HapticV1, PascalFrancis, Curation, bibRecord, 000E50

Manipulation of Thin Objects Using Levitation Techniques, Tilt Control, and Haptics

Identifieur interne : 000E50 ( PascalFrancis/Curation ); précédent : 000E49; suivant : 000E51

Manipulation of Thin Objects Using Levitation Techniques, Tilt Control, and Haptics

Auteurs : Ewoud Van West [Japon] ; Akio Yamamoto [Japon] ; Toshiro Higuchi [Japon]

Source :

IEEE transactions on automation science and engineering [ 1545-5955 ] ; 2010.

RBID : Pascal:11-0092833

Descripteurs français

Pascal (Inist)
- Manipulation, Lévitation électrostatique, Inclinaison, Dispositif magnétique, Commande accélération, Boucle anticipation, Synthèse commande, Angle inclinaison, Sensibilité tactile, Force électrostatique, Lévitation magnétique, Suspension magnétique, Entrefer, Système n degrés liberté, Moteur électrique, Système actif, Commande mouvement, Champ électrique, Admittance, Silicium, ..

English descriptors

KwdEn :
- Acceleration control, Active system, Admittance, Air gap, Control synthesis, Electric field, Electric motor, Electrostatic force, Electrostatical levitation, Feedforward, Magnetic device, Magnetic levitation, Magnetic suspension, Manipulation, Motion control, Silicon, System with n degrees of freedom, Tactile sensitivity, Tilt, Tilt angle.

Abstract

Levitation techniques allow delicate objects, such as silicon wafers, to be manipulated without contact. In case of electrostatic and magnetic levitation, the object can be levitated by actively controlling the electric/magnetic field based on the measured air gap between the object and the levitator. Multiple degrees of freedom are controlled by several electric/magnetic actuators. For thin flat objects, the surface area is large enough for suspending the object in vertical direction, but the side surface is too small to realize active control for lateral motions. For stability, the levitation system relies on a passive lateral restoring force that will keep the object aligned with the levitator. The drawback of this passive force is that it is far weaker than the controlled suspension force. As a result, allowable accelerations in the horizontal plane have to be limited in a manipulation task to prevent loosing the object during motion. In this paper, a solution is proposed based on compensating the acceleration by Tilt Control. For both an electrostatic and a magnetic levitation system, the significant improvement of tolerance to lateral acceleration due to feedforward tilt control is presented. It is shown that not only for automated motion but also for human operated motion, the tilt control strategy is applicable. In the human operated motion, haptic technology such as the admittance control scheme, are used to realize satisfactory manipulation. Note to Practitioners-When levitation systems are used for transporting objects without contact, there is a practical problem that objects may be lost (dropped) if planar accelerations are too high, because the lateral holding force in these systems is very weak. This paper proposes a solution in which the object and its levitator are tilted so that a part of the stronger levitation force is also used to compensate for these planar accelerations. Tilting angles are realized directly based on the acceleration of the moving actuator, so that measurement of the relative lateral position with a feedback tilt control is not necessary. While it increases the complexity of the levitator since a tilting mechanism is needed, fast noncontact manipulation can be realized.

A01	`01`	`1`		`@0 1545-5955`
A03		`1`		`@0 IEEE trans. autom. sci. eng.`
A05				`@2 7`
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A08	`01`	`1`	`ENG`	`@1 Manipulation of Thin Objects Using Levitation Techniques, Tilt Control, and Haptics`
A11	`01`	`1`		`@1 VAN WEST (Ewoud)`
A11	`02`	`1`		`@1 YAMAMOTO (Akio)`
A11	`03`	`1`		`@1 HIGUCHI (Toshiro)`
A14	`01`			`@1 Department of Precision Engineering, School of Engineering, Advanced Mechatronics Laboratory, University of Tokyo @2 Tokyo, 13-8656 @3 JPN @Z 1 aut. @Z 2 aut. @Z 3 aut.`
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C01	`01`		`ENG`	@0 Levitation techniques allow delicate objects, such as silicon wafers, to be manipulated without contact. In case of electrostatic and magnetic levitation, the object can be levitated by actively controlling the electric/magnetic field based on the measured air gap between the object and the levitator. Multiple degrees of freedom are controlled by several electric/magnetic actuators. For thin flat objects, the surface area is large enough for suspending the object in vertical direction, but the side surface is too small to realize active control for lateral motions. For stability, the levitation system relies on a passive lateral restoring force that will keep the object aligned with the levitator. The drawback of this passive force is that it is far weaker than the controlled suspension force. As a result, allowable accelerations in the horizontal plane have to be limited in a manipulation task to prevent loosing the object during motion. In this paper, a solution is proposed based on compensating the acceleration by Tilt Control. For both an electrostatic and a magnetic levitation system, the significant improvement of tolerance to lateral acceleration due to feedforward tilt control is presented. It is shown that not only for automated motion but also for human operated motion, the tilt control strategy is applicable. In the human operated motion, haptic technology such as the admittance control scheme, are used to realize satisfactory manipulation. Note to Practitioners-When levitation systems are used for transporting objects without contact, there is a practical problem that objects may be lost (dropped) if planar accelerations are too high, because the lateral holding force in these systems is very weak. This paper proposes a solution in which the object and its levitator are tilted so that a part of the stronger levitation force is also used to compensate for these planar accelerations. Tilting angles are realized directly based on the acceleration of the moving actuator, so that measurement of the relative lateral position with a feedback tilt control is not necessary. While it increases the complexity of the levitator since a tilting mechanism is needed, fast noncontact manipulation can be realized.
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C03	`02`	`X`	`FRE`	`@0 Lévitation électrostatique @5 07`
C03	`02`	`X`	`ENG`	`@0 Electrostatical levitation @5 07`
C03	`02`	`X`	`SPA`	`@0 Levitación electrostática @5 07`
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C03	`03`	`X`	`ENG`	`@0 Tilt @5 08`
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C03	`06`	`X`	`ENG`	`@0 Feedforward @5 11`
C03	`06`	`X`	`SPA`	`@0 Ciclo anticipación @5 11`
C03	`07`	`X`	`FRE`	`@0 Synthèse commande @5 12`
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C03	`07`	`X`	`SPA`	`@0 Síntesis control @5 12`
C03	`08`	`X`	`FRE`	`@0 Angle inclinaison @5 18`
C03	`08`	`X`	`ENG`	`@0 Tilt angle @5 18`
C03	`08`	`X`	`SPA`	`@0 Angulo inclinación @5 18`
C03	`09`	`X`	`FRE`	`@0 Sensibilité tactile @5 19`
C03	`09`	`X`	`ENG`	`@0 Tactile sensitivity @5 19`
C03	`09`	`X`	`SPA`	`@0 Sensibilidad tactil @5 19`
C03	`10`	`X`	`FRE`	`@0 Force électrostatique @5 20`
C03	`10`	`X`	`ENG`	`@0 Electrostatic force @5 20`
C03	`10`	`X`	`SPA`	`@0 Fuerza electrostática @5 20`
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C03	`12`	`X`	`ENG`	`@0 Magnetic suspension @5 22`
C03	`12`	`X`	`SPA`	`@0 Suspensión magnética @5 22`
C03	`13`	`X`	`FRE`	`@0 Entrefer @5 23`
C03	`13`	`X`	`ENG`	`@0 Air gap @5 23`
C03	`13`	`X`	`SPA`	`@0 Entrehierro @5 23`
C03	`14`	`X`	`FRE`	`@0 Système n degrés liberté @5 24`
C03	`14`	`X`	`ENG`	`@0 System with n degrees of freedom @5 24`
C03	`14`	`X`	`SPA`	`@0 Sistema n grados libertad @5 24`
C03	`15`	`X`	`FRE`	`@0 Moteur électrique @5 25`
C03	`15`	`X`	`ENG`	`@0 Electric motor @5 25`
C03	`15`	`X`	`SPA`	`@0 Motor eléctrico @5 25`
C03	`16`	`X`	`FRE`	`@0 Système actif @5 26`
C03	`16`	`X`	`ENG`	`@0 Active system @5 26`
C03	`16`	`X`	`SPA`	`@0 Sistema activo @5 26`
C03	`17`	`X`	`FRE`	`@0 Commande mouvement @5 27`
C03	`17`	`X`	`ENG`	`@0 Motion control @5 27`
C03	`17`	`X`	`SPA`	`@0 Control movimiento @5 27`
C03	`18`	`X`	`FRE`	`@0 Champ électrique @5 28`
C03	`18`	`X`	`ENG`	`@0 Electric field @5 28`
C03	`18`	`X`	`SPA`	`@0 Campo eléctrico @5 28`
C03	`19`	`X`	`FRE`	`@0 Admittance @5 29`
C03	`19`	`X`	`ENG`	`@0 Admittance @5 29`
C03	`19`	`X`	`SPA`	`@0 Admitancia @5 29`
C03	`20`	`X`	`FRE`	`@0 Silicium @2 NC @5 41`
C03	`20`	`X`	`ENG`	`@0 Silicon @2 NC @5 41`
C03	`20`	`X`	`SPA`	`@0 Silicio @2 NC @5 41`
C03	`21`	`X`	`FRE`	`@0 . @4 INC @5 82`
N21				`@1 059`
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Le document en format XML

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<front><div type="abstract" xml:lang="en">Levitation techniques allow delicate objects, such as silicon wafers, to be manipulated without contact. In case of electrostatic and magnetic levitation, the object can be levitated by actively controlling the electric/magnetic field based on the measured air gap between the object and the levitator. Multiple degrees of freedom are controlled by several electric/magnetic actuators. For thin flat objects, the surface area is large enough for suspending the object in vertical direction, but the side surface is too small to realize active control for lateral motions. For stability, the levitation system relies on a passive lateral restoring force that will keep the object aligned with the levitator. The drawback of this passive force is that it is far weaker than the controlled suspension force. As a result, allowable accelerations in the horizontal plane have to be limited in a manipulation task to prevent loosing the object during motion. In this paper, a solution is proposed based on compensating the acceleration by Tilt Control. For both an electrostatic and a magnetic levitation system, the significant improvement of tolerance to lateral acceleration due to feedforward tilt control is presented. It is shown that not only for automated motion but also for human operated motion, the tilt control strategy is applicable. In the human operated motion, haptic technology such as the admittance control scheme, are used to realize satisfactory manipulation. Note to Practitioners-When levitation systems are used for transporting objects without contact, there is a practical problem that objects may be lost (dropped) if planar accelerations are too high, because the lateral holding force in these systems is very weak. This paper proposes a solution in which the object and its levitator are tilted so that a part of the stronger levitation force is also used to compensate for these planar accelerations. Tilting angles are realized directly based on the acceleration of the moving actuator, so that measurement of the relative lateral position with a feedback tilt control is not necessary. While it increases the complexity of the levitator since a tilting mechanism is needed, fast noncontact manipulation can be realized.</div>
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<fC01 i1="01" l="ENG"><s0>Levitation techniques allow delicate objects, such as silicon wafers, to be manipulated without contact. In case of electrostatic and magnetic levitation, the object can be levitated by actively controlling the electric/magnetic field based on the measured air gap between the object and the levitator. Multiple degrees of freedom are controlled by several electric/magnetic actuators. For thin flat objects, the surface area is large enough for suspending the object in vertical direction, but the side surface is too small to realize active control for lateral motions. For stability, the levitation system relies on a passive lateral restoring force that will keep the object aligned with the levitator. The drawback of this passive force is that it is far weaker than the controlled suspension force. As a result, allowable accelerations in the horizontal plane have to be limited in a manipulation task to prevent loosing the object during motion. In this paper, a solution is proposed based on compensating the acceleration by Tilt Control. For both an electrostatic and a magnetic levitation system, the significant improvement of tolerance to lateral acceleration due to feedforward tilt control is presented. It is shown that not only for automated motion but also for human operated motion, the tilt control strategy is applicable. In the human operated motion, haptic technology such as the admittance control scheme, are used to realize satisfactory manipulation. Note to Practitioners-When levitation systems are used for transporting objects without contact, there is a practical problem that objects may be lost (dropped) if planar accelerations are too high, because the lateral holding force in these systems is very weak. This paper proposes a solution in which the object and its levitator are tilted so that a part of the stronger levitation force is also used to compensate for these planar accelerations. Tilting angles are realized directly based on the acceleration of the moving actuator, so that measurement of the relative lateral position with a feedback tilt control is not necessary. While it increases the complexity of the levitator since a tilting mechanism is needed, fast noncontact manipulation can be realized.</s0>
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<s5>09</s5>
</fC03>
<fC03 i1="04" i2="X" l="ENG"><s0>Magnetic device</s0>
<s5>09</s5>
</fC03>
<fC03 i1="04" i2="X" l="SPA"><s0>Dispositivo magnético</s0>
<s5>09</s5>
</fC03>
<fC03 i1="05" i2="3" l="FRE"><s0>Commande accélération</s0>
<s5>10</s5>
</fC03>
<fC03 i1="05" i2="3" l="ENG"><s0>Acceleration control</s0>
<s5>10</s5>
</fC03>
<fC03 i1="06" i2="X" l="FRE"><s0>Boucle anticipation</s0>
<s5>11</s5>
</fC03>
<fC03 i1="06" i2="X" l="ENG"><s0>Feedforward</s0>
<s5>11</s5>
</fC03>
<fC03 i1="06" i2="X" l="SPA"><s0>Ciclo anticipación</s0>
<s5>11</s5>
</fC03>
<fC03 i1="07" i2="X" l="FRE"><s0>Synthèse commande</s0>
<s5>12</s5>
</fC03>
<fC03 i1="07" i2="X" l="ENG"><s0>Control synthesis</s0>
<s5>12</s5>
</fC03>
<fC03 i1="07" i2="X" l="SPA"><s0>Síntesis control</s0>
<s5>12</s5>
</fC03>
<fC03 i1="08" i2="X" l="FRE"><s0>Angle inclinaison</s0>
<s5>18</s5>
</fC03>
<fC03 i1="08" i2="X" l="ENG"><s0>Tilt angle</s0>
<s5>18</s5>
</fC03>
<fC03 i1="08" i2="X" l="SPA"><s0>Angulo inclinación</s0>
<s5>18</s5>
</fC03>
<fC03 i1="09" i2="X" l="FRE"><s0>Sensibilité tactile</s0>
<s5>19</s5>
</fC03>
<fC03 i1="09" i2="X" l="ENG"><s0>Tactile sensitivity</s0>
<s5>19</s5>
</fC03>
<fC03 i1="09" i2="X" l="SPA"><s0>Sensibilidad tactil</s0>
<s5>19</s5>
</fC03>
<fC03 i1="10" i2="X" l="FRE"><s0>Force électrostatique</s0>
<s5>20</s5>
</fC03>
<fC03 i1="10" i2="X" l="ENG"><s0>Electrostatic force</s0>
<s5>20</s5>
</fC03>
<fC03 i1="10" i2="X" l="SPA"><s0>Fuerza electrostática</s0>
<s5>20</s5>
</fC03>
<fC03 i1="11" i2="X" l="FRE"><s0>Lévitation magnétique</s0>
<s5>21</s5>
</fC03>
<fC03 i1="11" i2="X" l="ENG"><s0>Magnetic levitation</s0>
<s5>21</s5>
</fC03>
<fC03 i1="11" i2="X" l="SPA"><s0>Levitacíon magnetica</s0>
<s5>21</s5>
</fC03>
<fC03 i1="12" i2="X" l="FRE"><s0>Suspension magnétique</s0>
<s5>22</s5>
</fC03>
<fC03 i1="12" i2="X" l="ENG"><s0>Magnetic suspension</s0>
<s5>22</s5>
</fC03>
<fC03 i1="12" i2="X" l="SPA"><s0>Suspensión magnética</s0>
<s5>22</s5>
</fC03>
<fC03 i1="13" i2="X" l="FRE"><s0>Entrefer</s0>
<s5>23</s5>
</fC03>
<fC03 i1="13" i2="X" l="ENG"><s0>Air gap</s0>
<s5>23</s5>
</fC03>
<fC03 i1="13" i2="X" l="SPA"><s0>Entrehierro</s0>
<s5>23</s5>
</fC03>
<fC03 i1="14" i2="X" l="FRE"><s0>Système n degrés liberté</s0>
<s5>24</s5>
</fC03>
<fC03 i1="14" i2="X" l="ENG"><s0>System with n degrees of freedom</s0>
<s5>24</s5>
</fC03>
<fC03 i1="14" i2="X" l="SPA"><s0>Sistema n grados libertad</s0>
<s5>24</s5>
</fC03>
<fC03 i1="15" i2="X" l="FRE"><s0>Moteur électrique</s0>
<s5>25</s5>
</fC03>
<fC03 i1="15" i2="X" l="ENG"><s0>Electric motor</s0>
<s5>25</s5>
</fC03>
<fC03 i1="15" i2="X" l="SPA"><s0>Motor eléctrico</s0>
<s5>25</s5>
</fC03>
<fC03 i1="16" i2="X" l="FRE"><s0>Système actif</s0>
<s5>26</s5>
</fC03>
<fC03 i1="16" i2="X" l="ENG"><s0>Active system</s0>
<s5>26</s5>
</fC03>
<fC03 i1="16" i2="X" l="SPA"><s0>Sistema activo</s0>
<s5>26</s5>
</fC03>
<fC03 i1="17" i2="X" l="FRE"><s0>Commande mouvement</s0>
<s5>27</s5>
</fC03>
<fC03 i1="17" i2="X" l="ENG"><s0>Motion control</s0>
<s5>27</s5>
</fC03>
<fC03 i1="17" i2="X" l="SPA"><s0>Control movimiento</s0>
<s5>27</s5>
</fC03>
<fC03 i1="18" i2="X" l="FRE"><s0>Champ électrique</s0>
<s5>28</s5>
</fC03>
<fC03 i1="18" i2="X" l="ENG"><s0>Electric field</s0>
<s5>28</s5>
</fC03>
<fC03 i1="18" i2="X" l="SPA"><s0>Campo eléctrico</s0>
<s5>28</s5>
</fC03>
<fC03 i1="19" i2="X" l="FRE"><s0>Admittance</s0>
<s5>29</s5>
</fC03>
<fC03 i1="19" i2="X" l="ENG"><s0>Admittance</s0>
<s5>29</s5>
</fC03>
<fC03 i1="19" i2="X" l="SPA"><s0>Admitancia</s0>
<s5>29</s5>
</fC03>
<fC03 i1="20" i2="X" l="FRE"><s0>Silicium</s0>
<s2>NC</s2>
<s5>41</s5>
</fC03>
<fC03 i1="20" i2="X" l="ENG"><s0>Silicon</s0>
<s2>NC</s2>
<s5>41</s5>
</fC03>
<fC03 i1="20" i2="X" l="SPA"><s0>Silicio</s0>
<s2>NC</s2>
<s5>41</s5>
</fC03>
<fC03 i1="21" i2="X" l="FRE"><s0>.</s0>
<s4>INC</s4>
<s5>82</s5>
</fC03>
<fN21><s1>059</s1>
</fN21>
<fN44 i1="01"><s1>OTO</s1>
</fN44>
<fN82><s1>OTO</s1>
</fN82>
</pA>
</standard>
</inist>
</record>

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Manipulation of Thin Objects Using Levitation Techniques, Tilt Control, and Haptics

Manipulation of Thin Objects Using Levitation Techniques, Tilt Control, and Haptics

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