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Jet electrochemical etching of nickel in a sodium chloride medium assisted by a pulsed laser beam

Identifieur interne : 000539 ( Istex/Corpus ); précédent : 000538; suivant : 000540

Jet electrochemical etching of nickel in a sodium chloride medium assisted by a pulsed laser beam

Auteurs : V. Lescuras ; J. C. André ; F. Lapicque ; I. Zouari

Source :

RBID : ISTEX:402488E29A69BB17CE3BE098ABF363B4740C5A96

Abstract

Abstract: This paper deals with the jet electrochemical etching of metal, using nickel drilling as an example; the performance of this technique was investigated as a function of the nozzle diameter and current density. The significance of the outer dissolution of metal, due to liquid spreading on the vertical substrate facing the nozzle, was estimated; the hole size was compared to the nozzle diameter. Moreover, a pulsed beam was shown to improve the precision of the edge. Applications to shape patterning are presented and discussed.

Url:
DOI: 10.1007/BF00241587

Links to Exploration step

ISTEX:402488E29A69BB17CE3BE098ABF363B4740C5A96

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<affiliation>Laboratoire des Sciences du Génie Chimique and Département de Chimie Physique des Réactions, CNRS-ENSIC, I rue Grandville, BP 451, F-54001, Nancy, France</affiliation>
<role>
<roleTerm type="text">author</roleTerm>
</role>
</name>
<name type="personal">
<namePart type="given">J.</namePart>
<namePart type="given">C.</namePart>
<namePart type="family">André</namePart>
<affiliation>Laboratoire des Sciences du Génie Chimique and Département de Chimie Physique des Réactions, CNRS-ENSIC, I rue Grandville, BP 451, F-54001, Nancy, France</affiliation>
<role>
<roleTerm type="text">author</roleTerm>
</role>
</name>
<name type="personal">
<namePart type="given">F.</namePart>
<namePart type="family">Lapicque</namePart>
<affiliation>Laboratoire des Sciences du Génie Chimique and Département de Chimie Physique des Réactions, CNRS-ENSIC, I rue Grandville, BP 451, F-54001, Nancy, France</affiliation>
<role>
<roleTerm type="text">author</roleTerm>
</role>
</name>
<name type="personal">
<namePart type="given">I.</namePart>
<namePart type="family">Zouari</namePart>
<affiliation>Ecole Nationale d'Ingénieurs de Gabès, Département de Génie Chimique, Route de Medenine, 6029, Gabès, Tunisia</affiliation>
<role>
<roleTerm type="text">author</roleTerm>
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</name>
<typeOfResource>text</typeOfResource>
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<originInfo>
<publisher>Kluwer Academic Publishers</publisher>
<place>
<placeTerm type="text">Dordrecht</placeTerm>
</place>
<dateCreated encoding="w3cdtf">1995-01-11</dateCreated>
<dateIssued encoding="w3cdtf">1995-10-01</dateIssued>
<copyrightDate encoding="w3cdtf">1995</copyrightDate>
</originInfo>
<language>
<languageTerm type="code" authority="rfc3066">en</languageTerm>
<languageTerm type="code" authority="iso639-2b">eng</languageTerm>
</language>
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<internetMediaType>text/html</internetMediaType>
</physicalDescription>
<abstract lang="en">Abstract: This paper deals with the jet electrochemical etching of metal, using nickel drilling as an example; the performance of this technique was investigated as a function of the nozzle diameter and current density. The significance of the outer dissolution of metal, due to liquid spreading on the vertical substrate facing the nozzle, was estimated; the hole size was compared to the nozzle diameter. Moreover, a pulsed beam was shown to improve the precision of the edge. Applications to shape patterning are presented and discussed.</abstract>
<note>Papers</note>
<relatedItem type="host">
<titleInfo>
<title>Journal of Applied Electrochemistry</title>
</titleInfo>
<titleInfo type="abbreviated">
<title>J Appl Electrochem</title>
</titleInfo>
<genre type="journal" displayLabel="Archive Journal"></genre>
<originInfo>
<dateIssued encoding="w3cdtf">1995-10-01</dateIssued>
<copyrightDate encoding="w3cdtf">1995</copyrightDate>
</originInfo>
<subject>
<genre>Chemistry</genre>
<topic>Physical Chemistry</topic>
<topic>Industrial Chemistry/Chemical Engineering</topic>
</subject>
<identifier type="ISSN">0021-891X</identifier>
<identifier type="eISSN">1572-8838</identifier>
<identifier type="JournalID">10800</identifier>
<identifier type="IssueArticleCount">14</identifier>
<identifier type="VolumeIssueCount">12</identifier>
<part>
<date>1995</date>
<detail type="volume">
<number>25</number>
<caption>vol.</caption>
</detail>
<detail type="issue">
<number>10</number>
<caption>no.</caption>
</detail>
<extent unit="pages">
<start>933</start>
<end>939</end>
</extent>
</part>
<recordInfo>
<recordOrigin>Chapman & Hall, 1995</recordOrigin>
</recordInfo>
</relatedItem>
<identifier type="istex">402488E29A69BB17CE3BE098ABF363B4740C5A96</identifier>
<identifier type="DOI">10.1007/BF00241587</identifier>
<identifier type="ArticleID">BF00241587</identifier>
<identifier type="ArticleID">Art4</identifier>
<accessCondition type="use and reproduction" contentType="copyright">Chapman & Hall, 1995</accessCondition>
<recordInfo>
<recordContentSource>SPRINGER</recordContentSource>
<recordOrigin>Chapman & Hall, 1995</recordOrigin>
</recordInfo>
</mods>
</metadata>
<serie></serie>
</istex>
</record>

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