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Serveur d'exploration sur l'Indium - Analysis (France)

Index « Keywords » - entrée « Sputter etching »
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Sputter deposition < Sputter etching < Sputtering  Facettes :

List of bibliographic references

Number of relevant bibliographic references: 13.
Ident.Authors (with country if any)Title
000A44 (2004-03-01) Fabrication of low loss two-dimensional InP photonic crystals by inductively coupled plasma etching
000C11 (2003-11) 3D structuring of multilayer suspended membranes including 2D photonic crystal structures
000C27 (2003-08-11) In-plane resonant cavities with photonic crystal boundaries etched in InP-based heterostructure
000C55 (2003-03) Low-loss InP-based photonic-crystal waveguides etched with Ar/Cl2 chemically assisted ion beam etching
001332 (2000-07) Estimation of surface kinetic parameters and two-dimensional simulation of InP pattern features during CH4-H2 plasma etching
001541 (1999-09) Microscopic modeling of InP etching in CH4-H2 plasma
001555 (1999-07) New self-aligned processes for III-V electronic high speed devices
001556 (1999-07) Low damage dry etching of III-V materials for heterojunction bipolar transistor applications using a chlorinated inductively coupled plasma
001854 (1998-07) X-ray photoelectron spectroscopy damage characterization of reactively ion etched InP in CH4-H2 plasmas
001870 (1998-05) Proposal for an etching mechanism of InP in CH4-H2 mixtures based on plasma diagnostics and surface analysis
001A74 (1997-10-01) Channel optical waveguides formed by deuterium passivation in GaAs and InP
001A95 (1997-09) Influence of the gas mixture on the reactive ion etching of InP in CH4-H2 plasmas
001B33 (1997-05) Anisotropic etching of InP with low sidewall and surface induced damage in inductively coupled plasma etching using SiCl4

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