Eléments de l'association
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List of bibliographic references
Number of relevant bibliographic references: 1.Ident. | Authors (with country if any) | Title |
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006611 | M. C. Peignon [France] ; G. Turban [France] ; C. Charles [Australie] ; R. W. Boswell [Australie] | Surface modelling of reactive ion etching of silicon-germanium alloys in a SF6 plasma |
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