A Micro-Fabricated Force Sensor Using an All Thin Film Piezoelectric Active Sensor
Identifieur interne : 001498 ( Main/Exploration ); précédent : 001497; suivant : 001499A Micro-Fabricated Force Sensor Using an All Thin Film Piezoelectric Active Sensor
Auteurs : Junwoo Lee ; Wook Choi ; Yong Kyoung Yoo ; Kyo Seon Hwang ; Sang-Myung Lee ; Sungchul Kang ; Jinseok Kim ; Jeong Hoon LeeSource :
- Sensors (Basel, Switzerland) [ 1424-8220 ] ; 2014.
Abstract
The ability to measure pressure and force is essential in biomedical applications such as minimally invasive surgery (MIS) and palpation for detecting cancer cysts. Here, we report a force sensor for measuring a shear and normal force by combining an arrayed piezoelectric sensors layer with a precut glass top plate connected by four stress concentrating legs. We designed and fabricated a thin film piezoelectric force sensor and proposed an enhanced sensing tool to be used for analyzing gentle touches without the external voltage source used in FET sensors. Both the linear sensor response from 3 kPa to 30 kPa and the exact signal responses from the moving direction illustrate the strong feasibility of the described thin film miniaturized piezoelectric force sensor.
Url:
DOI: 10.3390/s141222199
PubMed: 25429407
PubMed Central: 4299009
Affiliations:
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<record><TEI><teiHeader><fileDesc><titleStmt><title xml:lang="en">A Micro-Fabricated Force Sensor Using an All Thin Film Piezoelectric Active Sensor</title><author><name sortKey="Lee, Junwoo" sort="Lee, Junwoo" uniqKey="Lee J" first="Junwoo" last="Lee">Junwoo Lee</name><affiliation><nlm:aff id="af1-sensors-14-22199"> Department of Electrical Engineering, Kwangwoon University, 447-1, Wolgye, Nowon, Seoul 139-701, Korea; E-Mails:<email>mindsjw@gmail.com</email> (J.L.);<email>duddnjsi2@naver.com</email> (W.C.);<email>yongkyoung0108@gmail.com</email> (Y.K.Y.)</nlm:aff></affiliation></author><author><name sortKey="Choi, Wook" sort="Choi, Wook" uniqKey="Choi W" first="Wook" last="Choi">Wook Choi</name><affiliation><nlm:aff id="af1-sensors-14-22199"> Department of Electrical Engineering, Kwangwoon University, 447-1, Wolgye, Nowon, Seoul 139-701, Korea; E-Mails:<email>mindsjw@gmail.com</email> (J.L.);<email>duddnjsi2@naver.com</email> (W.C.);<email>yongkyoung0108@gmail.com</email> (Y.K.Y.)</nlm:aff></affiliation></author><author><name sortKey="Yoo, Yong Kyoung" sort="Yoo, Yong Kyoung" uniqKey="Yoo Y" first="Yong Kyoung" last="Yoo">Yong Kyoung Yoo</name><affiliation><nlm:aff id="af1-sensors-14-22199"> Department of Electrical Engineering, Kwangwoon University, 447-1, Wolgye, Nowon, Seoul 139-701, Korea; E-Mails:<email>mindsjw@gmail.com</email> (J.L.);<email>duddnjsi2@naver.com</email> (W.C.);<email>yongkyoung0108@gmail.com</email> (Y.K.Y.)</nlm:aff></affiliation></author><author><name sortKey="Hwang, Kyo Seon" sort="Hwang, Kyo Seon" uniqKey="Hwang K" first="Kyo Seon" last="Hwang">Kyo Seon Hwang</name><affiliation><nlm:aff id="af2-sensors-14-22199"> Korea Institute of Science and Technology (KIST), Seoul 136-791, Korea; E-Mails:<email>kshwang@kist.re.kr</email> (K.S.H.);<email>kasch@kist.re.kr</email> (S.K.)</nlm:aff></affiliation></author><author><name sortKey="Lee, Sang Myung" sort="Lee, Sang Myung" uniqKey="Lee S" first="Sang-Myung" last="Lee">Sang-Myung Lee</name><affiliation><nlm:aff id="af3-sensors-14-22199"> Department of Chemical Engineering, Kangwon National University, Chuncheon 200-701, Korea; E-Mail:<email>sangmyung@kangwon.ac.kr</email></nlm:aff></affiliation></author><author><name sortKey="Kang, Sungchul" sort="Kang, Sungchul" uniqKey="Kang S" first="Sungchul" last="Kang">Sungchul Kang</name><affiliation><nlm:aff id="af2-sensors-14-22199"> Korea Institute of Science and Technology (KIST), Seoul 136-791, Korea; E-Mails:<email>kshwang@kist.re.kr</email> (K.S.H.);<email>kasch@kist.re.kr</email> (S.K.)</nlm:aff></affiliation></author><author><name sortKey="Kim, Jinseok" sort="Kim, Jinseok" uniqKey="Kim J" first="Jinseok" last="Kim">Jinseok Kim</name><affiliation><nlm:aff id="af2-sensors-14-22199"> Korea Institute of Science and Technology (KIST), Seoul 136-791, Korea; E-Mails:<email>kshwang@kist.re.kr</email> (K.S.H.);<email>kasch@kist.re.kr</email> (S.K.)</nlm:aff></affiliation></author><author><name sortKey="Lee, Jeong Hoon" sort="Lee, Jeong Hoon" uniqKey="Lee J" first="Jeong Hoon" last="Lee">Jeong Hoon Lee</name><affiliation><nlm:aff id="af1-sensors-14-22199"> Department of Electrical Engineering, Kwangwoon University, 447-1, Wolgye, Nowon, Seoul 139-701, Korea; E-Mails:<email>mindsjw@gmail.com</email> (J.L.);<email>duddnjsi2@naver.com</email> (W.C.);<email>yongkyoung0108@gmail.com</email> (Y.K.Y.)</nlm:aff></affiliation></author></titleStmt><publicationStmt><idno type="wicri:source">PMC</idno><idno type="pmid">25429407</idno><idno type="pmc">4299009</idno><idno type="url">http://www.ncbi.nlm.nih.gov/pmc/articles/PMC4299009</idno><idno type="RBID">PMC:4299009</idno><idno type="doi">10.3390/s141222199</idno><date when="2014">2014</date><idno type="wicri:Area/Pmc/Corpus">002484</idno><idno type="wicri:Area/Pmc/Curation">002484</idno><idno type="wicri:Area/Pmc/Checkpoint">000E67</idno><idno type="wicri:Area/Ncbi/Merge">003474</idno><idno type="wicri:Area/Ncbi/Curation">003474</idno><idno type="wicri:Area/Ncbi/Checkpoint">003474</idno><idno type="wicri:Area/Main/Merge">001504</idno><idno type="wicri:Area/Main/Curation">001498</idno><idno type="wicri:Area/Main/Exploration">001498</idno></publicationStmt><sourceDesc><biblStruct><analytic><title xml:lang="en" level="a" type="main">A Micro-Fabricated Force Sensor Using an All Thin Film Piezoelectric Active Sensor</title><author><name sortKey="Lee, Junwoo" sort="Lee, Junwoo" uniqKey="Lee J" first="Junwoo" last="Lee">Junwoo Lee</name><affiliation><nlm:aff id="af1-sensors-14-22199"> Department of Electrical Engineering, Kwangwoon University, 447-1, Wolgye, Nowon, Seoul 139-701, Korea; E-Mails:<email>mindsjw@gmail.com</email> (J.L.);<email>duddnjsi2@naver.com</email> (W.C.);<email>yongkyoung0108@gmail.com</email> (Y.K.Y.)</nlm:aff></affiliation></author><author><name sortKey="Choi, Wook" sort="Choi, Wook" uniqKey="Choi W" first="Wook" last="Choi">Wook Choi</name><affiliation><nlm:aff id="af1-sensors-14-22199"> Department of Electrical Engineering, Kwangwoon University, 447-1, Wolgye, Nowon, Seoul 139-701, Korea; E-Mails:<email>mindsjw@gmail.com</email> (J.L.);<email>duddnjsi2@naver.com</email> (W.C.);<email>yongkyoung0108@gmail.com</email> (Y.K.Y.)</nlm:aff></affiliation></author><author><name sortKey="Yoo, Yong Kyoung" sort="Yoo, Yong Kyoung" uniqKey="Yoo Y" first="Yong Kyoung" last="Yoo">Yong Kyoung Yoo</name><affiliation><nlm:aff id="af1-sensors-14-22199"> Department of Electrical Engineering, Kwangwoon University, 447-1, Wolgye, Nowon, Seoul 139-701, Korea; E-Mails:<email>mindsjw@gmail.com</email> (J.L.);<email>duddnjsi2@naver.com</email> (W.C.);<email>yongkyoung0108@gmail.com</email> (Y.K.Y.)</nlm:aff></affiliation></author><author><name sortKey="Hwang, Kyo Seon" sort="Hwang, Kyo Seon" uniqKey="Hwang K" first="Kyo Seon" last="Hwang">Kyo Seon Hwang</name><affiliation><nlm:aff id="af2-sensors-14-22199"> Korea Institute of Science and Technology (KIST), Seoul 136-791, Korea; E-Mails:<email>kshwang@kist.re.kr</email> (K.S.H.);<email>kasch@kist.re.kr</email> (S.K.)</nlm:aff></affiliation></author><author><name sortKey="Lee, Sang Myung" sort="Lee, Sang Myung" uniqKey="Lee S" first="Sang-Myung" last="Lee">Sang-Myung Lee</name><affiliation><nlm:aff id="af3-sensors-14-22199"> Department of Chemical Engineering, Kangwon National University, Chuncheon 200-701, Korea; E-Mail:<email>sangmyung@kangwon.ac.kr</email></nlm:aff></affiliation></author><author><name sortKey="Kang, Sungchul" sort="Kang, Sungchul" uniqKey="Kang S" first="Sungchul" last="Kang">Sungchul Kang</name><affiliation><nlm:aff id="af2-sensors-14-22199"> Korea Institute of Science and Technology (KIST), Seoul 136-791, Korea; E-Mails:<email>kshwang@kist.re.kr</email> (K.S.H.);<email>kasch@kist.re.kr</email> (S.K.)</nlm:aff></affiliation></author><author><name sortKey="Kim, Jinseok" sort="Kim, Jinseok" uniqKey="Kim J" first="Jinseok" last="Kim">Jinseok Kim</name><affiliation><nlm:aff id="af2-sensors-14-22199"> Korea Institute of Science and Technology (KIST), Seoul 136-791, Korea; E-Mails:<email>kshwang@kist.re.kr</email> (K.S.H.);<email>kasch@kist.re.kr</email> (S.K.)</nlm:aff></affiliation></author><author><name sortKey="Lee, Jeong Hoon" sort="Lee, Jeong Hoon" uniqKey="Lee J" first="Jeong Hoon" last="Lee">Jeong Hoon Lee</name><affiliation><nlm:aff id="af1-sensors-14-22199"> Department of Electrical Engineering, Kwangwoon University, 447-1, Wolgye, Nowon, Seoul 139-701, Korea; E-Mails:<email>mindsjw@gmail.com</email> (J.L.);<email>duddnjsi2@naver.com</email> (W.C.);<email>yongkyoung0108@gmail.com</email> (Y.K.Y.)</nlm:aff></affiliation></author></analytic><series><title level="j">Sensors (Basel, Switzerland)</title><idno type="eISSN">1424-8220</idno><imprint><date when="2014">2014</date></imprint></series></biblStruct></sourceDesc></fileDesc><profileDesc><textClass></textClass></profileDesc></teiHeader><front><div type="abstract" xml:lang="en"><p>The ability to measure pressure and force is essential in biomedical applications such as minimally invasive surgery (MIS) and palpation for detecting cancer cysts. Here, we report a force sensor for measuring a shear and normal force by combining an arrayed piezoelectric sensors layer with a precut glass top plate connected by four stress concentrating legs. We designed and fabricated a thin film piezoelectric force sensor and proposed an enhanced sensing tool to be used for analyzing gentle touches without the external voltage source used in FET sensors. Both the linear sensor response from 3 kPa to 30 kPa and the exact signal responses from the moving direction illustrate the strong feasibility of the described thin film miniaturized piezoelectric force sensor.</p></div></front><back><div1 type="bibliography"><listBibl><biblStruct><analytic><author><name sortKey="Lipomi, D J" uniqKey="Lipomi D">D.J. Lipomi</name></author><author><name sortKey="Vosgueritchian, M" uniqKey="Vosgueritchian M">M. Vosgueritchian</name></author><author><name sortKey="Tee, B C K" uniqKey="Tee B">B.C.-K. 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Asada</name></author></analytic></biblStruct></listBibl></div1></back></TEI><affiliations><list></list><tree><noCountry><name sortKey="Choi, Wook" sort="Choi, Wook" uniqKey="Choi W" first="Wook" last="Choi">Wook Choi</name><name sortKey="Hwang, Kyo Seon" sort="Hwang, Kyo Seon" uniqKey="Hwang K" first="Kyo Seon" last="Hwang">Kyo Seon Hwang</name><name sortKey="Kang, Sungchul" sort="Kang, Sungchul" uniqKey="Kang S" first="Sungchul" last="Kang">Sungchul Kang</name><name sortKey="Kim, Jinseok" sort="Kim, Jinseok" uniqKey="Kim J" first="Jinseok" last="Kim">Jinseok Kim</name><name sortKey="Lee, Jeong Hoon" sort="Lee, Jeong Hoon" uniqKey="Lee J" first="Jeong Hoon" last="Lee">Jeong Hoon Lee</name><name sortKey="Lee, Junwoo" sort="Lee, Junwoo" uniqKey="Lee J" first="Junwoo" last="Lee">Junwoo Lee</name><name sortKey="Lee, Sang Myung" sort="Lee, Sang Myung" uniqKey="Lee S" first="Sang-Myung" last="Lee">Sang-Myung Lee</name><name sortKey="Yoo, Yong Kyoung" sort="Yoo, Yong Kyoung" uniqKey="Yoo Y" first="Yong Kyoung" last="Yoo">Yong Kyoung Yoo</name></noCountry></tree></affiliations></record>Pour manipuler ce document sous Unix (Dilib)
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