J. K. Kim And NotDésorption
List of bibliographic references
Number of relevant bibliographic references: 1.Ident. | Authors (with country if any) | Title |
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002056 | K. S. Min [Corée du Sud] ; S. H. Kang [Corée du Sud] ; J. K. Kim [Corée du Sud] ; Y. I. Jhon [États-Unis] ; M. S. Jhon [États-Unis] ; G. Y. Yeom [Corée du Sud] | Atomic layer etching of A12O3 using BCl3/Ar for the interface passivation layer of III-V MOS devices : Nanofabrication 2012 |
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