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Serveur d'exploration sur l'Indium - Analysis (France)

Index « Auteurs » - entrée « G. Turban »
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G. Tr Nkle < G. Turban < G. Tyuliev  Facettes :

List of bibliographic references

Number of relevant bibliographic references: 7.
Ident.Authors (with country if any)Title
001332 (2000-07) Estimation of surface kinetic parameters and two-dimensional simulation of InP pattern features during CH4-H2 plasma etching
001541 (1999-09) Microscopic modeling of InP etching in CH4-H2 plasma
001666 (1999) Simulation of mesa structures for III-V semiconductors under ion beam etching
001854 (1998-07) X-ray photoelectron spectroscopy damage characterization of reactively ion etched InP in CH4-H2 plasmas
001870 (1998-05) Proposal for an etching mechanism of InP in CH4-H2 mixtures based on plasma diagnostics and surface analysis
001A95 (1997-09) Influence of the gas mixture on the reactive ion etching of InP in CH4-H2 plasmas
002069 (1995-03) Epitaxie localisée par jets chimiques sur substrats GaAs et InP

List of associated KwdEn.i

Nombre de
documents		Descripteur
6III-V semiconductors
5Indium compounds
5Sputter etching
4Experimental study
3X-ray photoelectron spectra
2Computerized simulation
2Gallium arsenides
2Theoretical study
1Amorphization
1Angle of incidence
1Argon
1Arsenides phosphides
1Atomic emission spectroscopy
1Binary compounds
1Bipolar transistors
1Chemical beam condensation
1Chemisorption
1Circuit design
1Computer aided design
1Crystal growth
1Desorption
1Dry etching
1Epitaxy
1Etching
1Free radical reactions
1Gallium phosphides
1Heterojunctions
1III-V compound
1Indium arsenides
1Indium phosphide
1Indium phosphides
1Inorganic compounds
1Ion beam etching
1Lithography
1Mask
1Mass spectra
1Mass spectroscopic chemical analysis
1Microelectronics
1Modeling
1Monte Carlo methods
1Optoelectronics
1Patterning
1Photoelectron spectroscopy
1Plasma diagnostics
1Quaternary compounds
1Reaction rate constants
1Semiconductor materials
1Sputter coating
1Sputtering
1Stoichiometry
1Surface chemistry
1Surface structure
1Surface topography
1Ternary compounds
1rough surfaces

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EXPLOR_STEP=IndiumV3/Data/France/Analysis

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HfdIndexSelect -h $EXPLOR_AREA/Data/France/Analysis/Author.i  \
                -Sk "G. Turban" \
         | HfdSelect -Kh $EXPLOR_AREA/Data/France/Analysis/biblio.hfd

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   |clé=    G. Turban
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