AustralieFrV1, PascalFrancis, Corpus, bibRecord, 003C37

Pulsed RF discharges, glow and filamentary mode at atmospheric pressure in argon

Identifieur interne : 003C37 ( PascalFrancis/Corpus ); précédent : 003C36; suivant : 003C38

Pulsed RF discharges, glow and filamentary mode at atmospheric pressure in argon

Auteurs : N. Balcon ; A. Aanesland ; R. Boswell

Source :

Plasma sources science & technology : (Print) [ 0963-0252 ] ; 2007.

RBID : Pascal:07-0244046

Descripteurs français

Pascal (Inist)
- Décharge luminescente, Décharge capacitive, Raie émission, Equation Saha, Pression atmosphérique, Spectrométrie émission, Diagnostic plasma, Etude expérimentale, Basse température, Température plasma, Densité plasma, Température électron, Argon, Hydrogène, Polymère, Décharge électrique, Durée impulsion, Méthode optique, Bilan énergie, 5270K, 5280P, 5280H, 5280T, 5270, Décharge radiofréquence.

English descriptors

KwdEn :
- Argon, Atmospheric pressure, Capacitive discharge, Electric discharges, Electron temperature, Emission line, Emission spectroscopy, Energy balance, Experimental study, Glow discharges, Hydrogen, Low temperature, Optical method, Plasma density, Plasma diagnostics, Plasma temperature, Polymers, Pulse width, Radiofrequency discharge, Saha equation.

Abstract

The properties of a pulsed radio frequency capacitive discharge are investigated at atmospheric pressure in argon. The discharge can operate in two different modes: a homogeneous glow discharge or turn into filaments. By pulsing the 13.56MHz generator both the filamentary and the glow modes can be selected depending on the pulse width and period. For a 5 μs pulse width (∼70 RF cycles in the pulse), short pulse periods (less than 100 μs) result in a filamentary discharge while long pulse periods (greater than 1 ms) result in a glow discharge. Optical emission spectroscopy and power measurements were performed to estimate the plasma temperature and density. Water vapour was introduced to the discharge as a source of hydrogen and the Stark broadening of the Balmer H_β line was measured to allow the plasma density to be estimated as 10¹⁵ cm^-3 in the filamentary mode. The estimation of the glow mode density was based on power balance and yielded a density of 5 x 1011 cm^-3. Emission line ratio measurements coupled with the Saha equation resulted in an estimate of electron temperature of approximatively 1.3 eV for the glow mode and 1.7 eV for the filaments. Using the glow mode at a duty cycle of 10% is effective in decreasing the hydrophobicity of polymer films while keeping the temperature low.

Notice en format standard (ISO 2709)

Pour connaître la documentation sur le format Inist Standard.

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A08	`01`	`1`	`ENG`	`@1 Pulsed RF discharges, glow and filamentary mode at atmospheric pressure in argon`
A11	`01`	`1`		`@1 BALCON (N.)`
A11	`02`	`1`		`@1 AANESLAND (A.)`
A11	`03`	`1`		`@1 BOSWELL (R.)`
A14	`01`			`@1 RSPhysSE, Australian National University @2 Canberra 0200 @3 AUS @Z 1 aut. @Z 2 aut. @Z 3 aut.`
A14	`02`			`@1 CPAT, Université Paul Sabatier @2 Toulouse 31000 @3 FRA @Z 1 aut.`
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A43	`01`			`@1 INIST @2 26250 @5 354000159901130020`
A44				`@0 0000 @1 © 2007 INIST-CNRS. All rights reserved.`
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A64	`01`	`1`		`@0 Plasma sources science & technology : (Print)`
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C01	`01`		`ENG`	@0 The properties of a pulsed radio frequency capacitive discharge are investigated at atmospheric pressure in argon. The discharge can operate in two different modes: a homogeneous glow discharge or turn into filaments. By pulsing the 13.56MHz generator both the filamentary and the glow modes can be selected depending on the pulse width and period. For a 5 μs pulse width (∼70 RF cycles in the pulse), short pulse periods (less than 100 μs) result in a filamentary discharge while long pulse periods (greater than 1 ms) result in a glow discharge. Optical emission spectroscopy and power measurements were performed to estimate the plasma temperature and density. Water vapour was introduced to the discharge as a source of hydrogen and the Stark broadening of the Balmer H_β line was measured to allow the plasma density to be estimated as 10¹⁵ cm^-3 in the filamentary mode. The estimation of the glow mode density was based on power balance and yielded a density of 5 x 1011 cm^-3. Emission line ratio measurements coupled with the Saha equation resulted in an estimate of electron temperature of approximatively 1.3 eV for the glow mode and 1.7 eV for the filaments. Using the glow mode at a duty cycle of 10% is effective in decreasing the hydrophobicity of polymer films while keeping the temperature low.
C02	`01`	`3`		`@0 001B50B80P`
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C03	`01`	`3`	`FRE`	`@0 Décharge luminescente @5 03`
C03	`01`	`3`	`ENG`	`@0 Glow discharges @5 03`
C03	`02`	`X`	`FRE`	`@0 Décharge capacitive @5 04`
C03	`02`	`X`	`ENG`	`@0 Capacitive discharge @5 04`
C03	`02`	`X`	`SPA`	`@0 Descarga capacitiva @5 04`
C03	`03`	`X`	`FRE`	`@0 Raie émission @5 05`
C03	`03`	`X`	`ENG`	`@0 Emission line @5 05`
C03	`03`	`X`	`SPA`	`@0 Raya emisión @5 05`
C03	`04`	`3`	`FRE`	`@0 Equation Saha @5 23`
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C03	`05`	`3`	`FRE`	`@0 Pression atmosphérique @5 30`
C03	`05`	`3`	`ENG`	`@0 Atmospheric pressure @5 30`
C03	`06`	`3`	`FRE`	`@0 Spectrométrie émission @5 31`
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C03	`10`	`3`	`ENG`	`@0 Plasma temperature @5 41`
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C03	`11`	`3`	`ENG`	`@0 Plasma density @5 42`
C03	`12`	`3`	`FRE`	`@0 Température électron @5 43`
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C03	`13`	`3`	`FRE`	`@0 Argon @2 NC @5 57`
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C03	`15`	`3`	`FRE`	`@0 Polymère @5 59`
C03	`15`	`3`	`ENG`	`@0 Polymers @5 59`
C03	`16`	`3`	`FRE`	`@0 Décharge électrique @5 61`
C03	`16`	`3`	`ENG`	`@0 Electric discharges @5 61`
C03	`17`	`X`	`FRE`	`@0 Durée impulsion @5 62`
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C03	`17`	`X`	`SPA`	`@0 Duración impulso @5 62`
C03	`18`	`X`	`FRE`	`@0 Méthode optique @5 63`
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C03	`19`	`3`	`ENG`	`@0 Energy balance @5 64`
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C03	`22`	`3`	`FRE`	`@0 5280H @4 INC @5 92`
C03	`23`	`3`	`FRE`	`@0 5280T @4 INC @5 93`
C03	`24`	`3`	`FRE`	`@0 5270 @4 INC @5 94`
C03	`25`	`3`	`FRE`	`@0 Décharge radiofréquence @4 CD @5 96`
C03	`25`	`3`	`ENG`	`@0 Radiofrequency discharge @4 CD @5 96`
N21				`@1 162`
N44	`01`			`@1 OTO`
N82				`@1 OTO`

Format Inist (serveur)

NO :	PASCAL 07-0244046 INIST
ET :	Pulsed RF discharges, glow and filamentary mode at atmospheric pressure in argon
AU :	BALCON (N.); AANESLAND (A.); BOSWELL (R.)
AF :	RSPhysSE, Australian National University/Canberra 0200/Australie (1 aut., 2 aut., 3 aut.); CPAT, Université Paul Sabatier/Toulouse 31000/France (1 aut.)
DT :	Publication en série; Niveau analytique
SO :	Plasma sources science & technology : (Print); ISSN 0963-0252; Royaume-Uni; Da. 2007; Vol. 16; No. 2; Pp. 217-225; Bibl. 19 ref.
LA :	Anglais
EA :	The properties of a pulsed radio frequency capacitive discharge are investigated at atmospheric pressure in argon. The discharge can operate in two different modes: a homogeneous glow discharge or turn into filaments. By pulsing the 13.56MHz generator both the filamentary and the glow modes can be selected depending on the pulse width and period. For a 5 μs pulse width (∼70 RF cycles in the pulse), short pulse periods (less than 100 μs) result in a filamentary discharge while long pulse periods (greater than 1 ms) result in a glow discharge. Optical emission spectroscopy and power measurements were performed to estimate the plasma temperature and density. Water vapour was introduced to the discharge as a source of hydrogen and the Stark broadening of the Balmer H_β line was measured to allow the plasma density to be estimated as 10¹⁵ cm^-3 in the filamentary mode. The estimation of the glow mode density was based on power balance and yielded a density of 5 x 1011 cm^-3. Emission line ratio measurements coupled with the Saha equation resulted in an estimate of electron temperature of approximatively 1.3 eV for the glow mode and 1.7 eV for the filaments. Using the glow mode at a duty cycle of 10% is effective in decreasing the hydrophobicity of polymer films while keeping the temperature low.
CC :	001B50B80P; 001B50B80H; 001B50B80T; 001B50B70K
FD :	Décharge luminescente; Décharge capacitive; Raie émission; Equation Saha; Pression atmosphérique; Spectrométrie émission; Diagnostic plasma; Etude expérimentale; Basse température; Température plasma; Densité plasma; Température électron; Argon; Hydrogène; Polymère; Décharge électrique; Durée impulsion; Méthode optique; Bilan énergie; 5270K; 5280P; 5280H; 5280T; 5270; Décharge radiofréquence
ED :	Glow discharges; Capacitive discharge; Emission line; Saha equation; Atmospheric pressure; Emission spectroscopy; Plasma diagnostics; Experimental study; Low temperature; Plasma temperature; Plasma density; Electron temperature; Argon; Hydrogen; Polymers; Electric discharges; Pulse width; Optical method; Energy balance; Radiofrequency discharge
SD :	Descarga capacitiva; Raya emisión; Baja temperatura; Duración impulso; Método óptico
LO :	INIST-26250.354000159901130020
ID :	07-0244046

Links to Exploration step

Pascal:07-0244046

Le document en format XML

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<keywords scheme="Pascal" xml:lang="fr"><term>Décharge luminescente</term>
<term>Décharge capacitive</term>
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<front><div type="abstract" xml:lang="en">The properties of a pulsed radio frequency capacitive discharge are investigated at atmospheric pressure in argon. The discharge can operate in two different modes: a homogeneous glow discharge or turn into filaments. By pulsing the 13.56MHz generator both the filamentary and the glow modes can be selected depending on the pulse width and period. For a 5 μs pulse width (∼70 RF cycles in the pulse), short pulse periods (less than 100 μs) result in a filamentary discharge while long pulse periods (greater than 1 ms) result in a glow discharge. Optical emission spectroscopy and power measurements were performed to estimate the plasma temperature and density. Water vapour was introduced to the discharge as a source of hydrogen and the Stark broadening of the Balmer H<sub>β</sub>
 line was measured to allow the plasma density to be estimated as 10<sup>15</sup>
 cm<sup>-3</sup>
 in the filamentary mode. The estimation of the glow mode density was based on power balance and yielded a density of 5 x 1011 cm<sup>-3</sup>
. Emission line ratio measurements coupled with the Saha equation resulted in an estimate of electron temperature of approximatively 1.3 eV for the glow mode and 1.7 eV for the filaments. Using the glow mode at a duty cycle of 10% is effective in decreasing the hydrophobicity of polymer films while keeping the temperature low.</div>
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<fC01 i1="01" l="ENG"><s0>The properties of a pulsed radio frequency capacitive discharge are investigated at atmospheric pressure in argon. The discharge can operate in two different modes: a homogeneous glow discharge or turn into filaments. By pulsing the 13.56MHz generator both the filamentary and the glow modes can be selected depending on the pulse width and period. For a 5 μs pulse width (∼70 RF cycles in the pulse), short pulse periods (less than 100 μs) result in a filamentary discharge while long pulse periods (greater than 1 ms) result in a glow discharge. Optical emission spectroscopy and power measurements were performed to estimate the plasma temperature and density. Water vapour was introduced to the discharge as a source of hydrogen and the Stark broadening of the Balmer H<sub>β</sub>
 line was measured to allow the plasma density to be estimated as 10<sup>15</sup>
 cm<sup>-3</sup>
 in the filamentary mode. The estimation of the glow mode density was based on power balance and yielded a density of 5 x 1011 cm<sup>-3</sup>
. Emission line ratio measurements coupled with the Saha equation resulted in an estimate of electron temperature of approximatively 1.3 eV for the glow mode and 1.7 eV for the filaments. Using the glow mode at a duty cycle of 10% is effective in decreasing the hydrophobicity of polymer films while keeping the temperature low.</s0>
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<fC03 i1="05" i2="3" l="ENG"><s0>Atmospheric pressure</s0>
<s5>30</s5>
</fC03>
<fC03 i1="06" i2="3" l="FRE"><s0>Spectrométrie émission</s0>
<s5>31</s5>
</fC03>
<fC03 i1="06" i2="3" l="ENG"><s0>Emission spectroscopy</s0>
<s5>31</s5>
</fC03>
<fC03 i1="07" i2="3" l="FRE"><s0>Diagnostic plasma</s0>
<s5>32</s5>
</fC03>
<fC03 i1="07" i2="3" l="ENG"><s0>Plasma diagnostics</s0>
<s5>32</s5>
</fC03>
<fC03 i1="08" i2="3" l="FRE"><s0>Etude expérimentale</s0>
<s5>33</s5>
</fC03>
<fC03 i1="08" i2="3" l="ENG"><s0>Experimental study</s0>
<s5>33</s5>
</fC03>
<fC03 i1="09" i2="X" l="FRE"><s0>Basse température</s0>
<s5>34</s5>
</fC03>
<fC03 i1="09" i2="X" l="ENG"><s0>Low temperature</s0>
<s5>34</s5>
</fC03>
<fC03 i1="09" i2="X" l="SPA"><s0>Baja temperatura</s0>
<s5>34</s5>
</fC03>
<fC03 i1="10" i2="3" l="FRE"><s0>Température plasma</s0>
<s5>41</s5>
</fC03>
<fC03 i1="10" i2="3" l="ENG"><s0>Plasma temperature</s0>
<s5>41</s5>
</fC03>
<fC03 i1="11" i2="3" l="FRE"><s0>Densité plasma</s0>
<s5>42</s5>
</fC03>
<fC03 i1="11" i2="3" l="ENG"><s0>Plasma density</s0>
<s5>42</s5>
</fC03>
<fC03 i1="12" i2="3" l="FRE"><s0>Température électron</s0>
<s5>43</s5>
</fC03>
<fC03 i1="12" i2="3" l="ENG"><s0>Electron temperature</s0>
<s5>43</s5>
</fC03>
<fC03 i1="13" i2="3" l="FRE"><s0>Argon</s0>
<s2>NC</s2>
<s5>57</s5>
</fC03>
<fC03 i1="13" i2="3" l="ENG"><s0>Argon</s0>
<s2>NC</s2>
<s5>57</s5>
</fC03>
<fC03 i1="14" i2="3" l="FRE"><s0>Hydrogène</s0>
<s2>NC</s2>
<s5>58</s5>
</fC03>
<fC03 i1="14" i2="3" l="ENG"><s0>Hydrogen</s0>
<s2>NC</s2>
<s5>58</s5>
</fC03>
<fC03 i1="15" i2="3" l="FRE"><s0>Polymère</s0>
<s5>59</s5>
</fC03>
<fC03 i1="15" i2="3" l="ENG"><s0>Polymers</s0>
<s5>59</s5>
</fC03>
<fC03 i1="16" i2="3" l="FRE"><s0>Décharge électrique</s0>
<s5>61</s5>
</fC03>
<fC03 i1="16" i2="3" l="ENG"><s0>Electric discharges</s0>
<s5>61</s5>
</fC03>
<fC03 i1="17" i2="X" l="FRE"><s0>Durée impulsion</s0>
<s5>62</s5>
</fC03>
<fC03 i1="17" i2="X" l="ENG"><s0>Pulse width</s0>
<s5>62</s5>
</fC03>
<fC03 i1="17" i2="X" l="SPA"><s0>Duración impulso</s0>
<s5>62</s5>
</fC03>
<fC03 i1="18" i2="X" l="FRE"><s0>Méthode optique</s0>
<s5>63</s5>
</fC03>
<fC03 i1="18" i2="X" l="ENG"><s0>Optical method</s0>
<s5>63</s5>
</fC03>
<fC03 i1="18" i2="X" l="SPA"><s0>Método óptico</s0>
<s5>63</s5>
</fC03>
<fC03 i1="19" i2="3" l="FRE"><s0>Bilan énergie</s0>
<s5>64</s5>
</fC03>
<fC03 i1="19" i2="3" l="ENG"><s0>Energy balance</s0>
<s5>64</s5>
</fC03>
<fC03 i1="20" i2="3" l="FRE"><s0>5270K</s0>
<s4>INC</s4>
<s5>83</s5>
</fC03>
<fC03 i1="21" i2="3" l="FRE"><s0>5280P</s0>
<s4>INC</s4>
<s5>91</s5>
</fC03>
<fC03 i1="22" i2="3" l="FRE"><s0>5280H</s0>
<s4>INC</s4>
<s5>92</s5>
</fC03>
<fC03 i1="23" i2="3" l="FRE"><s0>5280T</s0>
<s4>INC</s4>
<s5>93</s5>
</fC03>
<fC03 i1="24" i2="3" l="FRE"><s0>5270</s0>
<s4>INC</s4>
<s5>94</s5>
</fC03>
<fC03 i1="25" i2="3" l="FRE"><s0>Décharge radiofréquence</s0>
<s4>CD</s4>
<s5>96</s5>
</fC03>
<fC03 i1="25" i2="3" l="ENG"><s0>Radiofrequency discharge</s0>
<s4>CD</s4>
<s5>96</s5>
</fC03>
<fN21><s1>162</s1>
</fN21>
<fN44 i1="01"><s1>OTO</s1>
</fN44>
<fN82><s1>OTO</s1>
</fN82>
</pA>
</standard>
<server><NO>PASCAL 07-0244046 INIST</NO>
<ET>Pulsed RF discharges, glow and filamentary mode at atmospheric pressure in argon</ET>
<AU>BALCON (N.); AANESLAND (A.); BOSWELL (R.)</AU>
<AF>RSPhysSE, Australian National University/Canberra 0200/Australie (1 aut., 2 aut., 3 aut.); CPAT, Université Paul Sabatier/Toulouse 31000/France (1 aut.)</AF>
<DT>Publication en série; Niveau analytique</DT>
<SO>Plasma sources science & technology : (Print); ISSN 0963-0252; Royaume-Uni; Da. 2007; Vol. 16; No. 2; Pp. 217-225; Bibl. 19 ref.</SO>
<LA>Anglais</LA>
<EA>The properties of a pulsed radio frequency capacitive discharge are investigated at atmospheric pressure in argon. The discharge can operate in two different modes: a homogeneous glow discharge or turn into filaments. By pulsing the 13.56MHz generator both the filamentary and the glow modes can be selected depending on the pulse width and period. For a 5 μs pulse width (∼70 RF cycles in the pulse), short pulse periods (less than 100 μs) result in a filamentary discharge while long pulse periods (greater than 1 ms) result in a glow discharge. Optical emission spectroscopy and power measurements were performed to estimate the plasma temperature and density. Water vapour was introduced to the discharge as a source of hydrogen and the Stark broadening of the Balmer H<sub>β</sub>
 line was measured to allow the plasma density to be estimated as 10<sup>15</sup>
 cm<sup>-3</sup>
 in the filamentary mode. The estimation of the glow mode density was based on power balance and yielded a density of 5 x 1011 cm<sup>-3</sup>
. Emission line ratio measurements coupled with the Saha equation resulted in an estimate of electron temperature of approximatively 1.3 eV for the glow mode and 1.7 eV for the filaments. Using the glow mode at a duty cycle of 10% is effective in decreasing the hydrophobicity of polymer films while keeping the temperature low.</EA>
<CC>001B50B80P; 001B50B80H; 001B50B80T; 001B50B70K</CC>
<FD>Décharge luminescente; Décharge capacitive; Raie émission; Equation Saha; Pression atmosphérique; Spectrométrie émission; Diagnostic plasma; Etude expérimentale; Basse température; Température plasma; Densité plasma; Température électron; Argon; Hydrogène; Polymère; Décharge électrique; Durée impulsion; Méthode optique; Bilan énergie; 5270K; 5280P; 5280H; 5280T; 5270; Décharge radiofréquence</FD>
<ED>Glow discharges; Capacitive discharge; Emission line; Saha equation; Atmospheric pressure; Emission spectroscopy; Plasma diagnostics; Experimental study; Low temperature; Plasma temperature; Plasma density; Electron temperature; Argon; Hydrogen; Polymers; Electric discharges; Pulse width; Optical method; Energy balance; Radiofrequency discharge</ED>
<SD>Descarga capacitiva; Raya emisión; Baja temperatura; Duración impulso; Método óptico</SD>
<LO>INIST-26250.354000159901130020</LO>
<ID>07-0244046</ID>
</server>
</inist>
</record>

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Pulsed RF discharges, glow and filamentary mode at atmospheric pressure in argon

Pulsed RF discharges, glow and filamentary mode at atmospheric pressure in argon

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