright-year><abstract><p>We show analytically and experimentally how beam characteristics of a field emission gun (FEG) are improved by the superposition of a magnetic field. Especially, under the condition of the fixed position of the gun crossover, the relation between the radius of probe beam and the probe current on the specimen plane of a transmission microscope is investigated and the cases with and without the magnetic field are compared. The tested FEG is a tetrode FEG which operates in pulsed mode at 100 kV and the magnet is attached from the outside of the gun chamber. Owing to the structural restriction of the magnet size, the distribution of magnetic field becomes considerably broad, that is, the value of the full width at half-maximum is about 110 mm. When the peak value of the applied field is 17 mT, the measured current density at a high current region is improved by about twice in comparison with the case without magnetic field and this improvement factor roughly agrees with the calculated one. When the field intensity is increased up to 23 mT, the current density becomes further doubled analytically. The ray tracing shows that the reduction of the aberration results mainly from the confinement of trajectories to the axial region by the superimposed field. If the magnetic field with a peak field of 61 mT is concentrated in the cathode region, it is expected that the current density is improved by a factor of about 30 under the condition of the fixed current.</p></abstract><kwd-group><kwd>field emission gun</kwd><kwd>magnetic-field-immersed FEG</kwd><kwd>beam diameter</kwd><kwd>probe current density</kwd><kwd>ray tracing</kwd></kwd-group></article-meta></front></article></istex:document></istex:metadataXml><mods version="3.6"><titleInfo><title>Improvement of Beam Characteristics by Superimposing a Magnetic Field on a Field Emission Gun</title></titleInfo><titleInfo type="alternative" contentType="CDATA"><title>Improvement of Beam Characteristics by Superimposing a Magnetic Field on a Field Emission Gun</title></titleInfo><name type="personal"><namePart type="given">Akio</namePart><namePart type="family">TAKAOKA</namePart><affiliation>Electron Beam Laboratory, Faculty of Engineering, Osaka University Yamada-oka 2-1, Suita, Osaka, 565 Japan</affiliation><role><roleTerm type="text">author</roleTerm></role></name><name type="personal"><namePart type="given">Katsumi</namePart><namePart type="family">URA</namePart><affiliation>Electron Beam Laboratory, Faculty of Engineering, Osaka University Yamada-oka 2-1, Suita, Osaka, 565 Japan</affiliation><role><roleTerm type="text">author</roleTerm></role></name><name type="personal"><namePart type="given">Takeshi</namePart><namePart type="family">TOMITA</namePart><affiliation>JEOL Ltd. Musashino 3-1-2, Akishima, Tokyo, 196 Japan</affiliation><role><roleTerm type="text">author</roleTerm></role></name><name type="personal"><namePart type="given">Yoshiyasu</namePart><namePart type="family">HARADA</namePart><affiliation>JEOL Ltd. Musashino 3-1-2, Akishima, Tokyo, 196 Japan</affiliation><role><roleTerm type="text">author</roleTerm></role></name><typeOfResource>text</typeOfResource><genre type="research-article" displayLabel="research-article"></genre><subject><topic>FULL-LENGTH PAPERS</topic></subject><originInfo><publisher>Oxford University Press</publisher><dateIssued encoding="w3cdtf">1989</dateIssued><copyrightDate encoding="w3cdtf">1989</copyrightDate></originInfo><language><languageTerm type="code" authority="iso639-2b">eng</languageTerm><languageTerm type="code" authority="rfc3066">en</languageTerm></language><physicalDescription><internetMediaType>text/html</internetMediaType></physicalDescription><abstract>We show analytically and experimentally how beam characteristics of a field emission gun (FEG) are improved by the superposition of a magnetic field. Especially, under the condition of the fixed position of the gun crossover, the relation between the radius of probe beam and the probe current on the specimen plane of a transmission microscope is investigated and the cases with and without the magnetic field are compared. The tested FEG is a tetrode FEG which operates in pulsed mode at 100 kV and the magnet is attached from the outside of the gun chamber. Owing to the structural restriction of the magnet size, the distribution of magnetic field becomes considerably broad, that is, the value of the full width at half-maximum is about 110 mm. When the peak value of the applied field is 17 mT, the measured current density at a high current region is improved by about twice in comparison with the case without magnetic field and this improvement factor roughly agrees with the calculated one. When the field intensity is increased up to 23 mT, the current density becomes further doubled analytically. The ray tracing shows that the reduction of the aberration results mainly from the confinement of trajectories to the axial region by the superimposed field. If the magnetic field with a peak field of 61 mT is concentrated in the cathode region, it is expected that the current density is improved by a factor of about 30 under the condition of the fixed current.</abstract><subject><genre>Keywords</genre><topic>field emission gun</topic><topic>magnetic-field-immersed FEG</topic><topic>beam diameter</topic><topic>probe current density</topic><topic>ray tracing</topic></subject><relatedItem type="host"><titleInfo><title>Microscopy</title></titleInfo><genre type="Journal">journal</genre><identifier type="ISSN">0022-0744</identifier><identifier type="eISSN">1477-9986</identifier><identifier type="PublisherID">jmicro</identifier><identifier type="PublisherID-hwp">jmicro</identifier><part><date>1989</date><detail type="volume"><caption>vol.</caption><number>38</number></detail><detail type="issue"><caption>no.</caption><number>2</number></detail><extent unit="pages"><start>83</start><end>94</end></extent></part></relatedItem><identifier type="istex">8100AFDACB0DAB063956EF29B2D093FF19639986</identifier><identifier type="DOI">10.1093/oxfordjournals.jmicro.a050730</identifier><identifier type="ArticleID">38.2.83</identifier><accessCondition type="use and reproduction" contentType="copyright">© 1989 Japanese Society of Electron Microscopy</accessCondition><recordInfo><recordContentSource>OUP</recordContentSource></recordInfo></mods></metadata><annexes><json:item><original>true</original><mimetype>application/pdf</mimetype><extension>pdf</extension><uri>https://api.istex.fr/document/8100AFDACB0DAB063956EF29B2D093FF19639986/annexes/pdf</uri></json:item></annexes><enrichments><istex:catWosTEI uri="https://api.istex.fr/document/8100AFDACB0DAB063956EF29B2D093FF19639986/enrichments/catWos"><teiHeader><profileDesc><textClass><classCode scheme="WOS">MICROSCOPY</classCode></textClass></profileDesc></teiHeader></istex:catWosTEI></enrichments><serie></serie></istex></record>Pour manipuler ce document sous Unix (Dilib)
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