FPGA-Based Smart Sensor for Online Displacement Measurements Using a Heterodyne Interferometer
Identifieur interne : 000363 ( Pmc/Checkpoint ); précédent : 000362; suivant : 000364FPGA-Based Smart Sensor for Online Displacement Measurements Using a Heterodyne Interferometer
Auteurs : Luis Alberto Vera-Salas ; Sandra Veronica Moreno-Tapia ; Arturo Garcia-Perez ; Rene De Jesus Romero-Troncoso ; Roque Alfredo Osornio-Rios ; Ibrahim Serroukh ; Eduardo Cabal-YepezSource :
- Sensors (Basel, Switzerland) [ 1424-8220 ] ; 2011.
Abstract
The measurement of small displacements on the nanometric scale demands metrological systems of high accuracy and precision. In this context, interferometer-based displacement measurements have become the main tools used for traceable dimensional metrology. The different industrial applications in which small displacement measurements are employed requires the use of online measurements, high speed processes, open architecture control systems, as well as good adaptability to specific process conditions. The main contribution of this work is the development of a smart sensor for large displacement measurement based on phase measurement which achieves high accuracy and resolution, designed to be used with a commercial heterodyne interferometer. The system is based on a low-cost Field Programmable Gate Array (FPGA) allowing the integration of several functions in a single portable device. This system is optimal for high speed applications where online measurement is needed and the reconfigurability feature allows the addition of different modules for error compensation, as might be required by a specific application.
Url:
DOI: 10.3390/s110807710
PubMed: 22164040
PubMed Central: 3231721
Affiliations:
Links toward previous steps (curation, corpus...)
Links to Exploration step
PMC:3231721Le document en format XML
<record><TEI><teiHeader><fileDesc><titleStmt><title xml:lang="en">FPGA-Based Smart Sensor for Online Displacement Measurements Using a Heterodyne Interferometer</title><author><name sortKey="Vera Salas, Luis Alberto" sort="Vera Salas, Luis Alberto" uniqKey="Vera Salas L" first="Luis Alberto" last="Vera-Salas">Luis Alberto Vera-Salas</name><affiliation><nlm:aff id="af1-sensors-11-07710"> HSPdigital, CA Procesamiento Digital de Señales, CA Telematica, DICIS, Universidad de Guanajuato, Carr. Salamanca-Valle km 3.5+1.8, Palo Blanco, 36885 Salamanca, Gto., Mexico; E-Mails:<email>lavera@hspdigital.org</email> (L.A.V.-S.);<email>svmoreno@hspdigital.org</email> (S.V.M.-T.);<email>troncoso@hspdigital.org</email> (R.J.R.-T.);<email>ecabal@hspdigital.org</email> (E.C.-Y.)</nlm:aff></affiliation></author><author><name sortKey="Moreno Tapia, Sandra Veronica" sort="Moreno Tapia, Sandra Veronica" uniqKey="Moreno Tapia S" first="Sandra Veronica" last="Moreno-Tapia">Sandra Veronica Moreno-Tapia</name><affiliation><nlm:aff id="af1-sensors-11-07710"> HSPdigital, CA Procesamiento Digital de Señales, CA Telematica, DICIS, Universidad de Guanajuato, Carr. Salamanca-Valle km 3.5+1.8, Palo Blanco, 36885 Salamanca, Gto., Mexico; E-Mails:<email>lavera@hspdigital.org</email> (L.A.V.-S.);<email>svmoreno@hspdigital.org</email> (S.V.M.-T.);<email>troncoso@hspdigital.org</email> (R.J.R.-T.);<email>ecabal@hspdigital.org</email> (E.C.-Y.)</nlm:aff></affiliation></author><author><name sortKey="Garcia Perez, Arturo" sort="Garcia Perez, Arturo" uniqKey="Garcia Perez A" first="Arturo" last="Garcia-Perez">Arturo Garcia-Perez</name><affiliation><nlm:aff id="af1-sensors-11-07710"> HSPdigital, CA Procesamiento Digital de Señales, CA Telematica, DICIS, Universidad de Guanajuato, Carr. Salamanca-Valle km 3.5+1.8, Palo Blanco, 36885 Salamanca, Gto., Mexico; E-Mails:<email>lavera@hspdigital.org</email> (L.A.V.-S.);<email>svmoreno@hspdigital.org</email> (S.V.M.-T.);<email>troncoso@hspdigital.org</email> (R.J.R.-T.);<email>ecabal@hspdigital.org</email> (E.C.-Y.)</nlm:aff></affiliation></author><author><name sortKey="De Jesus Romero Troncoso, Rene" sort="De Jesus Romero Troncoso, Rene" uniqKey="De Jesus Romero Troncoso R" first="Rene" last="De Jesus Romero-Troncoso">Rene De Jesus Romero-Troncoso</name><affiliation><nlm:aff id="af1-sensors-11-07710"> HSPdigital, CA Procesamiento Digital de Señales, CA Telematica, DICIS, Universidad de Guanajuato, Carr. Salamanca-Valle km 3.5+1.8, Palo Blanco, 36885 Salamanca, Gto., Mexico; E-Mails:<email>lavera@hspdigital.org</email> (L.A.V.-S.);<email>svmoreno@hspdigital.org</email> (S.V.M.-T.);<email>troncoso@hspdigital.org</email> (R.J.R.-T.);<email>ecabal@hspdigital.org</email> (E.C.-Y.)</nlm:aff></affiliation></author><author><name sortKey="Osornio Rios, Roque Alfredo" sort="Osornio Rios, Roque Alfredo" uniqKey="Osornio Rios R" first="Roque Alfredo" last="Osornio-Rios">Roque Alfredo Osornio-Rios</name><affiliation><nlm:aff id="af2-sensors-11-07710"> HSPdigital, CA Mecatronica, Facultad de Ingenieria, Campus San Juan del Rio, Universidad Autonoma de Queretaro, Rio Moctezuma 249, 76807 San Juan del Rio, Qro., Mexico; E-Mails:<email>raosornio@hspdigital.org</email> (R.A.O.-R.);<email>ibrahim@uaq.mx</email> (I.S.)</nlm:aff></affiliation></author><author><name sortKey="Serroukh, Ibrahim" sort="Serroukh, Ibrahim" uniqKey="Serroukh I" first="Ibrahim" last="Serroukh">Ibrahim Serroukh</name><affiliation><nlm:aff id="af2-sensors-11-07710"> HSPdigital, CA Mecatronica, Facultad de Ingenieria, Campus San Juan del Rio, Universidad Autonoma de Queretaro, Rio Moctezuma 249, 76807 San Juan del Rio, Qro., Mexico; E-Mails:<email>raosornio@hspdigital.org</email> (R.A.O.-R.);<email>ibrahim@uaq.mx</email> (I.S.)</nlm:aff></affiliation></author><author><name sortKey="Cabal Yepez, Eduardo" sort="Cabal Yepez, Eduardo" uniqKey="Cabal Yepez E" first="Eduardo" last="Cabal-Yepez">Eduardo Cabal-Yepez</name><affiliation><nlm:aff id="af1-sensors-11-07710"> HSPdigital, CA Procesamiento Digital de Señales, CA Telematica, DICIS, Universidad de Guanajuato, Carr. Salamanca-Valle km 3.5+1.8, Palo Blanco, 36885 Salamanca, Gto., Mexico; E-Mails:<email>lavera@hspdigital.org</email> (L.A.V.-S.);<email>svmoreno@hspdigital.org</email> (S.V.M.-T.);<email>troncoso@hspdigital.org</email> (R.J.R.-T.);<email>ecabal@hspdigital.org</email> (E.C.-Y.)</nlm:aff></affiliation></author></titleStmt><publicationStmt><idno type="wicri:source">PMC</idno><idno type="pmid">22164040</idno><idno type="pmc">3231721</idno><idno type="url">http://www.ncbi.nlm.nih.gov/pmc/articles/PMC3231721</idno><idno type="RBID">PMC:3231721</idno><idno type="doi">10.3390/s110807710</idno><date when="2011">2011</date><idno type="wicri:Area/Pmc/Corpus">000591</idno><idno type="wicri:explorRef" wicri:stream="Pmc" wicri:step="Corpus" wicri:corpus="PMC">000591</idno><idno type="wicri:Area/Pmc/Curation">000591</idno><idno type="wicri:explorRef" wicri:stream="Pmc" wicri:step="Curation">000591</idno><idno type="wicri:Area/Pmc/Checkpoint">000363</idno><idno type="wicri:explorRef" wicri:stream="Pmc" wicri:step="Checkpoint">000363</idno></publicationStmt><sourceDesc><biblStruct><analytic><title xml:lang="en" level="a" type="main">FPGA-Based Smart Sensor for Online Displacement Measurements Using a Heterodyne Interferometer</title><author><name sortKey="Vera Salas, Luis Alberto" sort="Vera Salas, Luis Alberto" uniqKey="Vera Salas L" first="Luis Alberto" last="Vera-Salas">Luis Alberto Vera-Salas</name><affiliation><nlm:aff id="af1-sensors-11-07710"> HSPdigital, CA Procesamiento Digital de Señales, CA Telematica, DICIS, Universidad de Guanajuato, Carr. Salamanca-Valle km 3.5+1.8, Palo Blanco, 36885 Salamanca, Gto., Mexico; E-Mails:<email>lavera@hspdigital.org</email> (L.A.V.-S.);<email>svmoreno@hspdigital.org</email> (S.V.M.-T.);<email>troncoso@hspdigital.org</email> (R.J.R.-T.);<email>ecabal@hspdigital.org</email> (E.C.-Y.)</nlm:aff></affiliation></author><author><name sortKey="Moreno Tapia, Sandra Veronica" sort="Moreno Tapia, Sandra Veronica" uniqKey="Moreno Tapia S" first="Sandra Veronica" last="Moreno-Tapia">Sandra Veronica Moreno-Tapia</name><affiliation><nlm:aff id="af1-sensors-11-07710"> HSPdigital, CA Procesamiento Digital de Señales, CA Telematica, DICIS, Universidad de Guanajuato, Carr. Salamanca-Valle km 3.5+1.8, Palo Blanco, 36885 Salamanca, Gto., Mexico; E-Mails:<email>lavera@hspdigital.org</email> (L.A.V.-S.);<email>svmoreno@hspdigital.org</email> (S.V.M.-T.);<email>troncoso@hspdigital.org</email> (R.J.R.-T.);<email>ecabal@hspdigital.org</email> (E.C.-Y.)</nlm:aff></affiliation></author><author><name sortKey="Garcia Perez, Arturo" sort="Garcia Perez, Arturo" uniqKey="Garcia Perez A" first="Arturo" last="Garcia-Perez">Arturo Garcia-Perez</name><affiliation><nlm:aff id="af1-sensors-11-07710"> HSPdigital, CA Procesamiento Digital de Señales, CA Telematica, DICIS, Universidad de Guanajuato, Carr. Salamanca-Valle km 3.5+1.8, Palo Blanco, 36885 Salamanca, Gto., Mexico; E-Mails:<email>lavera@hspdigital.org</email> (L.A.V.-S.);<email>svmoreno@hspdigital.org</email> (S.V.M.-T.);<email>troncoso@hspdigital.org</email> (R.J.R.-T.);<email>ecabal@hspdigital.org</email> (E.C.-Y.)</nlm:aff></affiliation></author><author><name sortKey="De Jesus Romero Troncoso, Rene" sort="De Jesus Romero Troncoso, Rene" uniqKey="De Jesus Romero Troncoso R" first="Rene" last="De Jesus Romero-Troncoso">Rene De Jesus Romero-Troncoso</name><affiliation><nlm:aff id="af1-sensors-11-07710"> HSPdigital, CA Procesamiento Digital de Señales, CA Telematica, DICIS, Universidad de Guanajuato, Carr. Salamanca-Valle km 3.5+1.8, Palo Blanco, 36885 Salamanca, Gto., Mexico; E-Mails:<email>lavera@hspdigital.org</email> (L.A.V.-S.);<email>svmoreno@hspdigital.org</email> (S.V.M.-T.);<email>troncoso@hspdigital.org</email> (R.J.R.-T.);<email>ecabal@hspdigital.org</email> (E.C.-Y.)</nlm:aff></affiliation></author><author><name sortKey="Osornio Rios, Roque Alfredo" sort="Osornio Rios, Roque Alfredo" uniqKey="Osornio Rios R" first="Roque Alfredo" last="Osornio-Rios">Roque Alfredo Osornio-Rios</name><affiliation><nlm:aff id="af2-sensors-11-07710"> HSPdigital, CA Mecatronica, Facultad de Ingenieria, Campus San Juan del Rio, Universidad Autonoma de Queretaro, Rio Moctezuma 249, 76807 San Juan del Rio, Qro., Mexico; E-Mails:<email>raosornio@hspdigital.org</email> (R.A.O.-R.);<email>ibrahim@uaq.mx</email> (I.S.)</nlm:aff></affiliation></author><author><name sortKey="Serroukh, Ibrahim" sort="Serroukh, Ibrahim" uniqKey="Serroukh I" first="Ibrahim" last="Serroukh">Ibrahim Serroukh</name><affiliation><nlm:aff id="af2-sensors-11-07710"> HSPdigital, CA Mecatronica, Facultad de Ingenieria, Campus San Juan del Rio, Universidad Autonoma de Queretaro, Rio Moctezuma 249, 76807 San Juan del Rio, Qro., Mexico; E-Mails:<email>raosornio@hspdigital.org</email> (R.A.O.-R.);<email>ibrahim@uaq.mx</email> (I.S.)</nlm:aff></affiliation></author><author><name sortKey="Cabal Yepez, Eduardo" sort="Cabal Yepez, Eduardo" uniqKey="Cabal Yepez E" first="Eduardo" last="Cabal-Yepez">Eduardo Cabal-Yepez</name><affiliation><nlm:aff id="af1-sensors-11-07710"> HSPdigital, CA Procesamiento Digital de Señales, CA Telematica, DICIS, Universidad de Guanajuato, Carr. Salamanca-Valle km 3.5+1.8, Palo Blanco, 36885 Salamanca, Gto., Mexico; E-Mails:<email>lavera@hspdigital.org</email> (L.A.V.-S.);<email>svmoreno@hspdigital.org</email> (S.V.M.-T.);<email>troncoso@hspdigital.org</email> (R.J.R.-T.);<email>ecabal@hspdigital.org</email> (E.C.-Y.)</nlm:aff></affiliation></author></analytic><series><title level="j">Sensors (Basel, Switzerland)</title><idno type="eISSN">1424-8220</idno><imprint><date when="2011">2011</date></imprint></series></biblStruct></sourceDesc></fileDesc><profileDesc><textClass></textClass></profileDesc></teiHeader><front><div type="abstract" xml:lang="en"><p>The measurement of small displacements on the nanometric scale demands metrological systems of high accuracy and precision. In this context, interferometer-based displacement measurements have become the main tools used for traceable dimensional metrology. The different industrial applications in which small displacement measurements are employed requires the use of online measurements, high speed processes, open architecture control systems, as well as good adaptability to specific process conditions. The main contribution of this work is the development of a smart sensor for large displacement measurement based on phase measurement which achieves high accuracy and resolution, designed to be used with a commercial heterodyne interferometer. The system is based on a low-cost Field Programmable Gate Array (FPGA) allowing the integration of several functions in a single portable device. This system is optimal for high speed applications where online measurement is needed and the reconfigurability feature allows the addition of different modules for error compensation, as might be required by a specific application.</p></div></front><back><div1 type="bibliography"><listBibl><biblStruct><analytic><author><name sortKey="Yacoot, A" uniqKey="Yacoot A">A Yacoot</name></author><author><name sortKey="Pisani, M" uniqKey="Pisani M">M Pisani</name></author><author><name sortKey="Picotto, Gb" uniqKey="Picotto G">GB Picotto</name></author><author><name sortKey="Kuetgens, U" uniqKey="Kuetgens U">U Kuetgens</name></author><author><name sortKey="Flugge, J" uniqKey="Flugge J">J Flügge</name></author><author><name sortKey="Kren, P" uniqKey="Kren P">P Kren</name></author><author><name sortKey="Lassila, A" uniqKey="Lassila A">A Lassila</name></author><author><name sortKey="Sepp, S" uniqKey="Sepp S">S Seppä</name></author><author><name sortKey="Hamid, R" uniqKey="Hamid R">R Hamid</name></author><author><name sortKey="Celik, M" uniqKey="Celik M">M Celik</name></author><author><name sortKey="Matus, M" uniqKey="Matus M">M Matus</name></author><author><name sortKey="Nie Ner, A" uniqKey="Nie Ner A">A Nießner</name></author></analytic></biblStruct><biblStruct><analytic><author><name sortKey="Zhang, L" uniqKey="Zhang L">L Zhang</name></author><author><name sortKey="Zhang, S" uniqKey="Zhang S">S Zhang</name></author><author><name sortKey="Zhou, L" uniqKey="Zhou L">L Zhou</name></author><author><name sortKey="Fujii, Y" uniqKey="Fujii Y">Y Fujii</name></author></analytic></biblStruct><biblStruct><analytic><author><name sortKey="Lee, Y" uniqKey="Lee Y">Y Lee</name></author><author><name sortKey="Dornfeld, Da" uniqKey="Dornfeld D">DA Dornfeld</name></author></analytic></biblStruct><biblStruct><analytic><author><name sortKey="Dornfeld, Da" uniqKey="Dornfeld D">DA Dornfeld</name></author></analytic></biblStruct><biblStruct><analytic><author><name sortKey="Simon, S" uniqKey="Simon S">S Simon</name></author><author><name sortKey="Blanaru, C" uniqKey="Blanaru C">C Blanaru</name></author><author><name sortKey="Ursescu, D" uniqKey="Ursescu D">D Ursescu</name></author></analytic></biblStruct><biblStruct><analytic><author><name sortKey="Schattenburg, Ml" uniqKey="Schattenburg M">ML Schattenburg</name></author><author><name sortKey="Chen, C" uniqKey="Chen C">C Chen</name></author><author><name sortKey="Everett, Pn" uniqKey="Everett P">PN Everett</name></author><author><name sortKey="Ferrera, J" uniqKey="Ferrera J">J Ferrera</name></author><author><name sortKey="Konkola, P" uniqKey="Konkola P">P Konkola</name></author><author><name sortKey="Smith, Hi" uniqKey="Smith H">HI Smith</name></author></analytic></biblStruct><biblStruct><analytic><author><name sortKey="El Necklawy, Mm" uniqKey="El Necklawy M">MM El-Necklawy</name></author><author><name sortKey="El Bahrawy, M" uniqKey="El Bahrawy M">M El-Bahrawy</name></author><author><name sortKey="Hassan, Af" uniqKey="Hassan A">AF Hassan</name></author><author><name sortKey="Farid, N" uniqKey="Farid N">N Farid</name></author><author><name sortKey="Arif Sanjid, M" uniqKey="Arif Sanjid M">M Arif-Sanjid</name></author></analytic></biblStruct><biblStruct><analytic><author><name sortKey="Wang, S F" uniqKey="Wang S">S-F Wang</name></author></analytic></biblStruct><biblStruct><analytic><author><name sortKey="Schuldt, T" uniqKey="Schuldt T">T Schuldt</name></author><author><name sortKey="Gohlke, M" uniqKey="Gohlke M">M Gohlke</name></author><author><name sortKey="Weise, D" uniqKey="Weise D">D Weise</name></author><author><name sortKey="Peters, A" uniqKey="Peters A">A Peters</name></author></analytic></biblStruct><biblStruct><analytic><author><name sortKey="Cordero, J" uniqKey="Cordero J">J Cordero</name></author><author><name sortKey="Heinrich, T" uniqKey="Heinrich T">T Heinrich</name></author><author><name sortKey="Schuldt, T" uniqKey="Schuldt T">T Schuldt</name></author><author><name sortKey="Gohlke, M" uniqKey="Gohlke M">M Gohlke</name></author><author><name sortKey="Lucarelli, S" uniqKey="Lucarelli S">S Lucarelli</name></author><author><name sortKey="Weise, D" uniqKey="Weise D">D Weise</name></author><author><name sortKey="Johann, U" uniqKey="Johann U">U Johann</name></author><author><name sortKey="Braxmaier, C" uniqKey="Braxmaier C">C Braxmaier</name></author></analytic></biblStruct><biblStruct><analytic><author><name sortKey="Hsu, Mtl" uniqKey="Hsu M">MTL Hsu</name></author><author><name sortKey="Littler, Icm" uniqKey="Littler I">ICM Littler</name></author><author><name sortKey="Shaddock, Da" uniqKey="Shaddock D">DA Shaddock</name></author><author><name sortKey="Herrmann, J" uniqKey="Herrmann J">J Herrmann</name></author><author><name sortKey="Warrington, Rb" uniqKey="Warrington R">RB Warrington</name></author><author><name sortKey="Gray, Mb" uniqKey="Gray M">MB Gray</name></author></analytic></biblStruct><biblStruct><analytic><author><name sortKey="Zelenika, S" uniqKey="Zelenika S">S Zelenika</name></author><author><name sortKey="De Bona, F" uniqKey="De Bona F">F De Bona</name></author></analytic></biblStruct><biblStruct><analytic><author><name sortKey="Stone, J" uniqKey="Stone J">J Stone</name></author><author><name sortKey="Phillips, Sd" uniqKey="Phillips S">SD Phillips</name></author></analytic></biblStruct><biblStruct><analytic><author><name sortKey="Shirinzadeh, B" uniqKey="Shirinzadeh B">B Shirinzadeh</name></author><author><name sortKey="Teoh, Pl" uniqKey="Teoh P">PL Teoh</name></author><author><name sortKey="Tian, Y" uniqKey="Tian Y">Y Tian</name></author><author><name sortKey="Dalvand, Mm" uniqKey="Dalvand M">MM Dalvand</name></author><author><name sortKey="Zhong, Y" uniqKey="Zhong Y">Y Zhong</name></author><author><name sortKey="Liaw, Hc" uniqKey="Liaw H">HC Liaw</name></author></analytic></biblStruct><biblStruct><analytic><author><name sortKey="Rivera, J" uniqKey="Rivera J">J Rivera</name></author><author><name sortKey="Herrera, G" uniqKey="Herrera G">G Herrera</name></author><author><name sortKey="Chac N, M" uniqKey="Chac N M">M Chacón</name></author><author><name sortKey="Acosta, P" uniqKey="Acosta P">P Acosta</name></author><author><name sortKey="Carrillo, M" uniqKey="Carrillo M">M Carrillo</name></author></analytic></biblStruct><biblStruct><analytic><author><name sortKey="Morales Velazquez, L" uniqKey="Morales Velazquez L">L Morales-Velazquez</name></author><author><name sortKey="Romero Troncoso, Rj" uniqKey="Romero Troncoso R">RJ Romero-Troncoso</name></author><author><name sortKey="Osornio Rios, Ra" uniqKey="Osornio Rios R">RA Osornio-Rios</name></author><author><name sortKey="Cabal Yepez, E" uniqKey="Cabal Yepez E">E Cabal-Yepez</name></author></analytic></biblStruct><biblStruct><analytic><author><name sortKey="Rangel Magdaleno, Jj" uniqKey="Rangel Magdaleno J">JJ Rangel-Magdaleno</name></author><author><name sortKey="Romero Troncoso, Rj" uniqKey="Romero Troncoso R">RJ Romero-Troncoso</name></author><author><name sortKey="Osornio Rios, Ra" uniqKey="Osornio Rios R">RA Osornio-Rios</name></author><author><name sortKey="Cabal Yepez, E" uniqKey="Cabal Yepez E">E Cabal-Yepez</name></author><author><name sortKey="Dominguez Gonzalez, A" uniqKey="Dominguez Gonzalez A">A Dominguez-Gonzalez</name></author></analytic></biblStruct><biblStruct><analytic><author><name sortKey="Trejo Hernandez, M" uniqKey="Trejo Hernandez M">M Trejo-Hernandez</name></author><author><name sortKey="Osornio Rios, Ra" uniqKey="Osornio Rios R">RA Osornio-Rios</name></author><author><name sortKey="Romero Troncoso, Rj" uniqKey="Romero Troncoso R">RJ Romero-Troncoso</name></author><author><name sortKey="Rodriguez Donate, C" uniqKey="Rodriguez Donate C">C Rodriguez-Donate</name></author><author><name sortKey="Dominguez Gonzalez, A" uniqKey="Dominguez Gonzalez A">A Dominguez-Gonzalez</name></author><author><name sortKey="Herrera Ruiz, G" uniqKey="Herrera Ruiz G">G Herrera-Ruiz</name></author></analytic></biblStruct><biblStruct><analytic><author><name sortKey="Ottonelli, S" uniqKey="Ottonelli S">S Ottonelli</name></author><author><name sortKey="Dabbicco, M" uniqKey="Dabbicco M">M Dabbicco</name></author><author><name sortKey="De Lucia, F" uniqKey="De Lucia F">F de Lucia</name></author><author><name sortKey="Di Vietro, M" uniqKey="Di Vietro M">M di Vietro</name></author><author><name sortKey="Scamarcio, G" uniqKey="Scamarcio G">G Scamarcio</name></author></analytic></biblStruct><biblStruct><analytic><author><name sortKey="Awtar, S" uniqKey="Awtar S">S Awtar</name></author><author><name sortKey="Parmar, G" uniqKey="Parmar G">G Parmar</name></author></analytic></biblStruct><biblStruct><analytic><author><name sortKey="Vander Voort, Gf" uniqKey="Vander Voort G">GF Vander Voort</name></author></analytic></biblStruct><biblStruct><analytic><author><name sortKey="Leach, R" uniqKey="Leach R">R Leach</name></author></analytic></biblStruct><biblStruct><analytic><author><name sortKey="Hariharan, P" uniqKey="Hariharan P">P Hariharan</name></author></analytic></biblStruct><biblStruct></biblStruct><biblStruct></biblStruct><biblStruct></biblStruct><biblStruct></biblStruct><biblStruct><analytic><author><name sortKey="Taylor, Re" uniqKey="Taylor R">RE Taylor</name></author></analytic></biblStruct><biblStruct></biblStruct></listBibl></div1></back></TEI><pmc article-type="research-article"><pmc-dir>properties open_access</pmc-dir>
<front><journal-meta><journal-id journal-id-type="nlm-ta">Sensors (Basel)</journal-id><journal-title-group><journal-title>Sensors (Basel, Switzerland)</journal-title></journal-title-group><issn pub-type="epub">1424-8220</issn><publisher><publisher-name>Molecular Diversity Preservation International (MDPI)</publisher-name></publisher></journal-meta><article-meta><article-id pub-id-type="pmid">22164040</article-id><article-id pub-id-type="pmc">3231721</article-id><article-id pub-id-type="doi">10.3390/s110807710</article-id><article-id pub-id-type="publisher-id">sensors-11-07710</article-id><article-categories><subj-group subj-group-type="heading"><subject>Article</subject></subj-group></article-categories><title-group><article-title>FPGA-Based Smart Sensor for Online Displacement Measurements Using a Heterodyne Interferometer</article-title></title-group><contrib-group><contrib contrib-type="author"><name><surname>Vera-Salas</surname><given-names>Luis Alberto</given-names></name><xref ref-type="aff" rid="af1-sensors-11-07710"><sup>1</sup></xref></contrib><contrib contrib-type="author"><name><surname>Moreno-Tapia</surname><given-names>Sandra Veronica</given-names></name><xref ref-type="aff" rid="af1-sensors-11-07710"><sup>1</sup></xref></contrib><contrib contrib-type="author"><name><surname>Garcia-Perez</surname><given-names>Arturo</given-names></name><xref ref-type="aff" rid="af1-sensors-11-07710"><sup>1</sup></xref><xref ref-type="corresp" rid="c1-sensors-11-07710"><sup>*</sup></xref></contrib><contrib contrib-type="author"><name><surname>de Jesus Romero-Troncoso</surname><given-names>Rene</given-names></name><xref ref-type="aff" rid="af1-sensors-11-07710"><sup>1</sup></xref></contrib><contrib contrib-type="author"><name><surname>Osornio-Rios</surname><given-names>Roque Alfredo</given-names></name><xref ref-type="aff" rid="af2-sensors-11-07710"><sup>2</sup></xref></contrib><contrib contrib-type="author"><name><surname>Serroukh</surname><given-names>Ibrahim</given-names></name><xref ref-type="aff" rid="af2-sensors-11-07710"><sup>2</sup></xref></contrib><contrib contrib-type="author"><name><surname>Cabal-Yepez</surname><given-names>Eduardo</given-names></name><xref ref-type="aff" rid="af1-sensors-11-07710"><sup>1</sup></xref></contrib></contrib-group><aff id="af1-sensors-11-07710"><label>1</label> HSPdigital, CA Procesamiento Digital de Señales, CA Telematica, DICIS, Universidad de Guanajuato, Carr. Salamanca-Valle km 3.5+1.8, Palo Blanco, 36885 Salamanca, Gto., Mexico; E-Mails:<email>lavera@hspdigital.org</email> (L.A.V.-S.);<email>svmoreno@hspdigital.org</email> (S.V.M.-T.);<email>troncoso@hspdigital.org</email> (R.J.R.-T.);<email>ecabal@hspdigital.org</email> (E.C.-Y.)</aff><aff id="af2-sensors-11-07710"><label>2</label> HSPdigital, CA Mecatronica, Facultad de Ingenieria, Campus San Juan del Rio, Universidad Autonoma de Queretaro, Rio Moctezuma 249, 76807 San Juan del Rio, Qro., Mexico; E-Mails:<email>raosornio@hspdigital.org</email> (R.A.O.-R.);<email>ibrahim@uaq.mx</email> (I.S.)</aff><author-notes><corresp id="c1-sensors-11-07710"><label>*</label>Author to whom correspondence should be addressed; E-Mail: <email>agarcia@hspdigital.org</email>; Tel.: +52-464-647-9940; Fax: +52-464-647-9940.</corresp></author-notes><pub-date pub-type="collection"><year>2011</year></pub-date><pub-date pub-type="epub"><day>5</day><month>8</month><year>2011</year></pub-date><volume>11</volume><issue>8</issue><fpage>7710</fpage><lpage>7723</lpage><history><date date-type="received"><day>10</day><month>6</month><year>2011</year></date><date date-type="rev-recd"><day>2</day><month>8</month><year>2011</year></date><date date-type="accepted"><day>4</day><month>8</month><year>2011</year></date></history><permissions><copyright-statement>© 2011 by the authors; licensee MDPI, Basel, Switzerland.</copyright-statement><copyright-year>2011</copyright-year><license><license-p><pmc-comment>CREATIVE COMMONS</pmc-comment>This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution license (<ext-link ext-link-type="uri" xlink:href="http://creativecommons.org/licenses/by/3.0/">http://creativecommons.org/licenses/by/3.0/</ext-link>).</license-p></license></permissions><abstract><p>The measurement of small displacements on the nanometric scale demands metrological systems of high accuracy and precision. In this context, interferometer-based displacement measurements have become the main tools used for traceable dimensional metrology. The different industrial applications in which small displacement measurements are employed requires the use of online measurements, high speed processes, open architecture control systems, as well as good adaptability to specific process conditions. The main contribution of this work is the development of a smart sensor for large displacement measurement based on phase measurement which achieves high accuracy and resolution, designed to be used with a commercial heterodyne interferometer. The system is based on a low-cost Field Programmable Gate Array (FPGA) allowing the integration of several functions in a single portable device. This system is optimal for high speed applications where online measurement is needed and the reconfigurability feature allows the addition of different modules for error compensation, as might be required by a specific application.</p></abstract><kwd-group><kwd>smart sensor</kwd><kwd>FPGA</kwd><kwd>heterodyne interferometer</kwd><kwd>phase measurement</kwd></kwd-group></article-meta></front><floats-group><fig id="f1-sensors-11-07710" position="float"><label>Figure 1.</label><caption><p>Heterodyne laser system operation.</p></caption><graphic xlink:href="sensors-11-07710f1"></graphic></fig><fig id="f2-sensors-11-07710" position="float"><label>Figure 2.</label><caption><p>Schematic diagram of the smart sensor proposed.</p></caption><graphic xlink:href="sensors-11-07710f2"></graphic></fig><fig id="f3-sensors-11-07710" position="float"><label>Figure 3.</label><caption><p>Block diagram of the digital measurement IP core.</p></caption><graphic xlink:href="sensors-11-07710f3"></graphic></fig><fig id="f4-sensors-11-07710" position="float"><label>Figure 4.</label><caption><p>Block diagram of the phase estimation IP core.</p></caption><graphic xlink:href="sensors-11-07710f4"></graphic></fig><fig id="f5-sensors-11-07710" position="float"><label>Figure 5.</label><caption><p>Block diagram of experimental setup.</p></caption><graphic xlink:href="sensors-11-07710f5"></graphic></fig><fig id="f6-sensors-11-07710" position="float"><label>Figure 6.</label><caption><p>Moving reflector and calibration pattern mounting.</p></caption><graphic xlink:href="sensors-11-07710f6"></graphic></fig><fig id="f7-sensors-11-07710" position="float"><label>Figure 7.</label><caption><p>Signal measured for 20 μm displacements.</p></caption><graphic xlink:href="sensors-11-07710f7"></graphic></fig><fig id="f8-sensors-11-07710" position="float"><label>Figure 8.</label><caption><p>Optical arrangement for linear expansion measurement.</p></caption><graphic xlink:href="sensors-11-07710f8"></graphic></fig><fig id="f9-sensors-11-07710" position="float"><label>Figure 9.</label><caption><p>Graphic of displacement <italic>vs.</italic> temperature in accuracy experiment.</p></caption><graphic xlink:href="sensors-11-07710f9"></graphic></fig><table-wrap id="t1-sensors-11-07710" position="float"><label>Table 1.</label><caption><p>Metallographic typical applications requirements.</p></caption><table frame="box" rules="cols"><thead><tr content-type="background-color:#A8A8A8"><th align="center" valign="bottom" rowspan="1" colspan="1"><bold>Feature</bold></th><th align="center" valign="bottom" rowspan="1" colspan="1"><bold>Typical application</bold></th><th align="center" valign="bottom" rowspan="1" colspan="1"><bold>Requirement</bold></th><th align="center" valign="bottom" rowspan="1" colspan="1"><bold>Description</bold></th></tr><tr><th align="center" valign="bottom" colspan="4" rowspan="1"><hr></hr></th></tr></thead><tbody><tr><td align="center" valign="middle" rowspan="1" colspan="1">Resolution</td><td align="center" valign="middle" rowspan="1" colspan="1">Surface topography</td><td align="center" valign="middle" rowspan="1" colspan="1">1–400 μm</td><td align="left" valign="middle" rowspan="1" colspan="1">Roughness differences can be measured, which is useful in examining machined surfaces and for measurement of surfaces layers or films.</td></tr><tr content-type="background-color:#A8A8A8"><td align="center" valign="middle" rowspan="1" colspan="1">Distance</td><td align="center" valign="middle" rowspan="1" colspan="1">Large Area Disector (LAD) technique</td><td align="center" valign="middle" rowspan="1" colspan="1">>300 mm</td><td align="left" valign="middle" rowspan="1" colspan="1">Metallographic better-quality data obtained from analyzing a larger sample area and/or more samples.</td></tr><tr><td align="center" valign="middle" rowspan="1" colspan="1">Accuracy</td><td align="center" valign="middle" rowspan="1" colspan="1">Inclusions in a heat of steel</td><td align="center" valign="middle" rowspan="1" colspan="1">30 μm</td><td align="left" valign="middle" rowspan="1" colspan="1">Distance between two fields of view is about 30 μm</td></tr><tr content-type="background-color:#A8A8A8"><td align="center" valign="middle" rowspan="1" colspan="1">Precision</td><td align="center" valign="middle" rowspan="1" colspan="1">Hardness test</td><td align="center" valign="middle" rowspan="1" colspan="1">20 μm–1 mm</td><td align="left" valign="middle" rowspan="1" colspan="1">Metallographic automatic stage movement ensures selection of fields without introducing operator bias.</td></tr><tr><td align="center" valign="middle" rowspan="1" colspan="1">Velocity</td><td align="center" valign="middle" rowspan="1" colspan="1">Number Density of microstructural features</td><td align="center" valign="middle" rowspan="1" colspan="1">0.2 m/s</td><td align="left" valign="middle" rowspan="1" colspan="1">For obtaining about 25 to 100 microstructural fields, high speed on sampling is required.</td></tr><tr content-type="background-color:#A8A8A8"><td align="center" valign="middle" rowspan="1" colspan="1">On-line</td><td align="center" valign="middle" rowspan="1" colspan="1">Metallographic automatic stage</td><td align="center" valign="middle" rowspan="1" colspan="1"><1 ms</td><td align="left" valign="middle" rowspan="1" colspan="1">Automatic devices permit more rapid data collection; image analyzers can perform several measurements on field within milliseconds.</td></tr></tbody></table></table-wrap><table-wrap id="t2-sensors-11-07710" position="float"><label>Table 2.</label><caption><p>Features comparative between the proposal and reported works.</p></caption><table frame="box" rules="cols"><thead><tr content-type="background-color:#A8A8A8"><th align="center" valign="middle" rowspan="1" colspan="1"><bold>Reference</bold></th><th align="center" valign="middle" rowspan="1" colspan="1"><bold>Interferometer type</bold></th><th align="center" valign="middle" rowspan="1" colspan="1"><bold>Resolution</bold></th><th align="center" valign="middle" rowspan="1" colspan="1"><bold>Accuracy</bold></th><th align="center" valign="middle" rowspan="1" colspan="1"><bold>Portability</bold></th><th align="center" valign="middle" rowspan="1" colspan="1"><bold>Online (processing time)</bold></th><th align="center" valign="middle" rowspan="1" colspan="1"><bold>Range of measurement</bold></th></tr><tr><th align="center" valign="middle" colspan="7" rowspan="1"><hr></hr></th></tr></thead><tbody><tr><td align="center" valign="middle" rowspan="1" colspan="1">Zhang <italic>et al.</italic> [<xref ref-type="bibr" rid="b2-sensors-11-07710">2</xref>]</td><td align="center" valign="middle" rowspan="1" colspan="1">Heterodyne</td><td align="center" valign="middle" rowspan="1" colspan="1">0.791 nm</td><td align="center" valign="middle" rowspan="1" colspan="1">40 nm</td><td align="center" valign="middle" rowspan="1" colspan="1">YES</td><td align="center" valign="middle" rowspan="1" colspan="1">YES (32 μs)</td><td align="center" valign="middle" rowspan="1" colspan="1"><1 mm</td></tr><tr content-type="background-color:#A8A8A8"><td align="center" valign="middle" rowspan="1" colspan="1">Simon <italic>et al.</italic> [<xref ref-type="bibr" rid="b5-sensors-11-07710">5</xref>]</td><td align="center" valign="middle" rowspan="1" colspan="1">Homodyne</td><td align="center" valign="middle" rowspan="1" colspan="1">20 nm</td><td align="center" valign="middle" rowspan="1" colspan="1"><xref ref-type="table-fn" rid="tfn1-sensors-11-07710">*</xref></td><td align="center" valign="middle" rowspan="1" colspan="1">NO</td><td align="center" valign="middle" rowspan="1" colspan="1">YES (<xref ref-type="table-fn" rid="tfn1-sensors-11-07710">*</xref>)</td><td align="center" valign="middle" rowspan="1" colspan="1"><xref ref-type="table-fn" rid="tfn1-sensors-11-07710">*</xref></td></tr><tr><td align="center" valign="middle" rowspan="1" colspan="1">Schuldt <italic>et al.</italic> [<xref ref-type="bibr" rid="b9-sensors-11-07710">9</xref>]</td><td align="center" valign="middle" rowspan="1" colspan="1">Heterodyne</td><td align="center" valign="middle" rowspan="1" colspan="1">5 pm/√Hz</td><td align="center" valign="middle" rowspan="1" colspan="1"><xref ref-type="table-fn" rid="tfn1-sensors-11-07710">*</xref></td><td align="center" valign="middle" rowspan="1" colspan="1">NO</td><td align="center" valign="middle" rowspan="1" colspan="1">NO (100s)</td><td align="center" valign="middle" rowspan="1" colspan="1"><xref ref-type="table-fn" rid="tfn1-sensors-11-07710">*</xref></td></tr><tr content-type="background-color:#A8A8A8"><td align="center" valign="middle" rowspan="1" colspan="1">Wang [<xref ref-type="bibr" rid="b8-sensors-11-07710">8</xref>]</td><td align="center" valign="middle" rowspan="1" colspan="1">Heterodyne</td><td align="center" valign="middle" rowspan="1" colspan="1">0.45 nm</td><td align="center" valign="middle" rowspan="1" colspan="1"><xref ref-type="table-fn" rid="tfn1-sensors-11-07710">*</xref></td><td align="center" valign="middle" rowspan="1" colspan="1">NO</td><td align="center" valign="middle" rowspan="1" colspan="1">YES (<xref ref-type="table-fn" rid="tfn1-sensors-11-07710">*</xref>)</td><td align="center" valign="middle" rowspan="1" colspan="1">±500 nm</td></tr><tr><td align="center" valign="middle" rowspan="1" colspan="1">Zelenika and De Bona [<xref ref-type="bibr" rid="b12-sensors-11-07710">12</xref>]</td><td align="center" valign="middle" rowspan="1" colspan="1">Michelson</td><td align="center" valign="middle" rowspan="1" colspan="1">10 μm</td><td align="center" valign="middle" rowspan="1" colspan="1"><xref ref-type="table-fn" rid="tfn1-sensors-11-07710">*</xref></td><td align="center" valign="middle" rowspan="1" colspan="1">NO</td><td align="center" valign="middle" rowspan="1" colspan="1">YES (Offline identification)</td><td align="center" valign="middle" rowspan="1" colspan="1">1 mm</td></tr><tr content-type="background-color:#A8A8A8"><td align="center" valign="middle" rowspan="1" colspan="1">This work</td><td align="center" valign="middle" rowspan="1" colspan="1">Heterodyne</td><td align="center" valign="middle" rowspan="1" colspan="1">3.4 nm</td><td align="center" valign="middle" rowspan="1" colspan="1">9.9 nm</td><td align="center" valign="middle" rowspan="1" colspan="1">YES</td><td align="center" valign="middle" rowspan="1" colspan="1">YES (357 ns)</td><td align="center" valign="middle" rowspan="1" colspan="1">>3 m</td></tr></tbody></table><table-wrap-foot><fn id="tfn1-sensors-11-07710"><label>*</label><p>Not reported</p></fn></table-wrap-foot></table-wrap></floats-group></pmc><affiliations><list></list><tree><noCountry><name sortKey="Cabal Yepez, Eduardo" sort="Cabal Yepez, Eduardo" uniqKey="Cabal Yepez E" first="Eduardo" last="Cabal-Yepez">Eduardo Cabal-Yepez</name><name sortKey="De Jesus Romero Troncoso, Rene" sort="De Jesus Romero Troncoso, Rene" uniqKey="De Jesus Romero Troncoso R" first="Rene" last="De Jesus Romero-Troncoso">Rene De Jesus Romero-Troncoso</name><name sortKey="Garcia Perez, Arturo" sort="Garcia Perez, Arturo" uniqKey="Garcia Perez A" first="Arturo" last="Garcia-Perez">Arturo Garcia-Perez</name><name sortKey="Moreno Tapia, Sandra Veronica" sort="Moreno Tapia, Sandra Veronica" uniqKey="Moreno Tapia S" first="Sandra Veronica" last="Moreno-Tapia">Sandra Veronica Moreno-Tapia</name><name sortKey="Osornio Rios, Roque Alfredo" sort="Osornio Rios, Roque Alfredo" uniqKey="Osornio Rios R" first="Roque Alfredo" last="Osornio-Rios">Roque Alfredo Osornio-Rios</name><name sortKey="Serroukh, Ibrahim" sort="Serroukh, Ibrahim" uniqKey="Serroukh I" first="Ibrahim" last="Serroukh">Ibrahim Serroukh</name><name sortKey="Vera Salas, Luis Alberto" sort="Vera Salas, Luis Alberto" uniqKey="Vera Salas L" first="Luis Alberto" last="Vera-Salas">Luis Alberto Vera-Salas</name></noCountry></tree></affiliations></record>Pour manipuler ce document sous Unix (Dilib)
EXPLOR_STEP=$WICRI_ROOT/Ticri/CIDE/explor/TelematiV1/Data/Pmc/Checkpoint
HfdSelect -h $EXPLOR_STEP/biblio.hfd -nk 000363 | SxmlIndent | more
Ou
HfdSelect -h $EXPLOR_AREA/Data/Pmc/Checkpoint/biblio.hfd -nk 000363 | SxmlIndent | more
Pour mettre un lien sur cette page dans le réseau Wicri
{{Explor lien
|wiki= Ticri/CIDE
|area= TelematiV1
|flux= Pmc
|étape= Checkpoint
|type= RBID
|clé= PMC:3231721
|texte= FPGA-Based Smart Sensor for Online Displacement Measurements Using a Heterodyne Interferometer
}}
Pour générer des pages wiki
HfdIndexSelect -h $EXPLOR_AREA/Data/Pmc/Checkpoint/RBID.i -Sk "pubmed:22164040" \
| HfdSelect -Kh $EXPLOR_AREA/Data/Pmc/Checkpoint/biblio.hfd \
| NlmPubMed2Wicri -a TelematiV1
| This area was generated with Dilib version V0.6.31. |  |