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Characterising the radio frequency plasma source for glow discharge optical emission spectroscopy

Identifieur interne : 000A17 ( PascalFrancis/Curation ); précédent : 000A16; suivant : 000A18

Characterising the radio frequency plasma source for glow discharge optical emission spectroscopy

Auteurs : Richard Payling [Australie] ; Patrick Chapon [France] ; Olivier Bonnot [France] ; Philippe Belenguer [France] ; Philippe Guillot [France] ; Leanne C. Pitchford [France] ; Laurent Therese [France] ; Johann Michler [Suisse] ; Max Aeberhard [Suisse]

Source :

RBID : Pascal:02-0343469

Descripteurs français

English descriptors

Abstract

The radio frequency (RF) powered source is the most stable and capable analytical source available for glow discharge optical emission spectroscopy (GD-OES). It allows the direct analysis of both conductive and non-conductive samples on the same source, without changing the source. Recent developments in RF generators and components have further improved the performance of these sources, and now allow the routine measurement of additional RF parameters such as applied voltage and DC bias voltage. Theoretical studies of the fundamental characteristics of the RF source are providing deeper understanding of how they work, and combined with the new measurement tools will lead to further improvements in analytical performance. Recent theoretical and experimental work on the RF plasma source will be presented. These studies will be illustrated with some recent applications: in metals analysis, plus a hard coating and a non-conductive coating.
pA  
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A03   1    @0 ISIJ int.
A05       @2 42
A06       @3 SUP
A08 01  1  ENG  @1 Characterising the radio frequency plasma source for glow discharge optical emission spectroscopy
A11 01  1    @1 PAYLING (Richard)
A11 02  1    @1 CHAPON (Patrick)
A11 03  1    @1 BONNOT (Olivier)
A11 04  1    @1 BELENGUER (Philippe)
A11 05  1    @1 GUILLOT (Philippe)
A11 06  1    @1 PITCHFORD (Leanne C.)
A11 07  1    @1 THERESE (Laurent)
A11 08  1    @1 MICHLER (Johann)
A11 09  1    @1 AEBERHARD (Max)
A14 01      @1 Department of Physics, University of Newcastle @2 NSW 2308 @3 AUS @Z 1 aut.
A14 02      @1 Jobin-Yvon Emission Horiba Group, 16-18 rue du Canal @2 91165 Longjumeau @3 FRA @Z 2 aut. @Z 3 aut.
A14 03      @1 CPAT, UMR 5002, 118 route de Narbonne @2 31062 Toulouse @3 FRA @Z 4 aut. @Z 5 aut. @Z 6 aut. @Z 7 aut.
A14 04      @1 Swiss Federal Laboratories for Materials Testing and Research (EMPA), Feuerwerkerstrasse 39 @2 3602 Thun @3 CHE @Z 8 aut. @Z 9 aut.
A20       @2 S101-S105
A21       @1 2002
A23 01      @0 ENG
A43 01      @1 INIST @2 9881 @5 354000100705560200
A44       @0 0000 @1 © 2002 INIST-CNRS. All rights reserved.
A45       @0 11 ref.
A47 01  1    @0 02-0343469
A60       @1 P
A61       @0 A
A64 01  1    @0 ISIJ international
A66 01      @0 JPN
C01 01    ENG  @0 The radio frequency (RF) powered source is the most stable and capable analytical source available for glow discharge optical emission spectroscopy (GD-OES). It allows the direct analysis of both conductive and non-conductive samples on the same source, without changing the source. Recent developments in RF generators and components have further improved the performance of these sources, and now allow the routine measurement of additional RF parameters such as applied voltage and DC bias voltage. Theoretical studies of the fundamental characteristics of the RF source are providing deeper understanding of how they work, and combined with the new measurement tools will lead to further improvements in analytical performance. Recent theoretical and experimental work on the RF plasma source will be presented. These studies will be illustrated with some recent applications: in metals analysis, plus a hard coating and a non-conductive coating.
C02 01  X    @0 001D11B01
C02 02  X    @0 240
C03 01  X  FRE  @0 Spectrométrie optique @5 01
C03 01  X  ENG  @0 Optical spectrometry @5 01
C03 01  X  SPA  @0 Espectrometría óptica @5 01
C03 02  X  FRE  @0 Emission optique @5 02
C03 02  X  ENG  @0 Light emission @5 02
C03 02  X  SPA  @0 Emisión óptica @5 02
C03 03  X  FRE  @0 Décharge luminescente @5 03
C03 03  X  ENG  @0 Glow discharge @5 03
C03 03  X  GER  @0 Glimmentladung @5 03
C03 03  X  SPA  @0 Descarga luminiscente @5 03
C03 04  X  FRE  @0 Radiofréquence @5 04
C03 04  X  ENG  @0 Radiofrequency @5 04
C03 04  X  SPA  @0 Radiofrecuencia @5 04
C03 05  X  FRE  @0 Chimie analytique @5 05
C03 05  X  ENG  @0 Analytical chemistry @5 05
C03 05  X  SPA  @0 Química analítica @5 05
C03 06  X  FRE  @0 Source ion plasma @5 06
C03 06  X  ENG  @0 Plasma ion source @5 06
C03 06  X  SPA  @0 Fuente ión plasma @5 06
C03 07  X  FRE  @0 Revêtement @5 07
C03 07  X  ENG  @0 Coatings @5 07
C03 07  X  GER  @0 Ueberzug @5 07
C03 07  X  SPA  @0 Revestimiento @5 07
C03 08  X  FRE  @0 Dépôt métal @5 08
C03 08  X  ENG  @0 Metal deposition @5 08
C03 08  X  GER  @0 Metallbeschichten @5 08
C03 08  X  SPA  @0 Deposición metal @5 08
C03 09  X  FRE  @0 Traitement surface @5 09
C03 09  X  ENG  @0 Surface treatment @5 09
C03 09  X  GER  @0 Oberflaechenbehandlung @5 09
C03 09  X  SPA  @0 Tratamiento superficie @5 09
C03 10  X  FRE  @0 Etude expérimentale @5 10
C03 10  X  ENG  @0 Experimental study @5 10
C03 10  X  GER  @0 Experimentelle Untersuchung @5 10
C03 10  X  SPA  @0 Estudio experimental @5 10
N21       @1 189
N82       @1 PSI

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Pascal:02-0343469

Le document en format XML

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<div type="abstract" xml:lang="en">The radio frequency (RF) powered source is the most stable and capable analytical source available for glow discharge optical emission spectroscopy (GD-OES). It allows the direct analysis of both conductive and non-conductive samples on the same source, without changing the source. Recent developments in RF generators and components have further improved the performance of these sources, and now allow the routine measurement of additional RF parameters such as applied voltage and DC bias voltage. Theoretical studies of the fundamental characteristics of the RF source are providing deeper understanding of how they work, and combined with the new measurement tools will lead to further improvements in analytical performance. Recent theoretical and experimental work on the RF plasma source will be presented. These studies will be illustrated with some recent applications: in metals analysis, plus a hard coating and a non-conductive coating.</div>
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<s0>Spectrométrie optique</s0>
<s5>01</s5>
</fC03>
<fC03 i1="01" i2="X" l="ENG">
<s0>Optical spectrometry</s0>
<s5>01</s5>
</fC03>
<fC03 i1="01" i2="X" l="SPA">
<s0>Espectrometría óptica</s0>
<s5>01</s5>
</fC03>
<fC03 i1="02" i2="X" l="FRE">
<s0>Emission optique</s0>
<s5>02</s5>
</fC03>
<fC03 i1="02" i2="X" l="ENG">
<s0>Light emission</s0>
<s5>02</s5>
</fC03>
<fC03 i1="02" i2="X" l="SPA">
<s0>Emisión óptica</s0>
<s5>02</s5>
</fC03>
<fC03 i1="03" i2="X" l="FRE">
<s0>Décharge luminescente</s0>
<s5>03</s5>
</fC03>
<fC03 i1="03" i2="X" l="ENG">
<s0>Glow discharge</s0>
<s5>03</s5>
</fC03>
<fC03 i1="03" i2="X" l="GER">
<s0>Glimmentladung</s0>
<s5>03</s5>
</fC03>
<fC03 i1="03" i2="X" l="SPA">
<s0>Descarga luminiscente</s0>
<s5>03</s5>
</fC03>
<fC03 i1="04" i2="X" l="FRE">
<s0>Radiofréquence</s0>
<s5>04</s5>
</fC03>
<fC03 i1="04" i2="X" l="ENG">
<s0>Radiofrequency</s0>
<s5>04</s5>
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<fC03 i1="04" i2="X" l="SPA">
<s0>Radiofrecuencia</s0>
<s5>04</s5>
</fC03>
<fC03 i1="05" i2="X" l="FRE">
<s0>Chimie analytique</s0>
<s5>05</s5>
</fC03>
<fC03 i1="05" i2="X" l="ENG">
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<s5>05</s5>
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<fC03 i1="05" i2="X" l="SPA">
<s0>Química analítica</s0>
<s5>05</s5>
</fC03>
<fC03 i1="06" i2="X" l="FRE">
<s0>Source ion plasma</s0>
<s5>06</s5>
</fC03>
<fC03 i1="06" i2="X" l="ENG">
<s0>Plasma ion source</s0>
<s5>06</s5>
</fC03>
<fC03 i1="06" i2="X" l="SPA">
<s0>Fuente ión plasma</s0>
<s5>06</s5>
</fC03>
<fC03 i1="07" i2="X" l="FRE">
<s0>Revêtement</s0>
<s5>07</s5>
</fC03>
<fC03 i1="07" i2="X" l="ENG">
<s0>Coatings</s0>
<s5>07</s5>
</fC03>
<fC03 i1="07" i2="X" l="GER">
<s0>Ueberzug</s0>
<s5>07</s5>
</fC03>
<fC03 i1="07" i2="X" l="SPA">
<s0>Revestimiento</s0>
<s5>07</s5>
</fC03>
<fC03 i1="08" i2="X" l="FRE">
<s0>Dépôt métal</s0>
<s5>08</s5>
</fC03>
<fC03 i1="08" i2="X" l="ENG">
<s0>Metal deposition</s0>
<s5>08</s5>
</fC03>
<fC03 i1="08" i2="X" l="GER">
<s0>Metallbeschichten</s0>
<s5>08</s5>
</fC03>
<fC03 i1="08" i2="X" l="SPA">
<s0>Deposición metal</s0>
<s5>08</s5>
</fC03>
<fC03 i1="09" i2="X" l="FRE">
<s0>Traitement surface</s0>
<s5>09</s5>
</fC03>
<fC03 i1="09" i2="X" l="ENG">
<s0>Surface treatment</s0>
<s5>09</s5>
</fC03>
<fC03 i1="09" i2="X" l="GER">
<s0>Oberflaechenbehandlung</s0>
<s5>09</s5>
</fC03>
<fC03 i1="09" i2="X" l="SPA">
<s0>Tratamiento superficie</s0>
<s5>09</s5>
</fC03>
<fC03 i1="10" i2="X" l="FRE">
<s0>Etude expérimentale</s0>
<s5>10</s5>
</fC03>
<fC03 i1="10" i2="X" l="ENG">
<s0>Experimental study</s0>
<s5>10</s5>
</fC03>
<fC03 i1="10" i2="X" l="GER">
<s0>Experimentelle Untersuchung</s0>
<s5>10</s5>
</fC03>
<fC03 i1="10" i2="X" l="SPA">
<s0>Estudio experimental</s0>
<s5>10</s5>
</fC03>
<fN21>
<s1>189</s1>
</fN21>
<fN82>
<s1>PSI</s1>
</fN82>
</pA>
</standard>
</inist>
</record>

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