Laser produced streams of Ge ions accelerated and optimized in the electric fields for implantation into SiO2 substrates.
Identifieur interne : 000262 ( PubMed/Checkpoint ); précédent : 000261; suivant : 000263Laser produced streams of Ge ions accelerated and optimized in the electric fields for implantation into SiO2 substrates.
Auteurs : M. Rosinski [Pologne] ; L. Giuffrida ; P. Parys ; P. Gasior ; E. Fazio ; A M Mezzasalma ; L. Torrisi ; L. Ando ; J. WolowskiSource :
- The Review of scientific instruments ; 2012.
Abstract
Ge crystals were prepared by means of laser-induced ion implantation technique. A Nd:YAG pulsed laser (repetition rate: 10 Hz; pulse duration: 3.5 ns; pulse energy: ∼0.5 J) was used both as an ion source and to carry out the ablation processes. The optimization of the laser-generated ion beam parameters in a broad energy and current density range has been obtained controlling the electrostatic field parameters. Numerical simulations of the focusing system, performed adopting an OPERA 3D code, and an investigation of the ion characteristics, using the ion time-of-flight method, have allowed to optimize the preparation parameters. The structural properties of the samples were investigated by means of x-ray photoelectron, micro-Raman spectroscopies, and scanning electron microscopy techniques. Experimental results show that, by appropriately varying the ion implantation parameters and by a post-preparation annealing treatment, it is possible to achieve the development of a micrometer-sized crystalline Ge phase and∕or an amorphous one.
DOI: 10.1063/1.3660819
PubMed: 22380284
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Parys</name></author><author><name sortKey="Gasior, P" sort="Gasior, P" uniqKey="Gasior P" first="P" last="Gasior">P. Gasior</name></author><author><name sortKey="Fazio, E" sort="Fazio, E" uniqKey="Fazio E" first="E" last="Fazio">E. Fazio</name></author><author><name sortKey="Mezzasalma, A M" sort="Mezzasalma, A M" uniqKey="Mezzasalma A" first="A M" last="Mezzasalma">A M Mezzasalma</name></author><author><name sortKey="Torrisi, L" sort="Torrisi, L" uniqKey="Torrisi L" first="L" last="Torrisi">L. Torrisi</name></author><author><name sortKey="Ando, L" sort="Ando, L" uniqKey="Ando L" first="L" last="Ando">L. Ando</name></author><author><name sortKey="Wolowski, J" sort="Wolowski, J" uniqKey="Wolowski J" first="J" last="Wolowski">J. Wolowski</name></author></titleStmt><publicationStmt><idno type="wicri:source">PubMed</idno><date when="2012">2012</date><idno type="doi">10.1063/1.3660819</idno><idno type="RBID">pubmed:22380284</idno><idno type="pmid">22380284</idno><idno type="wicri:Area/PubMed/Corpus">000280</idno><idno type="wicri:Area/PubMed/Curation">000280</idno><idno type="wicri:Area/PubMed/Checkpoint">000262</idno></publicationStmt><sourceDesc><biblStruct><analytic><title xml:lang="en">Laser produced streams of Ge ions accelerated and optimized in the electric fields for implantation into SiO2 substrates.</title><author><name sortKey="Rosinski, M" sort="Rosinski, M" uniqKey="Rosinski M" first="M" last="Rosinski">M. Rosinski</name><affiliation wicri:level="1"><nlm:affiliation>Institute of Plasma Physics and Laser Microfusion, Warsaw, Poland. marcin.rosinski@ipplm.pl</nlm:affiliation><country xml:lang="fr">Pologne</country><wicri:regionArea>Institute of Plasma Physics and Laser Microfusion, Warsaw</wicri:regionArea><wicri:noRegion>Warsaw</wicri:noRegion></affiliation></author><author><name sortKey="Giuffrida, L" sort="Giuffrida, L" uniqKey="Giuffrida L" first="L" last="Giuffrida">L. Giuffrida</name></author><author><name sortKey="Parys, P" sort="Parys, P" uniqKey="Parys P" first="P" last="Parys">P. Parys</name></author><author><name sortKey="Gasior, P" sort="Gasior, P" uniqKey="Gasior P" first="P" last="Gasior">P. Gasior</name></author><author><name sortKey="Fazio, E" sort="Fazio, E" uniqKey="Fazio E" first="E" last="Fazio">E. Fazio</name></author><author><name sortKey="Mezzasalma, A M" sort="Mezzasalma, A M" uniqKey="Mezzasalma A" first="A M" last="Mezzasalma">A M Mezzasalma</name></author><author><name sortKey="Torrisi, L" sort="Torrisi, L" uniqKey="Torrisi L" first="L" last="Torrisi">L. Torrisi</name></author><author><name sortKey="Ando, L" sort="Ando, L" uniqKey="Ando L" first="L" last="Ando">L. Ando</name></author><author><name sortKey="Wolowski, J" sort="Wolowski, J" uniqKey="Wolowski J" first="J" last="Wolowski">J. Wolowski</name></author></analytic><series><title level="j">The Review of scientific instruments</title><idno type="e-ISSN">1089-7623</idno><imprint><date when="2012" type="published">2012</date></imprint></series></biblStruct></sourceDesc></fileDesc><profileDesc><textClass></textClass></profileDesc></teiHeader><front><div type="abstract" xml:lang="en">Ge crystals were prepared by means of laser-induced ion implantation technique. A Nd:YAG pulsed laser (repetition rate: 10 Hz; pulse duration: 3.5 ns; pulse energy: ∼0.5 J) was used both as an ion source and to carry out the ablation processes. The optimization of the laser-generated ion beam parameters in a broad energy and current density range has been obtained controlling the electrostatic field parameters. Numerical simulations of the focusing system, performed adopting an OPERA 3D code, and an investigation of the ion characteristics, using the ion time-of-flight method, have allowed to optimize the preparation parameters. The structural properties of the samples were investigated by means of x-ray photoelectron, micro-Raman spectroscopies, and scanning electron microscopy techniques. Experimental results show that, by appropriately varying the ion implantation parameters and by a post-preparation annealing treatment, it is possible to achieve the development of a micrometer-sized crystalline Ge phase and∕or an amorphous one.</div></front></TEI><pubmed><MedlineCitation Owner="NLM" Status="PubMed-not-MEDLINE"><PMID Version="1">22380284</PMID><DateCreated><Year>2012</Year><Month>03</Month><Day>02</Day></DateCreated><DateCompleted><Year>2012</Year><Month>07</Month><Day>03</Day></DateCompleted><Article PubModel="Print"><Journal><ISSN IssnType="Electronic">1089-7623</ISSN><JournalIssue CitedMedium="Internet"><Volume>83</Volume><Issue>2</Issue><PubDate><Year>2012</Year><Month>Feb</Month></PubDate></JournalIssue><Title>The Review of scientific instruments</Title><ISOAbbreviation>Rev Sci Instrum</ISOAbbreviation></Journal><ArticleTitle>Laser produced streams of Ge ions accelerated and optimized in the electric fields for implantation into SiO2 substrates.</ArticleTitle><Pagination><MedlinePgn>02B305</MedlinePgn></Pagination><ELocationID EIdType="doi" ValidYN="Y">10.1063/1.3660819</ELocationID><Abstract><AbstractText>Ge crystals were prepared by means of laser-induced ion implantation technique. A Nd:YAG pulsed laser (repetition rate: 10 Hz; pulse duration: 3.5 ns; pulse energy: ∼0.5 J) was used both as an ion source and to carry out the ablation processes. The optimization of the laser-generated ion beam parameters in a broad energy and current density range has been obtained controlling the electrostatic field parameters. Numerical simulations of the focusing system, performed adopting an OPERA 3D code, and an investigation of the ion characteristics, using the ion time-of-flight method, have allowed to optimize the preparation parameters. The structural properties of the samples were investigated by means of x-ray photoelectron, micro-Raman spectroscopies, and scanning electron microscopy techniques. Experimental results show that, by appropriately varying the ion implantation parameters and by a post-preparation annealing treatment, it is possible to achieve the development of a micrometer-sized crystalline Ge phase and∕or an amorphous one.</AbstractText></Abstract><AuthorList CompleteYN="Y"><Author ValidYN="Y"><LastName>Rosinski</LastName><ForeName>M</ForeName><Initials>M</Initials><AffiliationInfo><Affiliation>Institute of Plasma Physics and Laser Microfusion, Warsaw, Poland. marcin.rosinski@ipplm.pl</Affiliation></AffiliationInfo></Author><Author ValidYN="Y"><LastName>Giuffrida</LastName><ForeName>L</ForeName><Initials>L</Initials></Author><Author ValidYN="Y"><LastName>Parys</LastName><ForeName>P</ForeName><Initials>P</Initials></Author><Author ValidYN="Y"><LastName>Gasior</LastName><ForeName>P</ForeName><Initials>P</Initials></Author><Author ValidYN="Y"><LastName>Fazio</LastName><ForeName>E</ForeName><Initials>E</Initials></Author><Author ValidYN="Y"><LastName>Mezzasalma</LastName><ForeName>A M</ForeName><Initials>AM</Initials></Author><Author ValidYN="Y"><LastName>Torrisi</LastName><ForeName>L</ForeName><Initials>L</Initials></Author><Author ValidYN="Y"><LastName>Ando</LastName><ForeName>L</ForeName><Initials>L</Initials></Author><Author ValidYN="Y"><LastName>Wolowski</LastName><ForeName>J</ForeName><Initials>J</Initials></Author></AuthorList><Language>eng</Language><PublicationTypeList><PublicationType UI="D016428">Journal Article</PublicationType></PublicationTypeList></Article><MedlineJournalInfo><Country>United States</Country><MedlineTA>Rev Sci Instrum</MedlineTA><NlmUniqueID>0405571</NlmUniqueID><ISSNLinking>0034-6748</ISSNLinking></MedlineJournalInfo></MedlineCitation><PubmedData><History><PubMedPubDate PubStatus="entrez"><Year>2012</Year><Month>3</Month><Day>3</Day><Hour>6</Hour><Minute>0</Minute></PubMedPubDate><PubMedPubDate PubStatus="pubmed"><Year>2012</Year><Month>3</Month><Day>3</Day><Hour>6</Hour><Minute>0</Minute></PubMedPubDate><PubMedPubDate PubStatus="medline"><Year>2012</Year><Month>3</Month><Day>3</Day><Hour>6</Hour><Minute>1</Minute></PubMedPubDate></History><PublicationStatus>ppublish</PublicationStatus><ArticleIdList><ArticleId IdType="doi">10.1063/1.3660819</ArticleId><ArticleId IdType="pubmed">22380284</ArticleId></ArticleIdList></PubmedData></pubmed><affiliations><list><country><li>Pologne</li></country></list><tree><noCountry><name sortKey="Ando, L" sort="Ando, L" uniqKey="Ando L" first="L" last="Ando">L. Ando</name><name sortKey="Fazio, E" sort="Fazio, E" uniqKey="Fazio E" first="E" last="Fazio">E. Fazio</name><name sortKey="Gasior, P" sort="Gasior, P" uniqKey="Gasior P" first="P" last="Gasior">P. Gasior</name><name sortKey="Giuffrida, L" sort="Giuffrida, L" uniqKey="Giuffrida L" first="L" last="Giuffrida">L. Giuffrida</name><name sortKey="Mezzasalma, A M" sort="Mezzasalma, A M" uniqKey="Mezzasalma A" first="A M" last="Mezzasalma">A M Mezzasalma</name><name sortKey="Parys, P" sort="Parys, P" uniqKey="Parys P" first="P" last="Parys">P. Parys</name><name sortKey="Torrisi, L" sort="Torrisi, L" uniqKey="Torrisi L" first="L" last="Torrisi">L. Torrisi</name><name sortKey="Wolowski, J" sort="Wolowski, J" uniqKey="Wolowski J" first="J" last="Wolowski">J. Wolowski</name></noCountry><country name="Pologne"><noRegion><name sortKey="Rosinski, M" sort="Rosinski, M" uniqKey="Rosinski M" first="M" last="Rosinski">M. 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