High aspect-ratio micromachining of polymers with an ultrafast laser
Identifieur interne : 005399 ( PascalFrancis/Checkpoint ); précédent : 005398; suivant : 005400High aspect-ratio micromachining of polymers with an ultrafast laser
Auteurs : Y. Zhang [Japon] ; R. M. Lowe [Australie] ; E. Harvey [Australie] ; P. Hannaford [Australie] ; A. Endo [Japon]Source :
- Applied surface science [ 0169-4332 ] ; 2002.
Descripteurs français
Abstract
Laser ablation of various polymers has been studied using a beam of 100 fs laser pulses at a wavelength of 800 nm. For a beam focussed by a plano-convex lens, high-quality machining of holes with diameters 20-40 μm and depths 300-400 μm (aspect ratio greater than 10) has been achieved. When projection patterning is carried out with a rectangular pinhole, arrays of micro-strings have been observed deep in the bulk of the sample. The micro-strings have diameters as small as 2 μm (about three times the wavelength) and lengths greater than 10 mm (aspect ratio 5000). The achievement of the high aspect ratios and the formation of the arrays of micro-strings are discussed.
Affiliations:
Links toward previous steps (curation, corpus...)
Links to Exploration step
Pascal:02-0267859Le document en format XML
<record><TEI><teiHeader><fileDesc><titleStmt><title xml:lang="en" level="a">High aspect-ratio micromachining of polymers with an ultrafast laser</title><author><name sortKey="Zhang, Y" sort="Zhang, Y" uniqKey="Zhang Y" first="Y." last="Zhang">Y. Zhang</name><affiliation wicri:level="1"><inist:fA14 i1="01"><s1>Sumitomo Heavy Industries Ltd., 2-1-1 Yatocho</s1><s2>Nishitokyo, Tokyo 188-8585</s2><s3>JPN</s3><sZ>1 aut.</sZ><sZ>5 aut.</sZ></inist:fA14><country>Japon</country><placeName><settlement type="city">Tokyo</settlement><region type="région">Région de Kantō</region></placeName></affiliation></author><author><name sortKey="Lowe, R M" sort="Lowe, R M" uniqKey="Lowe R" first="R. M." last="Lowe">R. M. Lowe</name><affiliation wicri:level="1"><inist:fA14 i1="02"><s1>Swinburne Centre for Ultrafast Laser Spectroscopy, Swinburne University of Technology, P.O. Box 218</s1><s2>Hawthorn, Vic. 3122</s2><s3>AUS</s3><sZ>2 aut.</sZ><sZ>4 aut.</sZ></inist:fA14><country>Australie</country><wicri:noRegion>Hawthorn, Vic. 3122</wicri:noRegion></affiliation></author><author><name sortKey="Harvey, E" sort="Harvey, E" uniqKey="Harvey E" first="E." last="Harvey">E. Harvey</name><affiliation wicri:level="1"><inist:fA14 i1="03"><s1>Industrial Research Institute Swinburne, Swinburne University of Technology, P.O. Box 218</s1><s2>Hawthorn, Vic. 3122</s2><s3>AUS</s3><sZ>3 aut.</sZ></inist:fA14><country>Australie</country><wicri:noRegion>Hawthorn, Vic. 3122</wicri:noRegion></affiliation></author><author><name sortKey="Hannaford, P" sort="Hannaford, P" uniqKey="Hannaford P" first="P." last="Hannaford">P. Hannaford</name><affiliation wicri:level="1"><inist:fA14 i1="02"><s1>Swinburne Centre for Ultrafast Laser Spectroscopy, Swinburne University of Technology, P.O. Box 218</s1><s2>Hawthorn, Vic. 3122</s2><s3>AUS</s3><sZ>2 aut.</sZ><sZ>4 aut.</sZ></inist:fA14><country>Australie</country><wicri:noRegion>Hawthorn, Vic. 3122</wicri:noRegion></affiliation></author><author><name sortKey="Endo, A" sort="Endo, A" uniqKey="Endo A" first="A." last="Endo">A. Endo</name><affiliation wicri:level="1"><inist:fA14 i1="01"><s1>Sumitomo Heavy Industries Ltd., 2-1-1 Yatocho</s1><s2>Nishitokyo, Tokyo 188-8585</s2><s3>JPN</s3><sZ>1 aut.</sZ><sZ>5 aut.</sZ></inist:fA14><country>Japon</country><placeName><settlement type="city">Tokyo</settlement><region type="région">Région de Kantō</region></placeName></affiliation></author></titleStmt><publicationStmt><idno type="wicri:source">INIST</idno><idno type="inist">02-0267859</idno><date when="2002">2002</date><idno type="stanalyst">PASCAL 02-0267859 INIST</idno><idno type="RBID">Pascal:02-0267859</idno><idno type="wicri:Area/PascalFrancis/Corpus">005785</idno><idno type="wicri:Area/PascalFrancis/Curation">000954</idno><idno type="wicri:Area/PascalFrancis/Checkpoint">005399</idno><idno type="wicri:explorRef" wicri:stream="PascalFrancis" wicri:step="Checkpoint">005399</idno></publicationStmt><sourceDesc><biblStruct><analytic><title xml:lang="en" level="a">High aspect-ratio micromachining of polymers with an ultrafast laser</title><author><name sortKey="Zhang, Y" sort="Zhang, Y" uniqKey="Zhang Y" first="Y." last="Zhang">Y. Zhang</name><affiliation wicri:level="1"><inist:fA14 i1="01"><s1>Sumitomo Heavy Industries Ltd., 2-1-1 Yatocho</s1><s2>Nishitokyo, Tokyo 188-8585</s2><s3>JPN</s3><sZ>1 aut.</sZ><sZ>5 aut.</sZ></inist:fA14><country>Japon</country><placeName><settlement type="city">Tokyo</settlement><region type="région">Région de Kantō</region></placeName></affiliation></author><author><name sortKey="Lowe, R M" sort="Lowe, R M" uniqKey="Lowe R" first="R. M." last="Lowe">R. M. Lowe</name><affiliation wicri:level="1"><inist:fA14 i1="02"><s1>Swinburne Centre for Ultrafast Laser Spectroscopy, Swinburne University of Technology, P.O. Box 218</s1><s2>Hawthorn, Vic. 3122</s2><s3>AUS</s3><sZ>2 aut.</sZ><sZ>4 aut.</sZ></inist:fA14><country>Australie</country><wicri:noRegion>Hawthorn, Vic. 3122</wicri:noRegion></affiliation></author><author><name sortKey="Harvey, E" sort="Harvey, E" uniqKey="Harvey E" first="E." last="Harvey">E. Harvey</name><affiliation wicri:level="1"><inist:fA14 i1="03"><s1>Industrial Research Institute Swinburne, Swinburne University of Technology, P.O. Box 218</s1><s2>Hawthorn, Vic. 3122</s2><s3>AUS</s3><sZ>3 aut.</sZ></inist:fA14><country>Australie</country><wicri:noRegion>Hawthorn, Vic. 3122</wicri:noRegion></affiliation></author><author><name sortKey="Hannaford, P" sort="Hannaford, P" uniqKey="Hannaford P" first="P." last="Hannaford">P. Hannaford</name><affiliation wicri:level="1"><inist:fA14 i1="02"><s1>Swinburne Centre for Ultrafast Laser Spectroscopy, Swinburne University of Technology, P.O. Box 218</s1><s2>Hawthorn, Vic. 3122</s2><s3>AUS</s3><sZ>2 aut.</sZ><sZ>4 aut.</sZ></inist:fA14><country>Australie</country><wicri:noRegion>Hawthorn, Vic. 3122</wicri:noRegion></affiliation></author><author><name sortKey="Endo, A" sort="Endo, A" uniqKey="Endo A" first="A." last="Endo">A. Endo</name><affiliation wicri:level="1"><inist:fA14 i1="01"><s1>Sumitomo Heavy Industries Ltd., 2-1-1 Yatocho</s1><s2>Nishitokyo, Tokyo 188-8585</s2><s3>JPN</s3><sZ>1 aut.</sZ><sZ>5 aut.</sZ></inist:fA14><country>Japon</country><placeName><settlement type="city">Tokyo</settlement><region type="région">Région de Kantō</region></placeName></affiliation></author></analytic><series><title level="j" type="main">Applied surface science</title><title level="j" type="abbreviated">Appl. surf. sci.</title><idno type="ISSN">0169-4332</idno><imprint><date when="2002">2002</date></imprint></series></biblStruct></sourceDesc><seriesStmt><title level="j" type="main">Applied surface science</title><title level="j" type="abbreviated">Appl. surf. sci.</title><idno type="ISSN">0169-4332</idno></seriesStmt></fileDesc><profileDesc><textClass><keywords scheme="Pascal" xml:lang="fr"><term>7920D</term><term>8165</term></keywords></textClass></profileDesc></teiHeader><front><div type="abstract" xml:lang="en">Laser ablation of various polymers has been studied using a beam of 100 fs laser pulses at a wavelength of 800 nm. For a beam focussed by a plano-convex lens, high-quality machining of holes with diameters 20-40 μm and depths 300-400 μm (aspect ratio greater than 10) has been achieved. When projection patterning is carried out with a rectangular pinhole, arrays of micro-strings have been observed deep in the bulk of the sample. The micro-strings have diameters as small as 2 μm (about three times the wavelength) and lengths greater than 10 mm (aspect ratio 5000). The achievement of the high aspect ratios and the formation of the arrays of micro-strings are discussed.</div></front></TEI><inist><standard h6="B"><pA><fA01 i1="01" i2="1"><s0>0169-4332</s0></fA01><fA03 i2="1"><s0>Appl. surf. sci.</s0></fA03><fA05><s2>186</s2></fA05><fA06><s2>1-4</s2></fA06><fA08 i1="01" i2="1" l="ENG"><s1>High aspect-ratio micromachining of polymers with an ultrafast laser</s1></fA08><fA09 i1="01" i2="1" l="ENG"><s1>Proceedings of the European Materials Research Society 2001 - symposium L "Photon-induced surface processing", Strasbourg, France, June 5-8, 2001</s1></fA09><fA11 i1="01" i2="1"><s1>ZHANG (Y.)</s1></fA11><fA11 i1="02" i2="1"><s1>LOWE (R. M.)</s1></fA11><fA11 i1="03" i2="1"><s1>HARVEY (E.)</s1></fA11><fA11 i1="04" i2="1"><s1>HANNAFORD (P.)</s1></fA11><fA11 i1="05" i2="1"><s1>ENDO (A.)</s1></fA11><fA12 i1="01" i2="1"><s1>GIARDINI (Anna)</s1><s9>ed.</s9></fA12><fA12 i1="02" i2="1"><s1>GONZALO (José)</s1><s9>ed.</s9></fA12><fA12 i1="03" i2="1"><s1>SZÖRENYI (Tamas)</s1><s9>ed.</s9></fA12><fA12 i1="04" i2="1"><s1>PERRIERE (Jacques)</s1><s9>ed.</s9></fA12><fA14 i1="01"><s1>Sumitomo Heavy Industries Ltd., 2-1-1 Yatocho</s1><s2>Nishitokyo, Tokyo 188-8585</s2><s3>JPN</s3><sZ>1 aut.</sZ><sZ>5 aut.</sZ></fA14><fA14 i1="02"><s1>Swinburne Centre for Ultrafast Laser Spectroscopy, Swinburne University of Technology, P.O. Box 218</s1><s2>Hawthorn, Vic. 3122</s2><s3>AUS</s3><sZ>2 aut.</sZ><sZ>4 aut.</sZ></fA14><fA14 i1="03"><s1>Industrial Research Institute Swinburne, Swinburne University of Technology, P.O. Box 218</s1><s2>Hawthorn, Vic. 3122</s2><s3>AUS</s3><sZ>3 aut.</sZ></fA14><fA15 i1="01"><s1>Dipartimento di Chimica, Università di Roma La Sapienza, Piazzale A. Moro 5</s1><s2>Rome 00185</s2><s3>ITA</s3><sZ>1 aut.</sZ></fA15><fA15 i1="02"><s1>Instituto Materiali Speciali, CNR, Via Loja</s1><s2>Tito Scalo (PZ) 85050</s2><s3>ITA</s3><sZ>1 aut.</sZ></fA15><fA15 i1="03"><s1>Instituto de Optica, CSIC, Serrano 121</s1><s2>28006 Madrid</s2><s3>ESP</s3><sZ>2 aut.</sZ></fA15><fA15 i1="04"><s1>CNRS-PHASE, BP 20</s1><s2>67037 Strasbourg</s2><s3>FRA</s3><sZ>3 aut.</sZ></fA15><fA15 i1="05"><s1>Research Group on Laser Physics, Hungarian Academy of Sciences, P.O. Box 406</s1><s2>6701 Szeged</s2><s3>HUN</s3><sZ>3 aut.</sZ></fA15><fA15 i1="06"><s1>Groupe de Physique des Solides, Universités Paris VII et VI, URA 17, Tour 23, Place Jussieu</s1><s2>75251 Paris</s2><s3>FRA</s3><sZ>4 aut.</sZ></fA15><fA18 i1="01" i2="1"><s1>European Materials Research Society</s1><s2>Strasbourg</s2><s3>FRA</s3><s9>patr.</s9></fA18><fA20><s1>345-351</s1></fA20><fA21><s1>2002</s1></fA21><fA23 i1="01"><s0>ENG</s0></fA23><fA43 i1="01"><s1>INIST</s1><s2>16002</s2><s5>354000102809650620</s5></fA43><fA44><s0>0000</s0><s1>© 2002 INIST-CNRS. All rights reserved.</s1></fA44><fA45><s0>8 ref.</s0></fA45><fA47 i1="01" i2="1"><s0>02-0267859</s0></fA47><fA60><s1>P</s1><s2>C</s2></fA60><fA61><s0>A</s0></fA61><fA64 i1="01" i2="1"><s0>Applied surface science</s0></fA64><fA66 i1="01"><s0>NLD</s0></fA66><fC01 i1="01" l="ENG"><s0>Laser ablation of various polymers has been studied using a beam of 100 fs laser pulses at a wavelength of 800 nm. For a beam focussed by a plano-convex lens, high-quality machining of holes with diameters 20-40 μm and depths 300-400 μm (aspect ratio greater than 10) has been achieved. When projection patterning is carried out with a rectangular pinhole, arrays of micro-strings have been observed deep in the bulk of the sample. The micro-strings have diameters as small as 2 μm (about three times the wavelength) and lengths greater than 10 mm (aspect ratio 5000). The achievement of the high aspect ratios and the formation of the arrays of micro-strings are discussed.</s0></fC01><fC02 i1="01" i2="3"><s0>001B70I20D</s0></fC02><fC02 i1="02" i2="3"><s0>001B80A65</s0></fC02><fC03 i1="01" i2="3" l="FRE"><s0>7920D</s0><s2>PAC</s2><s4>INC</s4><s5>92</s5></fC03><fC03 i1="02" i2="3" l="FRE"><s0>8165</s0><s2>PAC</s2><s4>INC</s4><s5>93</s5></fC03><fN21><s1>154</s1></fN21><fN82><s1>PSI</s1></fN82></pA><pR><fA30 i1="01" i2="1" l="ENG"><s1>EMRS - Symposium L: "Photon-induced Surface Processing"</s1><s3>Strasbourg FRA</s3><s4>2001-06-05</s4></fA30></pR></standard></inist><affiliations><list><country><li>Australie</li><li>Japon</li></country><region><li>Région de Kantō</li></region><settlement><li>Tokyo</li></settlement></list><tree><country name="Japon"><region name="Région de Kantō"><name sortKey="Zhang, Y" sort="Zhang, Y" uniqKey="Zhang Y" first="Y." last="Zhang">Y. Zhang</name></region><name sortKey="Endo, A" sort="Endo, A" uniqKey="Endo A" first="A." last="Endo">A. Endo</name></country><country name="Australie"><noRegion><name sortKey="Lowe, R M" sort="Lowe, R M" uniqKey="Lowe R" first="R. M." last="Lowe">R. M. Lowe</name></noRegion><name sortKey="Hannaford, P" sort="Hannaford, P" uniqKey="Hannaford P" first="P." last="Hannaford">P. Hannaford</name><name sortKey="Harvey, E" sort="Harvey, E" uniqKey="Harvey E" first="E." last="Harvey">E. Harvey</name></country></tree></affiliations></record>Pour manipuler ce document sous Unix (Dilib)
EXPLOR_STEP=$WICRI_ROOT/Wicri/Asie/explor/AustralieFrV1/Data/PascalFrancis/Checkpoint
HfdSelect -h $EXPLOR_STEP/biblio.hfd -nk 005399 | SxmlIndent | more
Ou
HfdSelect -h $EXPLOR_AREA/Data/PascalFrancis/Checkpoint/biblio.hfd -nk 005399 | SxmlIndent | more
Pour mettre un lien sur cette page dans le réseau Wicri
{{Explor lien
|wiki= Wicri/Asie
|area= AustralieFrV1
|flux= PascalFrancis
|étape= Checkpoint
|type= RBID
|clé= Pascal:02-0267859
|texte= High aspect-ratio micromachining of polymers with an ultrafast laser
}}
| This area was generated with Dilib version V0.6.33. |  |