Modeling dynamic cluster SIMS experiments
Identifieur interne : 000467 ( Istex/Corpus ); précédent : 000466; suivant : 000468Modeling dynamic cluster SIMS experiments
Auteurs : Barbara J. Garrison ; Zachary J. Schiffer ; Paul E. Kennedy ; Zbigniew PostawaSource :
- Surface and Interface Analysis [ 0142-2421 ] ; 2013-01.
Abstract
The underpinnings of two SIMS experimental findings are elucidated using the power of molecular dynamics to provide insight at the molecular level. First, the improvement of depth resolution for C60 bombardment of Irganox delta layers and polymer layers using sample rotation is explained by molecular dynamics simulations of the repetitive bombardment of Ag surfaces with 20 keV Au3, C60, and Ar872 at grazing angles of incidence with both single azimuthal angle and random azimuthal angles. Single azimuthal angle simulations at grazing angles show the formation of trenches and valleys parallel to the cluster beam form and are elongated with increasing incident angle. Cluster bombardment simulations with random azimuthal angles mimic sample rotation and show that under grazing angles of incidence, the surface is smoother because of the random impact angles preventing trench and valley formation. Second, depth profiles using C60 at a 70° angle of incidence have been improved by co‐bombardment with low energy Ar ions emitted at 33° from the C60 beam and at a 45° incident angle from the surface. Molecular dynamics simulations of the bombardment of solid benzene with low energy Ar and 15 keV C60 were used to show the depth of damage created during bombardment. For low kinetic energy (<200 eV), the damage caused by the Ar atom is in the same region as for the C60 cluster. It is believed that for the experimental conditions used during co‐bombardment, the Ar beam is breaking up the ridges created by the grazing C60 beam. Copyright © 2012 John Wiley & Sons, Ltd.
Url:
DOI: 10.1002/sia.4905
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Schiffer</name><affiliation><mods:affiliation>Department of Chemistry, Penn State University, PA, 16802, University Park, USA</mods:affiliation></affiliation></author><author><name sortKey="Kennedy, Paul E" sort="Kennedy, Paul E" uniqKey="Kennedy P" first="Paul E." last="Kennedy">Paul E. Kennedy</name><affiliation><mods:affiliation>Department of Chemistry, Penn State University, PA, 16802, University Park, USA</mods:affiliation></affiliation></author><author><name sortKey="Postawa, Zbigniew" sort="Postawa, Zbigniew" uniqKey="Postawa Z" first="Zbigniew" last="Postawa">Zbigniew Postawa</name><affiliation><mods:affiliation>Smoluchowski Institute of Physics, Jagiellonian University, ul. 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Garrison, Department of Chemistry, Penn State University, 104 Chemistry Building, University Park, PA 16802, USA.E‐mail:</mods:affiliation></affiliation><affiliation><mods:affiliation>E-mail: bjg@psu.edu</mods:affiliation></affiliation></author><author><name sortKey="Schiffer, Zachary J" sort="Schiffer, Zachary J" uniqKey="Schiffer Z" first="Zachary J." last="Schiffer">Zachary J. Schiffer</name><affiliation><mods:affiliation>Department of Chemistry, Penn State University, PA, 16802, University Park, USA</mods:affiliation></affiliation></author><author><name sortKey="Kennedy, Paul E" sort="Kennedy, Paul E" uniqKey="Kennedy P" first="Paul E." last="Kennedy">Paul E. Kennedy</name><affiliation><mods:affiliation>Department of Chemistry, Penn State University, PA, 16802, University Park, USA</mods:affiliation></affiliation></author><author><name sortKey="Postawa, Zbigniew" sort="Postawa, Zbigniew" uniqKey="Postawa Z" first="Zbigniew" last="Postawa">Zbigniew Postawa</name><affiliation><mods:affiliation>Smoluchowski Institute of Physics, Jagiellonian University, ul. Reymonta 4, 30‐059, Kraków, Poland</mods:affiliation></affiliation></author></analytic><monogr></monogr><series><title level="j">Surface and Interface Analysis</title><title level="j" type="abbrev">Surf. Interface Anal.</title><idno type="ISSN">0142-2421</idno><idno type="eISSN">1096-9918</idno><imprint><publisher>Blackwell Publishing Ltd</publisher><date type="published" when="2013-01">2013-01</date><biblScope unit="volume">45</biblScope><biblScope unit="issue">1</biblScope><biblScope unit="page" from="14">14</biblScope><biblScope unit="page" to="17">17</biblScope></imprint><idno type="ISSN">0142-2421</idno></series><idno type="istex">6734F9758BB6F7DDA9C41D61A004462D3BD1AB2D</idno><idno type="DOI">10.1002/sia.4905</idno><idno type="ArticleID">SIA4905</idno></biblStruct></sourceDesc><seriesStmt><idno type="ISSN">0142-2421</idno></seriesStmt></fileDesc><profileDesc><textClass></textClass><langUsage><language ident="en">en</language></langUsage></profileDesc></teiHeader><front><div type="abstract">The underpinnings of two SIMS experimental findings are elucidated using the power of molecular dynamics to provide insight at the molecular level. First, the improvement of depth resolution for C60 bombardment of Irganox delta layers and polymer layers using sample rotation is explained by molecular dynamics simulations of the repetitive bombardment of Ag surfaces with 20 keV Au3, C60, and Ar872 at grazing angles of incidence with both single azimuthal angle and random azimuthal angles. Single azimuthal angle simulations at grazing angles show the formation of trenches and valleys parallel to the cluster beam form and are elongated with increasing incident angle. Cluster bombardment simulations with random azimuthal angles mimic sample rotation and show that under grazing angles of incidence, the surface is smoother because of the random impact angles preventing trench and valley formation. Second, depth profiles using C60 at a 70° angle of incidence have been improved by co‐bombardment with low energy Ar ions emitted at 33° from the C60 beam and at a 45° incident angle from the surface. Molecular dynamics simulations of the bombardment of solid benzene with low energy Ar and 15 keV C60 were used to show the depth of damage created during bombardment. For low kinetic energy (<200 eV), the damage caused by the Ar atom is in the same region as for the C60 cluster. It is believed that for the experimental conditions used during co‐bombardment, the Ar beam is breaking up the ridges created by the grazing C60 beam. Copyright © 2012 John Wiley & Sons, Ltd.</div></front></TEI><istex><corpusName>wiley</corpusName><author><json:item><name>Barbara J. Garrison</name><affiliations><json:string>Department of Chemistry, Penn State University, PA, 16802, University Park, USA</json:string><json:string>Barbara J. Garrison, Department of Chemistry, Penn State University, 104 Chemistry Building, University Park, PA 16802, USA.E‐mail:</json:string><json:string>E-mail: bjg@psu.edu</json:string></affiliations></json:item><json:item><name>Zachary J. 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First, the improvement of depth resolution for C60 bombardment of Irganox delta layers and polymer layers using sample rotation is explained by molecular dynamics simulations of the repetitive bombardment of Ag surfaces with 20 keV Au3, C60, and Ar872 at grazing angles of incidence with both single azimuthal angle and random azimuthal angles. Single azimuthal angle simulations at grazing angles show the formation of trenches and valleys parallel to the cluster beam form and are elongated with increasing incident angle. Cluster bombardment simulations with random azimuthal angles mimic sample rotation and show that under grazing angles of incidence, the surface is smoother because of the random impact angles preventing trench and valley formation. Second, depth profiles using C60 at a 70° angle of incidence have been improved by co‐bombardment with low energy Ar ions emitted at 33° from the C60 beam and at a 45° incident angle from the surface. Molecular dynamics simulations of the bombardment of solid benzene with low energy Ar and 15 keV C60 were used to show the depth of damage created during bombardment. For low kinetic energy (>200 eV), the damage caused by the Ar atom is in the same region as for the C60 cluster. It is believed that for the experimental conditions used during co‐bombardment, the Ar beam is breaking up the ridges created by the grazing C60 beam. 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First, the improvement of depth resolution for C60 bombardment of Irganox delta layers and polymer layers using sample rotation is explained by molecular dynamics simulations of the repetitive bombardment of Ag surfaces with 20 keV Au3, C60, and Ar872 at grazing angles of incidence with both single azimuthal angle and random azimuthal angles. Single azimuthal angle simulations at grazing angles show the formation of trenches and valleys parallel to the cluster beam form and are elongated with increasing incident angle. Cluster bombardment simulations with random azimuthal angles mimic sample rotation and show that under grazing angles of incidence, the surface is smoother because of the random impact angles preventing trench and valley formation. Second, depth profiles using C60 at a 70° angle of incidence have been improved by co‐bombardment with low energy Ar ions emitted at 33° from the C60 beam and at a 45° incident angle from the surface. Molecular dynamics simulations of the bombardment of solid benzene with low energy Ar and 15 keV C60 were used to show the depth of damage created during bombardment. For low kinetic energy (<200 eV), the damage caused by the Ar atom is in the same region as for the C60 cluster. It is believed that for the experimental conditions used during co‐bombardment, the Ar beam is breaking up the ridges created by the grazing C60 beam. Copyright © 2012 John Wiley & Sons, Ltd.</p></abstract><textClass><keywords scheme="keyword"><list><head>keywords</head><item><term>SIMS</term></item><item><term>molecular dynamics</term></item><item><term>sample rotation</term></item><item><term>co‐bombardment</term></item><item><term>depth profile</term></item><item><term>C60</term></item><item><term>Ar</term></item></list></keywords></textClass><textClass><keywords scheme="Journal Subject"><list><head>article-category</head><item><term>SIMS proceedings paper</term></item></list></keywords></textClass></profileDesc><revisionDesc><change when="2011-09-29">Received</change><change when="2012-02-02">Registration</change><change when="2012-02-16">Created</change><change when="2013-01">Published</change></revisionDesc></teiHeader></istex:fulltextTEI><json:item><original>false</original><mimetype>text/plain</mimetype><extension>txt</extension><uri>https://api.istex.fr/document/6734F9758BB6F7DDA9C41D61A004462D3BD1AB2D/fulltext/txt</uri></json:item></fulltext><metadata><istex:metadataXml wicri:clean="Wiley, elements deleted: body"><istex:xmlDeclaration>version="1.0" encoding="UTF-8" standalone="yes"</istex:xmlDeclaration><istex:document><component type="serialArticle" version="2.0" xml:lang="en" xml:id="sia4905"><header><publicationMeta level="product"><doi>10.1002/(ISSN)1096-9918</doi><issn type="print">0142-2421</issn><issn type="electronic">1096-9918</issn><idGroup><id type="product" value="SIA"></id></idGroup><titleGroup><title type="main" sort="SURFACE AND INTERFACE ANALYSIS">Surface and Interface Analysis</title><title type="short">Surf. 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Garrison, Department of Chemistry, Penn State University, 104 Chemistry Building, University Park, PA 16802, USA.</line><line>E‐mail: <email>bjg@psu.edu</email></line></lineatedText></correspondenceTo><linkGroup><link type="toTypesetVersion" href="file:SIA.SIA4905.pdf"></link></linkGroup></publicationMeta><contentMeta><titleGroup><title type="main">Modeling dynamic cluster SIMS experiments</title><title type="short">Modeling dynamic cluster SIMS experiments</title><title type="shortAuthors">B. J. Garrison <i>et al.</i></title></titleGroup><creators><creator creatorRole="author" xml:id="sia4905-cr-0006" affiliationRef="#sia4905-aff-0001" corresponding="yes"><personName><givenNames>Barbara J.</givenNames><familyName>Garrison</familyName></personName></creator><creator creatorRole="author" xml:id="sia4905-cr-0007" affiliationRef="#sia4905-aff-0001"><personName><givenNames>Zachary J.</givenNames><familyName>Schiffer</familyName></personName></creator><creator creatorRole="author" xml:id="sia4905-cr-0008" affiliationRef="#sia4905-aff-0001"><personName><givenNames>Paul E.</givenNames><familyName>Kennedy</familyName></personName></creator><creator creatorRole="author" xml:id="sia4905-cr-0009" affiliationRef="#sia4905-aff-0002"><personName><givenNames>Zbigniew</givenNames><familyName>Postawa</familyName></personName></creator></creators><affiliationGroup><affiliation countryCode="US" type="organization" xml:id="sia4905-aff-0001"><orgDiv>Department of Chemistry</orgDiv><orgName>Penn State University</orgName><address><city>University Park</city><countryPart>PA</countryPart><postCode>16802</postCode><country>USA</country></address></affiliation><affiliation countryCode="PL" type="organization" xml:id="sia4905-aff-0002"><orgDiv>Smoluchowski Institute of Physics</orgDiv><orgName>Jagiellonian University</orgName><address><street>ul. Reymonta 4</street><postCode>30‐059</postCode><city>Kraków</city><country>Poland</country></address></affiliation></affiliationGroup><keywordGroup type="author"><keyword xml:id="sia4905-kwd-0001">SIMS</keyword><keyword xml:id="sia4905-kwd-0002">molecular dynamics</keyword><keyword xml:id="sia4905-kwd-0003">sample rotation</keyword><keyword xml:id="sia4905-kwd-0004">co‐bombardment</keyword><keyword xml:id="sia4905-kwd-0005">depth profile</keyword><keyword xml:id="sia4905-kwd-0006">C<sub>60</sub></keyword><keyword xml:id="sia4905-kwd-0007">Ar</keyword></keywordGroup><abstractGroup><abstract type="main"><p>The underpinnings of two SIMS experimental findings are elucidated using the power of molecular dynamics to provide insight at the molecular level. First, the improvement of depth resolution for C<sub>60</sub> bombardment of Irganox delta layers and polymer layers using sample rotation is explained by molecular dynamics simulations of the repetitive bombardment of Ag surfaces with 20 keV Au<sub>3</sub>, C<sub>60</sub>, and Ar<sub>872</sub> at grazing angles of incidence with both single azimuthal angle and random azimuthal angles. Single azimuthal angle simulations at grazing angles show the formation of trenches and valleys parallel to the cluster beam form and are elongated with increasing incident angle. Cluster bombardment simulations with random azimuthal angles mimic sample rotation and show that under grazing angles of incidence, the surface is smoother because of the random impact angles preventing trench and valley formation. Second, depth profiles using C<sub>60</sub> at a 70° angle of incidence have been improved by co‐bombardment with low energy Ar ions emitted at 33° from the C<sub>60</sub> beam and at a 45° incident angle from the surface. Molecular dynamics simulations of the bombardment of solid benzene with low energy Ar and 15 keV C<sub>60</sub> were used to show the depth of damage created during bombardment. For low kinetic energy (<200 eV), the damage caused by the Ar atom is in the same region as for the C<sub>60</sub> cluster. It is believed that for the experimental conditions used during co‐bombardment, the Ar beam is breaking up the ridges created by the grazing C<sub>60</sub> beam. Copyright © 2012 John Wiley & Sons, Ltd.</p></abstract></abstractGroup></contentMeta></header></component></istex:document></istex:metadataXml><mods version="3.6"><titleInfo lang="en"><title>Modeling dynamic cluster SIMS experiments</title></titleInfo><titleInfo type="abbreviated" lang="en"><title>Modeling dynamic cluster SIMS experiments</title></titleInfo><titleInfo type="alternative" contentType="CDATA" lang="en"><title>Modeling dynamic cluster SIMS experiments</title></titleInfo><name type="personal"><namePart type="given">Barbara J.</namePart><namePart type="family">Garrison</namePart><affiliation>Department of Chemistry, Penn State University, PA, 16802, University Park, USA</affiliation><affiliation>Barbara J. Garrison, Department of Chemistry, Penn State University, 104 Chemistry Building, University Park, PA 16802, USA.E‐mail:</affiliation><affiliation>E-mail: bjg@psu.edu</affiliation><role><roleTerm type="text">author</roleTerm></role></name><name type="personal"><namePart type="given">Zachary J.</namePart><namePart type="family">Schiffer</namePart><affiliation>Department of Chemistry, Penn State University, PA, 16802, University Park, USA</affiliation><role><roleTerm type="text">author</roleTerm></role></name><name type="personal"><namePart type="given">Paul E.</namePart><namePart type="family">Kennedy</namePart><affiliation>Department of Chemistry, Penn State University, PA, 16802, University Park, USA</affiliation><role><roleTerm type="text">author</roleTerm></role></name><name type="personal"><namePart type="given">Zbigniew</namePart><namePart type="family">Postawa</namePart><affiliation>Smoluchowski Institute of Physics, Jagiellonian University, ul. Reymonta 4, 30‐059, Kraków, Poland</affiliation><role><roleTerm type="text">author</roleTerm></role></name><typeOfResource>text</typeOfResource><genre type="article" displayLabel="article"></genre><originInfo><publisher>Blackwell Publishing Ltd</publisher><dateIssued encoding="w3cdtf">2013-01</dateIssued><dateCreated encoding="w3cdtf">2012-02-16</dateCreated><dateCaptured encoding="w3cdtf">2011-09-29</dateCaptured><dateValid encoding="w3cdtf">2012-02-02</dateValid><copyrightDate encoding="w3cdtf">2013</copyrightDate></originInfo><language><languageTerm type="code" authority="rfc3066">en</languageTerm><languageTerm type="code" authority="iso639-2b">eng</languageTerm></language><physicalDescription><internetMediaType>text/html</internetMediaType></physicalDescription><abstract>The underpinnings of two SIMS experimental findings are elucidated using the power of molecular dynamics to provide insight at the molecular level. First, the improvement of depth resolution for C60 bombardment of Irganox delta layers and polymer layers using sample rotation is explained by molecular dynamics simulations of the repetitive bombardment of Ag surfaces with 20 keV Au3, C60, and Ar872 at grazing angles of incidence with both single azimuthal angle and random azimuthal angles. Single azimuthal angle simulations at grazing angles show the formation of trenches and valleys parallel to the cluster beam form and are elongated with increasing incident angle. Cluster bombardment simulations with random azimuthal angles mimic sample rotation and show that under grazing angles of incidence, the surface is smoother because of the random impact angles preventing trench and valley formation. Second, depth profiles using C60 at a 70° angle of incidence have been improved by co‐bombardment with low energy Ar ions emitted at 33° from the C60 beam and at a 45° incident angle from the surface. Molecular dynamics simulations of the bombardment of solid benzene with low energy Ar and 15 keV C60 were used to show the depth of damage created during bombardment. For low kinetic energy (<200 eV), the damage caused by the Ar atom is in the same region as for the C60 cluster. It is believed that for the experimental conditions used during co‐bombardment, the Ar beam is breaking up the ridges created by the grazing C60 beam. Copyright © 2012 John Wiley & Sons, Ltd.</abstract><subject><genre>keywords</genre><topic>SIMS</topic><topic>molecular dynamics</topic><topic>sample rotation</topic><topic>co‐bombardment</topic><topic>depth profile</topic><topic>C60</topic><topic>Ar</topic></subject><relatedItem type="host"><titleInfo><title>Surface and Interface Analysis</title></titleInfo><titleInfo type="abbreviated"><title>Surf. Interface Anal.</title></titleInfo><name type="personal"><namePart type="given">Enrico</namePart><namePart type="family">Napolitani</namePart><role><roleTerm type="text">editor</roleTerm></role></name><name type="personal"><namePart type="given">Damiano</namePart><namePart type="family">Giubertoni</namePart><role><roleTerm type="text">editor</roleTerm></role></name><name type="personal"><namePart type="given">Massimo</namePart><namePart type="family">Bersani</namePart><role><roleTerm type="text">editor</roleTerm></role></name><name type="personal"><namePart type="given">Mariano</namePart><namePart type="family">Anderle</namePart><role><roleTerm type="text">editor</roleTerm></role></name><name type="personal"><namePart type="given">Antonino</namePart><namePart type="family">Licciardello</namePart><role><roleTerm type="text">editor</roleTerm></role></name><genre type="journal">journal</genre><subject><genre>article-category</genre><topic>SIMS proceedings paper</topic></subject><identifier type="ISSN">0142-2421</identifier><identifier type="eISSN">1096-9918</identifier><identifier type="DOI">10.1002/(ISSN)1096-9918</identifier><identifier type="PublisherID">SIA</identifier><part><date>2013</date><detail type="title"><title>Proceedings of the Eighteenth International Conference on Secondary Ion Mass Spectrometry, SIMS XVIII, Riva Del Garda, Trento, Italy, September 18 ‐ 23, 2011</title></detail><detail type="volume"><caption>vol.</caption><number>45</number></detail><detail type="issue"><caption>no.</caption><number>1</number></detail><extent unit="pages"><start>14</start><end>17</end><total>4</total></extent></part></relatedItem><identifier type="istex">6734F9758BB6F7DDA9C41D61A004462D3BD1AB2D</identifier><identifier type="DOI">10.1002/sia.4905</identifier><identifier type="ArticleID">SIA4905</identifier><accessCondition type="use and reproduction" contentType="copyright">Copyright © 2013 John Wiley & Sons, Ltd.Copyright © 2012 John Wiley & Sons, Ltd.</accessCondition><recordInfo><recordContentSource>WILEY</recordContentSource></recordInfo></mods></metadata><enrichments><json:item><type>multicat</type><uri>https://api.istex.fr/document/6734F9758BB6F7DDA9C41D61A004462D3BD1AB2D/enrichments/multicat</uri></json:item></enrichments><serie></serie></istex></record>Pour manipuler ce document sous Unix (Dilib)
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