AustralieFrV1, Istex, Curation, bibRecord, 000A55

New aspects of quantification in r.f. GDOES

Identifieur interne : 000A55 ( Istex/Curation ); précédent : 000A54; suivant : 000A56

New aspects of quantification in r.f. GDOES

Auteurs : Richard Payling [Suisse, Australie] ; Johann Michler [Suisse] ; Max Aeberhard [Suisse] ; Yuriy Popov [France]

Source :

Surface and Interface Analysis [ 0142-2421 ] ; 2003-07.

RBID : ISTEX:38B6321E0B44ABA80D7BB9B67DE0390737766E01

Descripteurs français

Wicri :
- topic : Alliage, Droit d'auteur, Analyse quantitative.

English descriptors

Abstract

Quantification algorithms for radiofrequency glow discharge optical emission spectroscopy (r.f. GDOES) calibration and analysis are briefly reviewed. These include corrections for emission yield, self‐absorption, spectral interferences and relative sputtering rates. The emission yield term is then expanded to allow variable power calibration. The use of sputter factors to determine relative sputtering rates is explored. Finally, pulsed r.f. operation is considered and compared with continuous power operation in an alloy steel calibration and in the qualitative depth profile of a heat‐sensitive coated glass. Copyright © 2003 John Wiley & Sons, Ltd.

Url:

https://api.istex.fr/document/38B6321E0B44ABA80D7BB9B67DE0390737766E01/fulltext/pdf

DOI: 10.1002/sia.1576

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ISTEX:38B6321E0B44ABA80D7BB9B67DE0390737766E01

Le document en format XML

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<term>Coating mass</term>
<term>Compositional depth</term>
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<term>Quantitative analysis</term>
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<term>Calibration</term>
<term>Coating mass</term>
<term>Compositional depth</term>
<term>Constant part</term>
<term>Constant pressure</term>
<term>Copyright</term>
<term>Current interest</term>
<term>Duty cycle</term>
<term>Effective power</term>
<term>Emission line</term>
<term>Emission spectrometry</term>
<term>Emission spectroscopy gdoes</term>
<term>External reference</term>
<term>Gdoes</term>
<term>Gdoes analysis</term>
<term>Glass sample</term>
<term>Glow discharge</term>
<term>Glow discharge plasmas</term>
<term>Hydrogen correction</term>
<term>Interface</term>
<term>Interface anal</term>
<term>Inverse emission</term>
<term>John wiley</term>
<term>John wiley sons</term>
<term>Materials testing</term>
<term>Metal alloys</term>
<term>Other elements</term>
<term>Other hand</term>
<term>Payling</term>
<term>Plasma resistance</term>
<term>Pulse height</term>
<term>Pulse width</term>
<term>Pure iron</term>
<term>Qref</term>
<term>Qualitative depth</term>
<term>Quantitative analysis</term>
<term>Reference materials</term>
<term>Relative emission</term>
<term>Repetition rate</term>
<term>Spectral interference corrections</term>
<term>Spectral interferences</term>
<term>Spectrom</term>
<term>Sputtering</term>
<term>Sputtering rate</term>
<term>Sputtering rates</term>
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<term>Steel substrate</term>
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<term>Variable pressure</term>
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<front><div type="abstract" xml:lang="en">Quantification algorithms for radiofrequency glow discharge optical emission spectroscopy (r.f. GDOES) calibration and analysis are briefly reviewed. These include corrections for emission yield, self‐absorption, spectral interferences and relative sputtering rates. The emission yield term is then expanded to allow variable power calibration. The use of sputter factors to determine relative sputtering rates is explored. Finally, pulsed r.f. operation is considered and compared with continuous power operation in an alloy steel calibration and in the qualitative depth profile of a heat‐sensitive coated glass. Copyright © 2003 John Wiley & Sons, Ltd.</div>
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New aspects of quantification in r.f. GDOES

New aspects of quantification in r.f. GDOES

Source :

Descripteurs français

English descriptors

Abstract

Links toward previous steps (curation, corpus...)

Links to Exploration step

Le document en format XML

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Pour mettre un lien sur cette page dans le réseau Wicri