CobaltMaghrebV1, PascalFrancis, Checkpoint, bibRecord, 000006

Properties of cobalt-doped zinc oxide thin films grown by pulsed laser deposition on glass substrates

Identifieur interne : 000006 ( PascalFrancis/Checkpoint ); précédent : 000005; suivant : 000007

Properties of cobalt-doped zinc oxide thin films grown by pulsed laser deposition on glass substrates

Auteurs : Adel Taabouche [Algérie] ; Abderrahmane Bouabellou [Algérie] ; Fouad Kermiche [Algérie] ; Faouzi Hanini [Algérie] ; Yacine Bouachiba [Algérie] ; Azzeddine Grid [Algérie] ; Tahar Kerdjac [Algérie]

Source :

Materials science in semiconductor processing [ 1369-8001 ] ; 2014.

RBID : Pascal:15-0011695

Descripteurs français

Pascal (Inist)
- Addition cobalt, Dépôt laser pulsé, Polycristal, Laser excimère, Diffraction RX, Codopage, Grosseur grain, Granulométrie, Caractéristique optique, Propriété optique, Mode transversal, Mode TE, Guide onde, Indice réfraction, Mesure épaisseur, Appareillage, Epaisseur, Spectre absorption, Transparence, Bande interdite, Oxyde de cobalt, Oxyde de zinc, Couche mince, Verre, Couche mince piézoélectrique, Céramique, Matériau dopé, Réseau hexagonal, Structure wurtzite, Matériau transparent, Piézoélectrique, Fabrication microélectronique, 8115F, 8105K, 4255L, 6146, ZnO, 7867, 7840R, 7784, 8540H.
Wicri :
- topic : Verre, Céramique.

English descriptors

KwdEn :
- Absorption spectra, Ceramics, Cobalt additions, Cobalt oxide, Codoping, Doped materials, Energy gap, Excimer lasers, Glass, Grain size, Grain size analysis, Hexagonal lattices, Instrumentation, Microelectronic fabrication, Optical characteristic, Optical properties, Piezoelectric materials, Piezoelectric thin films, Polycrystals, Pulsed laser deposition, Refractive index, TE mode, Thickness, Thickness measurement, Thin films, Transparency, Transparent material, Transverse mode, Waveguides, Wurtzite structure, XRD, Zinc oxide.

Abstract

Undoped and cobalt-doped zinc oxide (CZO) polycrystalline piezoelectric thin films (Co: 3, 5 at.%) using a series of high quality ceramic targets have been deposited at 450 °C onto glass substrates using a pulsed laser deposition method. The used source was a KrF excimer laser (248 nm, 25 ns, 2J/cm²). X-ray diffraction patterns showed that the Co-doped ZnO films crystallize in a hexagonal wurtzite type structure with a strong (0 orientation, and the grain sizes calculated from these patterns decrease from 37 to 31 nm by increasing Co doping. The optical waveguiding properties of the films were characterized by using a prism-coupling method. The distinct M-lines of the guided transverse magnetic (TM) and transverse electric (TE) modes of the ZnO films waveguide have been observed. With the aim of study the optical properties of the ZnO films, an accurate refractive index and thickness measurement apparatus was set up, which is called M-lines device. An evaluation of experimental uncertainty and calculation of the precision of the refractive index and thickness were developed on ZnO films. The optical transmittance spectra showed a good transparency in the visible region. Calculated optical band gap varying from 3.23 to 3.37 eV when the content of Co doping increases from 0 to 5 at.%.

Affiliations:

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Le document en format XML

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<term>Doped materials</term>
<term>Energy gap</term>
<term>Excimer lasers</term>
<term>Glass</term>
<term>Grain size</term>
<term>Grain size analysis</term>
<term>Hexagonal lattices</term>
<term>Instrumentation</term>
<term>Microelectronic fabrication</term>
<term>Optical characteristic</term>
<term>Optical properties</term>
<term>Piezoelectric materials</term>
<term>Piezoelectric thin films</term>
<term>Polycrystals</term>
<term>Pulsed laser deposition</term>
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<term>Thickness measurement</term>
<term>Thin films</term>
<term>Transparency</term>
<term>Transparent material</term>
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<term>Dépôt laser pulsé</term>
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<front><div type="abstract" xml:lang="en">Undoped and cobalt-doped zinc oxide (CZO) polycrystalline piezoelectric thin films (Co: 3, 5 at.%) using a series of high quality ceramic targets have been deposited at 450 °C onto glass substrates using a pulsed laser deposition method. The used source was a KrF excimer laser (248 nm, 25 ns, 2J/cm<sup>2</sup>
). X-ray diffraction patterns showed that the Co-doped ZnO films crystallize in a hexagonal wurtzite type structure with a strong (0 orientation, and the grain sizes calculated from these patterns decrease from 37 to 31 nm by increasing Co doping. The optical waveguiding properties of the films were characterized by using a prism-coupling method. The distinct M-lines of the guided transverse magnetic (TM) and transverse electric (TE) modes of the ZnO films waveguide have been observed. With the aim of study the optical properties of the ZnO films, an accurate refractive index and thickness measurement apparatus was set up, which is called M-lines device. An evaluation of experimental uncertainty and calculation of the precision of the refractive index and thickness were developed on ZnO films. The optical transmittance spectra showed a good transparency in the visible region. Calculated optical band gap varying from 3.23 to 3.37 eV when the content of Co doping increases from 0 to 5 at.%.</div>
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<s5>03</s5>
</fC03>
<fC03 i1="04" i2="3" l="FRE"><s0>Laser excimère</s0>
<s5>04</s5>
</fC03>
<fC03 i1="04" i2="3" l="ENG"><s0>Excimer lasers</s0>
<s5>04</s5>
</fC03>
<fC03 i1="05" i2="3" l="FRE"><s0>Diffraction RX</s0>
<s5>05</s5>
</fC03>
<fC03 i1="05" i2="3" l="ENG"><s0>XRD</s0>
<s5>05</s5>
</fC03>
<fC03 i1="06" i2="X" l="FRE"><s0>Codopage</s0>
<s5>06</s5>
</fC03>
<fC03 i1="06" i2="X" l="ENG"><s0>Codoping</s0>
<s5>06</s5>
</fC03>
<fC03 i1="06" i2="X" l="SPA"><s0>Codrogado</s0>
<s5>06</s5>
</fC03>
<fC03 i1="07" i2="3" l="FRE"><s0>Grosseur grain</s0>
<s5>07</s5>
</fC03>
<fC03 i1="07" i2="3" l="ENG"><s0>Grain size</s0>
<s5>07</s5>
</fC03>
<fC03 i1="08" i2="X" l="FRE"><s0>Granulométrie</s0>
<s5>08</s5>
</fC03>
<fC03 i1="08" i2="X" l="ENG"><s0>Grain size analysis</s0>
<s5>08</s5>
</fC03>
<fC03 i1="08" i2="X" l="SPA"><s0>Granulometría</s0>
<s5>08</s5>
</fC03>
<fC03 i1="09" i2="X" l="FRE"><s0>Caractéristique optique</s0>
<s5>09</s5>
</fC03>
<fC03 i1="09" i2="X" l="ENG"><s0>Optical characteristic</s0>
<s5>09</s5>
</fC03>
<fC03 i1="09" i2="X" l="SPA"><s0>Característica óptica</s0>
<s5>09</s5>
</fC03>
<fC03 i1="10" i2="3" l="FRE"><s0>Propriété optique</s0>
<s5>10</s5>
</fC03>
<fC03 i1="10" i2="3" l="ENG"><s0>Optical properties</s0>
<s5>10</s5>
</fC03>
<fC03 i1="11" i2="X" l="FRE"><s0>Mode transversal</s0>
<s5>11</s5>
</fC03>
<fC03 i1="11" i2="X" l="ENG"><s0>Transverse mode</s0>
<s5>11</s5>
</fC03>
<fC03 i1="11" i2="X" l="SPA"><s0>Modo transversal</s0>
<s5>11</s5>
</fC03>
<fC03 i1="12" i2="X" l="FRE"><s0>Mode TE</s0>
<s5>12</s5>
</fC03>
<fC03 i1="12" i2="X" l="ENG"><s0>TE mode</s0>
<s5>12</s5>
</fC03>
<fC03 i1="12" i2="X" l="SPA"><s0>Modo TE</s0>
<s5>12</s5>
</fC03>
<fC03 i1="13" i2="3" l="FRE"><s0>Guide onde</s0>
<s5>13</s5>
</fC03>
<fC03 i1="13" i2="3" l="ENG"><s0>Waveguides</s0>
<s5>13</s5>
</fC03>
<fC03 i1="14" i2="3" l="FRE"><s0>Indice réfraction</s0>
<s5>14</s5>
</fC03>
<fC03 i1="14" i2="3" l="ENG"><s0>Refractive index</s0>
<s5>14</s5>
</fC03>
<fC03 i1="15" i2="3" l="FRE"><s0>Mesure épaisseur</s0>
<s5>15</s5>
</fC03>
<fC03 i1="15" i2="3" l="ENG"><s0>Thickness measurement</s0>
<s5>15</s5>
</fC03>
<fC03 i1="16" i2="3" l="FRE"><s0>Appareillage</s0>
<s5>16</s5>
</fC03>
<fC03 i1="16" i2="3" l="ENG"><s0>Instrumentation</s0>
<s5>16</s5>
</fC03>
<fC03 i1="17" i2="3" l="FRE"><s0>Epaisseur</s0>
<s5>17</s5>
</fC03>
<fC03 i1="17" i2="3" l="ENG"><s0>Thickness</s0>
<s5>17</s5>
</fC03>
<fC03 i1="18" i2="3" l="FRE"><s0>Spectre absorption</s0>
<s5>18</s5>
</fC03>
<fC03 i1="18" i2="3" l="ENG"><s0>Absorption spectra</s0>
<s5>18</s5>
</fC03>
<fC03 i1="19" i2="3" l="FRE"><s0>Transparence</s0>
<s5>19</s5>
</fC03>
<fC03 i1="19" i2="3" l="ENG"><s0>Transparency</s0>
<s5>19</s5>
</fC03>
<fC03 i1="20" i2="3" l="FRE"><s0>Bande interdite</s0>
<s5>20</s5>
</fC03>
<fC03 i1="20" i2="3" l="ENG"><s0>Energy gap</s0>
<s5>20</s5>
</fC03>
<fC03 i1="21" i2="X" l="FRE"><s0>Oxyde de cobalt</s0>
<s5>22</s5>
</fC03>
<fC03 i1="21" i2="X" l="ENG"><s0>Cobalt oxide</s0>
<s5>22</s5>
</fC03>
<fC03 i1="21" i2="X" l="SPA"><s0>Cobalto óxido</s0>
<s5>22</s5>
</fC03>
<fC03 i1="22" i2="X" l="FRE"><s0>Oxyde de zinc</s0>
<s5>23</s5>
</fC03>
<fC03 i1="22" i2="X" l="ENG"><s0>Zinc oxide</s0>
<s5>23</s5>
</fC03>
<fC03 i1="22" i2="X" l="SPA"><s0>Zinc óxido</s0>
<s5>23</s5>
</fC03>
<fC03 i1="23" i2="3" l="FRE"><s0>Couche mince</s0>
<s5>24</s5>
</fC03>
<fC03 i1="23" i2="3" l="ENG"><s0>Thin films</s0>
<s5>24</s5>
</fC03>
<fC03 i1="24" i2="3" l="FRE"><s0>Verre</s0>
<s5>25</s5>
</fC03>
<fC03 i1="24" i2="3" l="ENG"><s0>Glass</s0>
<s5>25</s5>
</fC03>
<fC03 i1="25" i2="3" l="FRE"><s0>Couche mince piézoélectrique</s0>
<s5>26</s5>
</fC03>
<fC03 i1="25" i2="3" l="ENG"><s0>Piezoelectric thin films</s0>
<s5>26</s5>
</fC03>
<fC03 i1="26" i2="3" l="FRE"><s0>Céramique</s0>
<s5>27</s5>
</fC03>
<fC03 i1="26" i2="3" l="ENG"><s0>Ceramics</s0>
<s5>27</s5>
</fC03>
<fC03 i1="27" i2="3" l="FRE"><s0>Matériau dopé</s0>
<s5>28</s5>
</fC03>
<fC03 i1="27" i2="3" l="ENG"><s0>Doped materials</s0>
<s5>28</s5>
</fC03>
<fC03 i1="28" i2="3" l="FRE"><s0>Réseau hexagonal</s0>
<s5>29</s5>
</fC03>
<fC03 i1="28" i2="3" l="ENG"><s0>Hexagonal lattices</s0>
<s5>29</s5>
</fC03>
<fC03 i1="29" i2="X" l="FRE"><s0>Structure wurtzite</s0>
<s5>30</s5>
</fC03>
<fC03 i1="29" i2="X" l="ENG"><s0>Wurtzite structure</s0>
<s5>30</s5>
</fC03>
<fC03 i1="29" i2="X" l="SPA"><s0>Estructura wurtzita</s0>
<s5>30</s5>
</fC03>
<fC03 i1="30" i2="X" l="FRE"><s0>Matériau transparent</s0>
<s5>31</s5>
</fC03>
<fC03 i1="30" i2="X" l="ENG"><s0>Transparent material</s0>
<s5>31</s5>
</fC03>
<fC03 i1="30" i2="X" l="SPA"><s0>Material transparente</s0>
<s5>31</s5>
</fC03>
<fC03 i1="31" i2="X" l="FRE"><s0>Piézoélectrique</s0>
<s5>32</s5>
</fC03>
<fC03 i1="31" i2="X" l="ENG"><s0>Piezoelectric materials</s0>
<s5>32</s5>
</fC03>
<fC03 i1="31" i2="X" l="SPA"><s0>Piezoeléctrica</s0>
<s5>32</s5>
</fC03>
<fC03 i1="32" i2="X" l="FRE"><s0>Fabrication microélectronique</s0>
<s5>46</s5>
</fC03>
<fC03 i1="32" i2="X" l="ENG"><s0>Microelectronic fabrication</s0>
<s5>46</s5>
</fC03>
<fC03 i1="32" i2="X" l="SPA"><s0>Fabricación microeléctrica</s0>
<s5>46</s5>
</fC03>
<fC03 i1="33" i2="3" l="FRE"><s0>8115F</s0>
<s4>INC</s4>
<s5>56</s5>
</fC03>
<fC03 i1="34" i2="3" l="FRE"><s0>8105K</s0>
<s4>INC</s4>
<s5>57</s5>
</fC03>
<fC03 i1="35" i2="3" l="FRE"><s0>4255L</s0>
<s4>INC</s4>
<s5>58</s5>
</fC03>
<fC03 i1="36" i2="3" l="FRE"><s0>6146</s0>
<s4>INC</s4>
<s5>59</s5>
</fC03>
<fC03 i1="37" i2="3" l="FRE"><s0>ZnO</s0>
<s4>INC</s4>
<s5>82</s5>
</fC03>
<fC03 i1="38" i2="3" l="FRE"><s0>7867</s0>
<s4>INC</s4>
<s5>83</s5>
</fC03>
<fC03 i1="39" i2="3" l="FRE"><s0>7840R</s0>
<s4>INC</s4>
<s5>84</s5>
</fC03>
<fC03 i1="40" i2="3" l="FRE"><s0>7784</s0>
<s4>INC</s4>
<s5>85</s5>
</fC03>
<fC03 i1="41" i2="3" l="FRE"><s0>8540H</s0>
<s4>INC</s4>
<s5>86</s5>
</fC03>
<fC07 i1="01" i2="X" l="FRE"><s0>Composé II-VI</s0>
<s5>21</s5>
</fC07>
<fC07 i1="01" i2="X" l="ENG"><s0>II-VI compound</s0>
<s5>21</s5>
</fC07>
<fC07 i1="01" i2="X" l="SPA"><s0>Compuesto II-VI</s0>
<s5>21</s5>
</fC07>
<fN21><s1>012</s1>
</fN21>
<fN44 i1="01"><s1>OTO</s1>
</fN44>
<fN82><s1>OTO</s1>
</fN82>
</pA>
<pR><fA30 i1="01" i2="1" l="ENG"><s1>ISSTC-2014 International Semiconductor Science and Technology Conference</s1>
<s3>Istanbul TUR</s3>
<s4>2014-01-13</s4>
</fA30>
</pR>
</standard>
</inist>
<affiliations><list><country><li>Algérie</li>
</country>
<region><li>Wilaya d'Alger</li>
</region>
<settlement><li>Alger</li>
</settlement>
</list>
<tree><country name="Algérie"><noRegion><name sortKey="Taabouche, Adel" sort="Taabouche, Adel" uniqKey="Taabouche A" first="Adel" last="Taabouche">Adel Taabouche</name>
</noRegion>
<name sortKey="Bouabellou, Abderrahmane" sort="Bouabellou, Abderrahmane" uniqKey="Bouabellou A" first="Abderrahmane" last="Bouabellou">Abderrahmane Bouabellou</name>
<name sortKey="Bouachiba, Yacine" sort="Bouachiba, Yacine" uniqKey="Bouachiba Y" first="Yacine" last="Bouachiba">Yacine Bouachiba</name>
<name sortKey="Grid, Azzeddine" sort="Grid, Azzeddine" uniqKey="Grid A" first="Azzeddine" last="Grid">Azzeddine Grid</name>
<name sortKey="Hanini, Faouzi" sort="Hanini, Faouzi" uniqKey="Hanini F" first="Faouzi" last="Hanini">Faouzi Hanini</name>
<name sortKey="Kerdjac, Tahar" sort="Kerdjac, Tahar" uniqKey="Kerdjac T" first="Tahar" last="Kerdjac">Tahar Kerdjac</name>
<name sortKey="Kermiche, Fouad" sort="Kermiche, Fouad" uniqKey="Kermiche F" first="Fouad" last="Kermiche">Fouad Kermiche</name>
<name sortKey="Taabouche, Adel" sort="Taabouche, Adel" uniqKey="Taabouche A" first="Adel" last="Taabouche">Adel Taabouche</name>
</country>
</tree>
</affiliations>
</record>

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	Serveur d'exploration sur le cobalt au Maghreb
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Serveur d'exploration sur le cobalt au Maghreb

Properties of cobalt-doped zinc oxide thin films grown by pulsed laser deposition on glass substrates

Properties of cobalt-doped zinc oxide thin films grown by pulsed laser deposition on glass substrates

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