Electrical conduction in thin zinc rf sputtered films
Identifieur interne : 002A80 ( Main/Exploration ); précédent : 002A79; suivant : 002A81Electrical conduction in thin zinc rf sputtered films
Auteurs : Cr Tellier [France]Source :
- Vacuum [ 0042-207X ] ; 1978.
Abstract
Experiments on the thickness dependence variations in electrical resistance of thin rf sputtered zinc films before and after thermal ageing are consistent with a two-layers model: the first layer about 150 A thick is the thinner continuous layer that may be obtained; electronic conduction in the second layer occurs according to the Mayadas-Shatzkes model related to polycrystalline films with a constant grain size. The linearized equations and the ‘effective Fuchs-Sondheimer’ model previously reported are convenient tools for describing the conduction in the upper layer and allow an experimental determination of the carrier reflection coefficients at grain-boundaries and film surfaces.
Url:
DOI: 10.1016/S0042-207X(78)80706-4
Affiliations:
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