Characterization of a d.c. titanium tetraisopropoxide/H2N2 plasma using emission spectroscopy
Identifieur interne : 001142 ( Istex/Corpus ); précédent : 001141; suivant : 001143Characterization of a d.c. titanium tetraisopropoxide/H2N2 plasma using emission spectroscopy
Auteurs : B. Kuz Lakowska-Pawlak ; W. YrnickiSource :
- Thin Solid Films [ 0040-6090 ] ; 1995.
English descriptors
- Teeft :
- Cathode temperature, Chemical composition, Deposition, Deposition temperature, Discharge power, Emission intensities, Emission intensity, Experimental conditions, Gaseous mixture, Gaseous phase, Glow discharge, Hard coatings, Mass spectroscopy, Molecular spectra, Nitrogen emission, Optical emission spectroscopy, Other hand, Pacvd, Pacvd processes, Plasma, Plasma chemistry, Plasma processes, Plasma reactions, Process parameters, Reactant gases, Reaction chamber, Sample temperature, Solid films, Spectral lines, Titanium, Titanium tetraisopropoxide, Titp, Titp flow, Titp fragmentation, Total pressure.
Abstract
Abstract: The analysis of the gaseous phase of a d.c. plasma-assisted chemical vapour deposition plasma operating with a (TiTP)H2 N2 mixture has been performed by optical emission spectroscopy. Highly energetic components of plasma have been identified. A correlation between the emission intensities of excited species in the plasma and cathode temperature and composition of the gaseous mixture has been studied.
Url:
DOI: 10.1016/0040-6090(95)06636-5
Links to Exploration step
ISTEX:646177AE1F8984F372AED8D84C603C6C35803B4CLe document en format XML
<record><TEI wicri:istexFullTextTei="biblStruct"><teiHeader><fileDesc><titleStmt><title>Characterization of a d.c. titanium tetraisopropoxide/H2N2 plasma using emission spectroscopy</title><author><name sortKey="Kuz Lakowska Pawlak, B" sort="Kuz Lakowska Pawlak, B" uniqKey="Kuz Lakowska Pawlak B" first="B." last="Kuz Lakowska-Pawlak">B. Kuz Lakowska-Pawlak</name><affiliation><mods:affiliation>Institute of Inorganic Chemistry and Metallurgy of Rare Elements, Wrocław Technical University, Wyb. Wyspiańskiego 27, 50-370 Wrocław, Poland</mods:affiliation></affiliation></author><author><name sortKey=" Yrnicki, W" sort=" Yrnicki, W" uniqKey=" Yrnicki W" first="W." last=" Yrnicki">W. Yrnicki</name><affiliation><mods:affiliation>Institute of Inorganic Chemistry and Metallurgy of Rare Elements, Wrocław Technical University, Wyb. 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Kuz Lakowska-Pawlak</name><affiliation><mods:affiliation>Institute of Inorganic Chemistry and Metallurgy of Rare Elements, Wrocław Technical University, Wyb. Wyspiańskiego 27, 50-370 Wrocław, Poland</mods:affiliation></affiliation></author><author><name sortKey=" Yrnicki, W" sort=" Yrnicki, W" uniqKey=" Yrnicki W" first="W." last=" Yrnicki">W. Yrnicki</name><affiliation><mods:affiliation>Institute of Inorganic Chemistry and Metallurgy of Rare Elements, Wrocław Technical University, Wyb. Wyspiańskiego 27, 50-370 Wrocław, Poland</mods:affiliation></affiliation></author></analytic><monogr></monogr><series><title level="j">Thin Solid Films</title><title level="j" type="abbrev">TSF</title><idno type="ISSN">0040-6090</idno><imprint><publisher>ELSEVIER</publisher><date type="published" when="1995">1995</date><biblScope unit="volume">266</biblScope><biblScope unit="issue">1</biblScope><biblScope unit="page" from="8">8</biblScope><biblScope unit="page" to="13">13</biblScope></imprint><idno type="ISSN">0040-6090</idno></series></biblStruct></sourceDesc><seriesStmt><idno type="ISSN">0040-6090</idno></seriesStmt></fileDesc><profileDesc><textClass><keywords scheme="Teeft" xml:lang="en"><term>Cathode temperature</term><term>Chemical composition</term><term>Deposition</term><term>Deposition temperature</term><term>Discharge power</term><term>Emission intensities</term><term>Emission intensity</term><term>Experimental conditions</term><term>Gaseous mixture</term><term>Gaseous phase</term><term>Glow discharge</term><term>Hard coatings</term><term>Mass spectroscopy</term><term>Molecular spectra</term><term>Nitrogen emission</term><term>Optical emission spectroscopy</term><term>Other hand</term><term>Pacvd</term><term>Pacvd processes</term><term>Plasma</term><term>Plasma chemistry</term><term>Plasma processes</term><term>Plasma reactions</term><term>Process parameters</term><term>Reactant gases</term><term>Reaction chamber</term><term>Sample temperature</term><term>Solid films</term><term>Spectral lines</term><term>Titanium</term><term>Titanium tetraisopropoxide</term><term>Titp</term><term>Titp flow</term><term>Titp fragmentation</term><term>Total pressure</term></keywords></textClass><langUsage><language ident="en">en</language></langUsage></profileDesc></teiHeader><front><div type="abstract" xml:lang="en">Abstract: The analysis of the gaseous phase of a d.c. plasma-assisted chemical vapour deposition plasma operating with a (TiTP)H2 N2 mixture has been performed by optical emission spectroscopy. Highly energetic components of plasma have been identified. A correlation between the emission intensities of excited species in the plasma and cathode temperature and composition of the gaseous mixture has been studied.</div></front></TEI><istex><corpusName>elsevier</corpusName><keywords><teeft><json:string>titp</json:string><json:string>cathode temperature</json:string><json:string>emission intensities</json:string><json:string>pacvd</json:string><json:string>emission intensity</json:string><json:string>solid films</json:string><json:string>discharge power</json:string><json:string>gaseous phase</json:string><json:string>optical emission spectroscopy</json:string><json:string>titanium tetraisopropoxide</json:string><json:string>titp flow</json:string><json:string>other hand</json:string><json:string>spectral lines</json:string><json:string>sample temperature</json:string><json:string>gaseous mixture</json:string><json:string>plasma reactions</json:string><json:string>plasma processes</json:string><json:string>glow discharge</json:string><json:string>hard coatings</json:string><json:string>nitrogen emission</json:string><json:string>chemical composition</json:string><json:string>process parameters</json:string><json:string>reactant gases</json:string><json:string>reaction chamber</json:string><json:string>total pressure</json:string><json:string>molecular spectra</json:string><json:string>experimental conditions</json:string><json:string>pacvd processes</json:string><json:string>titp fragmentation</json:string><json:string>deposition temperature</json:string><json:string>plasma chemistry</json:string><json:string>mass spectroscopy</json:string><json:string>titanium</json:string><json:string>deposition</json:string><json:string>plasma</json:string></teeft></keywords><author><json:item><name>B. Kuzƒlakowska-Pawlak</name><affiliations><json:string>Institute of Inorganic Chemistry and Metallurgy of Rare Elements, Wrocław Technical University, Wyb. Wyspiańskiego 27, 50-370 Wrocław, Poland</json:string></affiliations></json:item><json:item><name>W. Żyrnicki</name><affiliations><json:string>Institute of Inorganic Chemistry and Metallurgy of Rare Elements, Wrocław Technical University, Wyb. 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A correlation between the emission intensities of excited species in the plasma and cathode temperature and composition of the gaseous mixture has been studied.</abstract><qualityIndicators><score>5.772</score><pdfWordCount>3052</pdfWordCount><pdfCharCount>18164</pdfCharCount><pdfVersion>1.2</pdfVersion><pdfPageCount>6</pdfPageCount><pdfPageSize>576 x 792 pts</pdfPageSize><refBibsNative>true</refBibsNative><abstractWordCount>60</abstractWordCount><abstractCharCount>414</abstractCharCount><keywordCount>4</keywordCount></qualityIndicators><title>Characterization of a d.c. titanium tetraisopropoxide/H2N2 plasma using emission spectroscopy</title><pii><json:string>0040-6090(95)06636-5</json:string></pii><genre><json:string>research-article</json:string></genre><serie><title>NSRDS-NBS 68</title><language><json:string>unknown</json:string></language></serie><host><title>Thin Solid Films</title><language><json:string>unknown</json:string></language><publicationDate>1995</publicationDate><issn><json:string>0040-6090</json:string></issn><pii><json:string>S0040-6090(00)X0037-5</json:string></pii><volume>266</volume><issue>1</issue><pages><first>8</first><last>13</last></pages><genre><json:string>journal</json:string></genre></host><namedEntities><unitex><date><json:string>1995</json:string></date><geogName></geogName><orgName><json:string>Wroclaw Technical University</json:string><json:string>Committee of Scientific Research</json:string><json:string>Poland Received</json:string></orgName><orgName_funder></orgName_funder><orgName_provider></orgName_provider><persName><json:string>TiTP</json:string><json:string>The</json:string><json:string>B. 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Highly energetic components of plasma have been identified. A correlation between the emission intensities of excited species in the plasma and cathode temperature and composition of the gaseous mixture has been studied.</p></abstract><textClass><keywords scheme="keyword"><list><head>article-category</head><item><term>Synthesis and characterization</term></item></list></keywords></textClass><textClass><keywords scheme="keyword"><list><head>Keywords</head><item><term>Glow discharge optical spectroscopy</term></item><item><term>Organometallic vapour deposition</term></item><item><term>Plasma processing and deposition</term></item></list></keywords></textClass></profileDesc><revisionDesc><change when="1995">Published</change></revisionDesc></teiHeader></istex:fulltextTEI><json:item><extension>txt</extension><original>false</original><mimetype>text/plain</mimetype><uri>https://api.istex.fr/ark:/67375/6H6-V8DTBC3J-D/fulltext.txt</uri></json:item></fulltext><metadata><istex:metadataXml wicri:clean="Elsevier, elements deleted: tail"><istex:xmlDeclaration>version="1.0" encoding="utf-8"</istex:xmlDeclaration><istex:docType PUBLIC="-//ES//DTD journal article DTD version 4.5.2//EN//XML" URI="art452.dtd" name="istex:docType"></istex:docType><istex:document><converted-article version="4.5.2" docsubtype="fla"><item-info><jid>TSF</jid><aid>95066365</aid><ce:pii>0040-6090(95)06636-5</ce:pii><ce:doi>10.1016/0040-6090(95)06636-5</ce:doi><ce:copyright type="unknown" year="1995"></ce:copyright><ce:doctopics><ce:doctopic><ce:text>Synthesis and characterization</ce:text></ce:doctopic></ce:doctopics></item-info><head><ce:title>Characterization of a d.c. titanium tetraisopropoxide/<math altimg="si1.gif"><fr shape="sol"><nu>H<inf>2</inf></nu><de>N<inf>2</inf></de></fr></math> plasma using emission spectroscopy</ce:title><ce:author-group><ce:author><ce:given-name>B.</ce:given-name><ce:surname>Kuzƒlakowska-Pawlak</ce:surname></ce:author><ce:author><ce:given-name>W.</ce:given-name><ce:surname>Żyrnicki</ce:surname></ce:author><ce:affiliation><ce:textfn>Institute of Inorganic Chemistry and Metallurgy of Rare Elements, Wrocław Technical University, Wyb. Wyspiańskiego 27, 50-370 Wrocław, Poland</ce:textfn></ce:affiliation></ce:author-group><ce:date-received day="1" month="9" year="1994"></ce:date-received><ce:date-accepted day="6" month="4" year="1995"></ce:date-accepted><ce:abstract><ce:section-title>Abstract</ce:section-title><ce:abstract-sec><ce:simple-para>The analysis of the gaseous phase of a d.c. plasma-assisted chemical vapour deposition plasma operating with a <math altimg="si2.gif"><fr shape="sol"><nu>(TiTP)H<inf>2</inf></nu><de>N<inf>2</inf></de></fr></math> mixture has been performed by optical emission spectroscopy. Highly energetic components of plasma have been identified. A correlation between the emission intensities of excited species in the plasma and cathode temperature and composition of the gaseous mixture has been studied.</ce:simple-para></ce:abstract-sec></ce:abstract><ce:keywords><ce:section-title>Keywords</ce:section-title><ce:keyword><ce:text>Glow discharge optical spectroscopy</ce:text></ce:keyword><ce:keyword><ce:text>Organometallic vapour deposition</ce:text></ce:keyword><ce:keyword><ce:text>Plasma processing and deposition</ce:text></ce:keyword></ce:keywords></head></converted-article></istex:document></istex:metadataXml><mods version="3.6"><titleInfo><title>Characterization of a d.c. titanium tetraisopropoxide/H2N2 plasma using emission spectroscopy</title></titleInfo><titleInfo type="alternative" contentType="CDATA"><title>Characterization of a d.c. titanium tetraisopropoxide/</title></titleInfo><name type="personal"><namePart type="given">B.</namePart><namePart type="family">Kuzƒlakowska-Pawlak</namePart><affiliation>Institute of Inorganic Chemistry and Metallurgy of Rare Elements, Wrocław Technical University, Wyb. 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A correlation between the emission intensities of excited species in the plasma and cathode temperature and composition of the gaseous mixture has been studied.</abstract><subject><genre>article-category</genre><topic>Synthesis and characterization</topic></subject><subject><genre>Keywords</genre><topic>Glow discharge optical spectroscopy</topic><topic>Organometallic vapour deposition</topic><topic>Plasma processing and deposition</topic></subject><relatedItem type="host"><titleInfo><title>Thin Solid Films</title></titleInfo><titleInfo type="abbreviated"><title>TSF</title></titleInfo><genre type="journal" authority="ISTEX" authorityURI="https://publication-type.data.istex.fr" valueURI="https://publication-type.data.istex.fr/ark:/67375/JMC-0GLKJH51-B">journal</genre><originInfo><publisher>ELSEVIER</publisher><dateIssued encoding="w3cdtf">1995</dateIssued></originInfo><identifier type="ISSN">0040-6090</identifier><identifier type="PII">S0040-6090(00)X0037-5</identifier><part><date>1995</date><detail type="volume"><number>266</number><caption>vol.</caption></detail><detail type="issue"><number>1</number><caption>no.</caption></detail><extent unit="issue-pages"><start>1</start><end>88</end></extent><extent unit="pages"><start>8</start><end>13</end></extent></part></relatedItem><identifier type="istex">646177AE1F8984F372AED8D84C603C6C35803B4C</identifier><identifier type="ark">ark:/67375/6H6-V8DTBC3J-D</identifier><identifier type="DOI">10.1016/0040-6090(95)06636-5</identifier><identifier type="PII">0040-6090(95)06636-5</identifier><recordInfo><recordContentSource authority="ISTEX" authorityURI="https://loaded-corpus.data.istex.fr" valueURI="https://loaded-corpus.data.istex.fr/ark:/67375/XBH-HKKZVM7B-M">elsevier</recordContentSource></recordInfo></mods><json:item><extension>json</extension><original>false</original><mimetype>application/json</mimetype><uri>https://api.istex.fr/ark:/67375/6H6-V8DTBC3J-D/record.json</uri></json:item></metadata></istex></record>Pour manipuler ce document sous Unix (Dilib)
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