AustralieFrV1, Main, Exploration, bibRecord, 006949

Local etching of copper films by the Scanning Electrochemical Microscope in the feedback mode: A theoretical and experimental investigation

Identifieur interne : 006949 ( Main/Exploration ); précédent : 006948; suivant : 006950

Local etching of copper films by the Scanning Electrochemical Microscope in the feedback mode: A theoretical and experimental investigation

Auteurs : Renaud Cornut [France] ; Sandra Nunige [France] ; Christine Lefrou [France] ; Frederic Kanoufi [France]

Source :

Electrochimica acta [ 0013-4686 ] ; 2011.

RBID : Pascal:12-0327067

Descripteurs français

Pascal (Inist)
- Traitement surface, Cuivre, Boucle réaction, Etude théorique, Etude expérimentale, Dissolution anodique, Lithographie, Cinétique, Gravure électrochimique, Effet milieu, Microscopie champ proche, Microscopie électrochimique à balayage.
Wicri :
- topic : Cuivre.

English descriptors

KwdEn :
- Anodic dissolution, Copper, Electrochemical etching, Experimental study, Feedback, Kinetics, Lithography, Medium effect, Scanning electrochemical microscopy, Scanning probe microscopy, Surface treatment, Theoretical study.

Abstract

A model of the Scanning Electrochemical Microscope (SECM) as a lithographic tool is presented and used to get quantitative kinetic information from lithographic experiments. It is illustrated in the specific case of the local etching by anodic dissolution of a copper substrate by the SECM in the feedback mode. A theoretical model presents the expected profile of the etched hole in the simple case of the positive feedback behaviour. A steady-state behaviour is expected for the dimensionless shape of the hole, which depends only on the tip-substrate separation distance. The hole depth is then expected to linearly depend on the etching time. The model is then confronted to different experimental conditions where a Cu substrate is locally oxidized by a tip-electrogenerated Fe(bpy)₃³⁺ oxidant. The experiments agree with the theoretical predictions (steady-state dimensionless profile and linear evolution of the depth with time). Even though the system behaves under positive feedback, the kinetics of the etching process can readily be extracted from the hole characterization and its conversion into Faradaic yield.

Affiliations:

Links toward previous steps (curation, corpus...)

to stream PascalFrancis, to step Corpus: 001133
to stream PascalFrancis, to step Curation: 004D84
to stream PascalFrancis, to step Checkpoint: 001930
to stream Main, to step Merge: 006D81
to stream Main, to step Curation: 006949

Le document en format XML

<record><TEI><teiHeader><fileDesc><titleStmt><title xml:lang="en" level="a">Local etching of copper films by the Scanning Electrochemical Microscope in the feedback mode: A theoretical and experimental investigation</title>
<author><name sortKey="Cornut, Renaud" sort="Cornut, Renaud" uniqKey="Cornut R" first="Renaud" last="Cornut">Renaud Cornut</name>
<affiliation wicri:level="3"><inist:fA14 i1="01"><s1>Laboratoire d'Electrochimie et de Physico-chimie des Matériaux et des Interfaces, CNRS UMR 5631, 1130 rue de la piscine</s1>
<s2>38402 Saint-Martin d'Hères</s2>
<s3>FRA</s3>
<sZ>1 aut.</sZ>
<sZ>3 aut.</sZ>
</inist:fA14>
<country>France</country>
<placeName><region type="region" nuts="2">Auvergne-Rhône-Alpes</region>
<region type="old region" nuts="2">Rhône-Alpes</region>
<settlement type="city">Saint-Martin d'Hères</settlement>
</placeName>
</affiliation>
</author>
<author><name sortKey="Nunige, Sandra" sort="Nunige, Sandra" uniqKey="Nunige S" first="Sandra" last="Nunige">Sandra Nunige</name>
<affiliation wicri:level="3"><inist:fA14 i1="02"><s1>Physico-chimie des Electrolytes, Colloides et Sciences Analytiques ESPCI ParisTech, CNRS UMR 7195, 10 rue Vauquelin</s1>
<s2>75231 Paris</s2>
<s3>FRA</s3>
<sZ>2 aut.</sZ>
<sZ>4 aut.</sZ>
</inist:fA14>
<country>France</country>
<placeName><region type="region" nuts="2">Île-de-France</region>
<settlement type="city">Paris</settlement>
</placeName>
</affiliation>
</author>
<author><name sortKey="Lefrou, Christine" sort="Lefrou, Christine" uniqKey="Lefrou C" first="Christine" last="Lefrou">Christine Lefrou</name>
<affiliation wicri:level="3"><inist:fA14 i1="01"><s1>Laboratoire d'Electrochimie et de Physico-chimie des Matériaux et des Interfaces, CNRS UMR 5631, 1130 rue de la piscine</s1>
<s2>38402 Saint-Martin d'Hères</s2>
<s3>FRA</s3>
<sZ>1 aut.</sZ>
<sZ>3 aut.</sZ>
</inist:fA14>
<country>France</country>
<placeName><region type="region" nuts="2">Auvergne-Rhône-Alpes</region>
<region type="old region" nuts="2">Rhône-Alpes</region>
<settlement type="city">Saint-Martin d'Hères</settlement>
</placeName>
</affiliation>
</author>
<author><name sortKey="Kanoufi, Frederic" sort="Kanoufi, Frederic" uniqKey="Kanoufi F" first="Frederic" last="Kanoufi">Frederic Kanoufi</name>
<affiliation wicri:level="3"><inist:fA14 i1="02"><s1>Physico-chimie des Electrolytes, Colloides et Sciences Analytiques ESPCI ParisTech, CNRS UMR 7195, 10 rue Vauquelin</s1>
<s2>75231 Paris</s2>
<s3>FRA</s3>
<sZ>2 aut.</sZ>
<sZ>4 aut.</sZ>
</inist:fA14>
<country>France</country>
<placeName><region type="region" nuts="2">Île-de-France</region>
<settlement type="city">Paris</settlement>
</placeName>
</affiliation>
</author>
</titleStmt>
<publicationStmt><idno type="wicri:source">INIST</idno>
<idno type="inist">12-0327067</idno>
<date when="2011">2011</date>
<idno type="stanalyst">PASCAL 12-0327067 INIST</idno>
<idno type="RBID">Pascal:12-0327067</idno>
<idno type="wicri:Area/PascalFrancis/Corpus">001133</idno>
<idno type="wicri:Area/PascalFrancis/Curation">004D84</idno>
<idno type="wicri:Area/PascalFrancis/Checkpoint">001930</idno>
<idno type="wicri:explorRef" wicri:stream="PascalFrancis" wicri:step="Checkpoint">001930</idno>
<idno type="wicri:doubleKey">0013-4686:2011:Cornut R:local:etching:of</idno>
<idno type="wicri:Area/Main/Merge">006D81</idno>
<idno type="wicri:Area/Main/Curation">006949</idno>
<idno type="wicri:Area/Main/Exploration">006949</idno>
</publicationStmt>
<sourceDesc><biblStruct><analytic><title xml:lang="en" level="a">Local etching of copper films by the Scanning Electrochemical Microscope in the feedback mode: A theoretical and experimental investigation</title>
<author><name sortKey="Cornut, Renaud" sort="Cornut, Renaud" uniqKey="Cornut R" first="Renaud" last="Cornut">Renaud Cornut</name>
<affiliation wicri:level="3"><inist:fA14 i1="01"><s1>Laboratoire d'Electrochimie et de Physico-chimie des Matériaux et des Interfaces, CNRS UMR 5631, 1130 rue de la piscine</s1>
<s2>38402 Saint-Martin d'Hères</s2>
<s3>FRA</s3>
<sZ>1 aut.</sZ>
<sZ>3 aut.</sZ>
</inist:fA14>
<country>France</country>
<placeName><region type="region" nuts="2">Auvergne-Rhône-Alpes</region>
<region type="old region" nuts="2">Rhône-Alpes</region>
<settlement type="city">Saint-Martin d'Hères</settlement>
</placeName>
</affiliation>
</author>
<author><name sortKey="Nunige, Sandra" sort="Nunige, Sandra" uniqKey="Nunige S" first="Sandra" last="Nunige">Sandra Nunige</name>
<affiliation wicri:level="3"><inist:fA14 i1="02"><s1>Physico-chimie des Electrolytes, Colloides et Sciences Analytiques ESPCI ParisTech, CNRS UMR 7195, 10 rue Vauquelin</s1>
<s2>75231 Paris</s2>
<s3>FRA</s3>
<sZ>2 aut.</sZ>
<sZ>4 aut.</sZ>
</inist:fA14>
<country>France</country>
<placeName><region type="region" nuts="2">Île-de-France</region>
<settlement type="city">Paris</settlement>
</placeName>
</affiliation>
</author>
<author><name sortKey="Lefrou, Christine" sort="Lefrou, Christine" uniqKey="Lefrou C" first="Christine" last="Lefrou">Christine Lefrou</name>
<affiliation wicri:level="3"><inist:fA14 i1="01"><s1>Laboratoire d'Electrochimie et de Physico-chimie des Matériaux et des Interfaces, CNRS UMR 5631, 1130 rue de la piscine</s1>
<s2>38402 Saint-Martin d'Hères</s2>
<s3>FRA</s3>
<sZ>1 aut.</sZ>
<sZ>3 aut.</sZ>
</inist:fA14>
<country>France</country>
<placeName><region type="region" nuts="2">Auvergne-Rhône-Alpes</region>
<region type="old region" nuts="2">Rhône-Alpes</region>
<settlement type="city">Saint-Martin d'Hères</settlement>
</placeName>
</affiliation>
</author>
<author><name sortKey="Kanoufi, Frederic" sort="Kanoufi, Frederic" uniqKey="Kanoufi F" first="Frederic" last="Kanoufi">Frederic Kanoufi</name>
<affiliation wicri:level="3"><inist:fA14 i1="02"><s1>Physico-chimie des Electrolytes, Colloides et Sciences Analytiques ESPCI ParisTech, CNRS UMR 7195, 10 rue Vauquelin</s1>
<s2>75231 Paris</s2>
<s3>FRA</s3>
<sZ>2 aut.</sZ>
<sZ>4 aut.</sZ>
</inist:fA14>
<country>France</country>
<placeName><region type="region" nuts="2">Île-de-France</region>
<settlement type="city">Paris</settlement>
</placeName>
</affiliation>
</author>
</analytic>
<series><title level="j" type="main">Electrochimica acta</title>
<title level="j" type="abbreviated">Electrochim. acta</title>
<idno type="ISSN">0013-4686</idno>
<imprint><date when="2011">2011</date>
</imprint>
</series>
</biblStruct>
</sourceDesc>
<seriesStmt><title level="j" type="main">Electrochimica acta</title>
<title level="j" type="abbreviated">Electrochim. acta</title>
<idno type="ISSN">0013-4686</idno>
</seriesStmt>
</fileDesc>
<profileDesc><textClass><keywords scheme="KwdEn" xml:lang="en"><term>Anodic dissolution</term>
<term>Copper</term>
<term>Electrochemical etching</term>
<term>Experimental study</term>
<term>Feedback</term>
<term>Kinetics</term>
<term>Lithography</term>
<term>Medium effect</term>
<term>Scanning electrochemical microscopy</term>
<term>Scanning probe microscopy</term>
<term>Surface treatment</term>
<term>Theoretical study</term>
</keywords>
<keywords scheme="Pascal" xml:lang="fr"><term>Traitement surface</term>
<term>Cuivre</term>
<term>Boucle réaction</term>
<term>Etude théorique</term>
<term>Etude expérimentale</term>
<term>Dissolution anodique</term>
<term>Lithographie</term>
<term>Cinétique</term>
<term>Gravure électrochimique</term>
<term>Effet milieu</term>
<term>Microscopie champ proche</term>
<term>Microscopie électrochimique à balayage</term>
</keywords>
<keywords scheme="Wicri" type="topic" xml:lang="fr"><term>Cuivre</term>
</keywords>
</textClass>
</profileDesc>
</teiHeader>
<front><div type="abstract" xml:lang="en">A model of the Scanning Electrochemical Microscope (SECM) as a lithographic tool is presented and used to get quantitative kinetic information from lithographic experiments. It is illustrated in the specific case of the local etching by anodic dissolution of a copper substrate by the SECM in the feedback mode. A theoretical model presents the expected profile of the etched hole in the simple case of the positive feedback behaviour. A steady-state behaviour is expected for the dimensionless shape of the hole, which depends only on the tip-substrate separation distance. The hole depth is then expected to linearly depend on the etching time. The model is then confronted to different experimental conditions where a Cu substrate is locally oxidized by a tip-electrogenerated Fe(bpy)<sub>3</sub>
<sup>3+</sup>
 oxidant. The experiments agree with the theoretical predictions (steady-state dimensionless profile and linear evolution of the depth with time). Even though the system behaves under positive feedback, the kinetics of the etching process can readily be extracted from the hole characterization and its conversion into Faradaic yield.</div>
</front>
</TEI>
<affiliations><list><country><li>France</li>
</country>
<region><li>Auvergne-Rhône-Alpes</li>
<li>Rhône-Alpes</li>
<li>Île-de-France</li>
</region>
<settlement><li>Paris</li>
<li>Saint-Martin d'Hères</li>
</settlement>
</list>
<tree><country name="France"><region name="Auvergne-Rhône-Alpes"><name sortKey="Cornut, Renaud" sort="Cornut, Renaud" uniqKey="Cornut R" first="Renaud" last="Cornut">Renaud Cornut</name>
</region>
<name sortKey="Kanoufi, Frederic" sort="Kanoufi, Frederic" uniqKey="Kanoufi F" first="Frederic" last="Kanoufi">Frederic Kanoufi</name>
<name sortKey="Lefrou, Christine" sort="Lefrou, Christine" uniqKey="Lefrou C" first="Christine" last="Lefrou">Christine Lefrou</name>
<name sortKey="Nunige, Sandra" sort="Nunige, Sandra" uniqKey="Nunige S" first="Sandra" last="Nunige">Sandra Nunige</name>
</country>
</tree>
</affiliations>
</record>

Pour manipuler ce document sous Unix (Dilib)

EXPLOR_STEP=$WICRI_ROOT/Wicri/Asie/explor/AustralieFrV1/Data/Main/Exploration

HfdSelect -h $EXPLOR_STEP/biblio.hfd -nk 006949 | SxmlIndent | more

HfdSelect -h $EXPLOR_AREA/Data/Main/Exploration/biblio.hfd -nk 006949 | SxmlIndent | more

Pour mettre un lien sur cette page dans le réseau Wicri

{{Explor lien
   |wiki=    Wicri/Asie
   |area=    AustralieFrV1
   |flux=    Main
   |étape=   Exploration
   |type=    RBID
   |clé=     Pascal:12-0327067
   |texte=   Local etching of copper films by the Scanning Electrochemical Microscope in the feedback mode: A theoretical and experimental investigation
}}

This area was generated with Dilib version V0.6.33.
Data generation: Tue Dec 5 10:43:12 2017. Site generation: Tue Mar 5 14:07:20 2024

	Serveur d'exploration sur les relations entre la France et l'Australie
	Attention, ce site est en cours de développement ! Attention, site généré par des moyens informatiques à partir de corpus bruts. Les informations ne sont donc pas validées.

Serveur d'exploration sur les relations entre la France et l'Australie

Local etching of copper films by the Scanning Electrochemical Microscope in the feedback mode: A theoretical and experimental investigation

Local etching of copper films by the Scanning Electrochemical Microscope in the feedback mode: A theoretical and experimental investigation

Source :

Descripteurs français

English descriptors

Abstract

Links toward previous steps (curation, corpus...)

Le document en format XML

Pour manipuler ce document sous Unix (Dilib)

Pour mettre un lien sur cette page dans le réseau Wicri