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Initial stages in the growth and development of junctions in heteroepitaxy of InP on GaAs

Identifieur interne : 000043 ( Main/Exploration ); précédent : 000042; suivant : 000044

Initial stages in the growth and development of junctions in heteroepitaxy of InP on GaAs

Auteurs : RBID : ISTEX:11182_1996_Article_BF02437023.pdf

Abstract

The initial stages in the growth of indium phosphide films on gallium arsenide substrates in a chloride gastransport system are investigated by transmission electron microscopy and electron-diffraction and secondaryion mass spectrometry techniques. It is shown that decomposition and/or etching of the surface oxide film and formation of a chemically pure substrate surface occur in the initial stage of the process. The growth islets that form on this surface constitute a solid solution in InP. A model of the process is proposed.

DOI: 10.1007/BF02437023

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<name>V. S. Lukash</name>
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<name>S. V. Subach</name>
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<name>E. V. Chernikov</name>
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