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6-DoF miniature maglev positioning stage for application in haptic micro-manipulation

Identifieur interne : 001059 ( PascalFrancis/Curation ); précédent : 001058; suivant : 001060

6-DoF miniature maglev positioning stage for application in haptic micro-manipulation

Auteurs : P. Estevez [Pays-Bas] ; A. Mulder [Pays-Bas] ; R. H. Munnig Schmidt [Pays-Bas]

Source :

RBID : Pascal:12-0431453

Descripteurs français

English descriptors

Abstract

This paper presents a micro-positioning stage in six orthogonal directions (6-axis) based on magnetic levitation. The stage is intended to be used in a haptic tele-operated control scheme, as the positioning system of a slave robot for micro-manipulation. This application offers a particular set of requirements which are discussed in Section 1. A novel 2-axis actuator assembly is introduced, in which two fixed coils generate Lorentz forces on a single moving magnet, which is attached to the mover. Three such actuators generate the six forces that are required in the stage. The position of the mover is then sensed by using LED/photo-transistor pairs. The actuator assembly is studied in detail and characterized, both experimentally and through simulations. Non-linearity and position dependency in the transfer functions of the sensor and actuator are identified, characterized and integrated into a dynamic simulation of the system. A Monte Carlo study is then used to investigate the robustness of the complete system to manufacturing tolerances and the intensity of different noise sources. The stage is fabricated, including custom PCB's for signal conditioning and amplification. With a movement range of 200 x 200 x 200 μm and rotations of 18-42 mrad, the achieved MIM (minimum incremental motion) is 50 nm and 3.5-7 μrad under closed loop control.
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A08 01  1  ENG  @1 6-DoF miniature maglev positioning stage for application in haptic micro-manipulation
A11 01  1    @1 ESTEVEZ (P.)
A11 02  1    @1 MULDER (A.)
A11 03  1    @1 MUNNIG SCHMIDT (R. H.)
A14 01      @1 PME, Delft University of Technology @2 Delft @3 NLD @Z 1 aut. @Z 2 aut. @Z 3 aut.
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A21       @1 2012
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C01 01    ENG  @0 This paper presents a micro-positioning stage in six orthogonal directions (6-axis) based on magnetic levitation. The stage is intended to be used in a haptic tele-operated control scheme, as the positioning system of a slave robot for micro-manipulation. This application offers a particular set of requirements which are discussed in Section 1. A novel 2-axis actuator assembly is introduced, in which two fixed coils generate Lorentz forces on a single moving magnet, which is attached to the mover. Three such actuators generate the six forces that are required in the stage. The position of the mover is then sensed by using LED/photo-transistor pairs. The actuator assembly is studied in detail and characterized, both experimentally and through simulations. Non-linearity and position dependency in the transfer functions of the sensor and actuator are identified, characterized and integrated into a dynamic simulation of the system. A Monte Carlo study is then used to investigate the robustness of the complete system to manufacturing tolerances and the intensity of different noise sources. The stage is fabricated, including custom PCB's for signal conditioning and amplification. With a movement range of 200 x 200 x 200 μm and rotations of 18-42 mrad, the achieved MIM (minimum incremental motion) is 50 nm and 3.5-7 μrad under closed loop control.
C02 01  3    @0 001B00G07T
C03 01  3  FRE  @0 Lévitation magnétique @5 02
C03 01  3  ENG  @0 Magnetic levitation @5 02
C03 02  X  FRE  @0 Robotique @5 03
C03 02  X  ENG  @0 Robotics @5 03
C03 02  X  SPA  @0 Robótica @5 03
C03 03  3  FRE  @0 Actionneur @5 04
C03 03  3  ENG  @0 Actuators @5 04
C03 04  3  FRE  @0 Méthode Monte Carlo @5 05
C03 04  3  ENG  @0 Monte Carlo methods @5 05
C03 05  3  FRE  @0 Force Lorentz @5 06
C03 05  3  ENG  @0 Lorentz force @5 06
C03 06  X  FRE  @0 Robustesse @5 07
C03 06  X  ENG  @0 Robustness @5 07
C03 06  X  SPA  @0 Robustez @5 07
C03 07  X  FRE  @0 Effet non linéaire @5 08
C03 07  X  ENG  @0 Non linear effect @5 08
C03 07  X  SPA  @0 Efecto no lineal @5 08
C03 08  3  FRE  @0 Fonction transfert @5 09
C03 08  3  ENG  @0 Transfer functions @5 09
C03 09  3  FRE  @0 Procédé fabrication @5 10
C03 09  3  ENG  @0 Manufacturing processes @5 10
C03 10  X  FRE  @0 Micromanipulation @5 11
C03 10  X  ENG  @0 Micromanipulation @5 11
C03 10  X  SPA  @0 Micromanipulación @5 11
C03 11  3  FRE  @0 Interface haptique @5 12
C03 11  3  ENG  @0 Haptic interfaces @5 12
C03 12  X  FRE  @0 Téléopération @5 13
C03 12  X  ENG  @0 Remote operation @5 13
C03 12  X  SPA  @0 Teleacción @5 13
C03 13  X  FRE  @0 Machine multiaxe @5 14
C03 13  X  ENG  @0 Multiaxis machine @5 14
C03 13  X  SPA  @0 Maquina multieje @5 14
C03 14  3  FRE  @0 Matériau ferromagnétique @5 15
C03 14  3  ENG  @0 Ferromagnetic materials @5 15
N21       @1 338

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Le document en format XML

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