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Confocal Raman imaging for the analysis of CVD diamond films

Identifieur interne : 001158 ( Istex/Corpus ); précédent : 001157; suivant : 001159

Confocal Raman imaging for the analysis of CVD diamond films

Auteurs : A. Haouni ; M. Mermoux ; B. Marcus ; L. Abello ; G. Lucazeau

Source :

RBID : ISTEX:309101210C235BC0DE5B529D4D3D8EE8A8279A0A

Abstract

Raman imaging has been used to investigate the microstructure of some (100)-textured diamond films. Results have shown that different crystals within a film can give rise to different Raman line positions, intensities and line widths, with the result that the overall diamond line is the sum of all the individual contributions from all the different crystals. The images presented herein first show considerable variation in the distribution of amorphous carbon and defects producing the luminescence background. These defects were mostly detected within the grain boundaries, confirming most of the previous studies. These examples also emphasize the amount of variability that may be detected in the line shape of the Raman diamond line. In particular, line splitting was observed for all the samples examined, and in some particular cases was the most dominant feature that was observed. Such a line splitting has to be related to strain fields that exist within the crystals. However, it was impossible to correlate line shift or line splitting to the presence of defects such as amorphous carbon or point defects giving rise to the luminescence background.

Url:
DOI: 10.1016/S0925-9635(98)00253-2

Links to Exploration step

ISTEX:309101210C235BC0DE5B529D4D3D8EE8A8279A0A

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<note type="content">Fig. 1: A scanning electron micrograph of the first sample.</note>
<note type="content">Fig. 2: Macro-Raman spectrum of the first sample, obtained by averaging the 4480 spectra used to generate the images presented in Fig. 3.</note>
<note type="content">Fig. 3: Raman maps of the background intensity measured at 1650cm−1 (b), the integrated intensity of the amorphous carbon signal (c), the integrated intensity of the diamond line (d), the frequency of the diamond line (e) and the full-width at half maximum of the diamond line (f). (a) Optical image of the area which was examined (30×35μm). Frequency and width of the diamond line were obtained by fitting all the individual spectra.</note>
<note type="content">Fig. 4: Examples of spectra extracted from the Fig. 3f.</note>
<note type="content">Fig. 5: Macro-Raman spectrum of the second sample, obtained by averaging the 1200 spectra used to generate the images presented in Fig. 6.</note>
<note type="content">Fig. 6: Raman mapping of the second sample. Raman maps of the background intensity (b), the integrated intensity of the amorphous carbon signal (c), the integrated intensity of the diamond line (d), the frequency of the diamond line (e) and the full-width at half maximum of the diamond line (f). (a) Optical image of the area which was examined (30×40μm).</note>
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<ce:label>*</ce:label>
<ce:text>Corresponding author. Fax: 0033 4 76 82 66 77; e-mail: michel.mermoux@lepmi.inpg.fr</ce:text>
</ce:correspondence>
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<ce:date-received day="22" month="7" year="1998"></ce:date-received>
<ce:date-accepted day="16" month="9" year="1998"></ce:date-accepted>
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<ce:section-title>Abstract</ce:section-title>
<ce:abstract-sec>
<ce:simple-para>Raman imaging has been used to investigate the microstructure of some (100)-textured diamond films. Results have shown that different crystals within a film can give rise to different Raman line positions, intensities and line widths, with the result that the overall diamond line is the sum of all the individual contributions from all the different crystals. The images presented herein first show considerable variation in the distribution of amorphous carbon and defects producing the luminescence background. These defects were mostly detected within the grain boundaries, confirming most of the previous studies. These examples also emphasize the amount of variability that may be detected in the line shape of the Raman diamond line. In particular, line splitting was observed for all the samples examined, and in some particular cases was the most dominant feature that was observed. Such a line splitting has to be related to strain fields that exist within the crystals. However, it was impossible to correlate line shift or line splitting to the presence of defects such as amorphous carbon or point defects giving rise to the luminescence background.</ce:simple-para>
</ce:abstract-sec>
</ce:abstract>
<ce:keywords class="keyword">
<ce:section-title>Keywords</ce:section-title>
<ce:keyword>
<ce:text>Confocal Raman spectroscopy</ce:text>
</ce:keyword>
<ce:keyword>
<ce:text>Defects</ce:text>
</ce:keyword>
<ce:keyword>
<ce:text>Diamond films</ce:text>
</ce:keyword>
<ce:keyword>
<ce:text>Strain</ce:text>
</ce:keyword>
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<affiliation>Laboratoire d'Electrochimie et de Physicochimie des Matériaux et Interfaces, UMR 5631 INPG-CNRS, associée à l'UJF, Domaine Universitaire, BP 75, 38402 Saint Martin d'Hères Cedex, France</affiliation>
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<abstract lang="en">Raman imaging has been used to investigate the microstructure of some (100)-textured diamond films. Results have shown that different crystals within a film can give rise to different Raman line positions, intensities and line widths, with the result that the overall diamond line is the sum of all the individual contributions from all the different crystals. The images presented herein first show considerable variation in the distribution of amorphous carbon and defects producing the luminescence background. These defects were mostly detected within the grain boundaries, confirming most of the previous studies. These examples also emphasize the amount of variability that may be detected in the line shape of the Raman diamond line. In particular, line splitting was observed for all the samples examined, and in some particular cases was the most dominant feature that was observed. Such a line splitting has to be related to strain fields that exist within the crystals. However, it was impossible to correlate line shift or line splitting to the presence of defects such as amorphous carbon or point defects giving rise to the luminescence background.</abstract>
<note type="content">Fig. 1: A scanning electron micrograph of the first sample.</note>
<note type="content">Fig. 2: Macro-Raman spectrum of the first sample, obtained by averaging the 4480 spectra used to generate the images presented in Fig. 3.</note>
<note type="content">Fig. 3: Raman maps of the background intensity measured at 1650cm−1 (b), the integrated intensity of the amorphous carbon signal (c), the integrated intensity of the diamond line (d), the frequency of the diamond line (e) and the full-width at half maximum of the diamond line (f). (a) Optical image of the area which was examined (30×35μm). Frequency and width of the diamond line were obtained by fitting all the individual spectra.</note>
<note type="content">Fig. 4: Examples of spectra extracted from the Fig. 3f.</note>
<note type="content">Fig. 5: Macro-Raman spectrum of the second sample, obtained by averaging the 1200 spectra used to generate the images presented in Fig. 6.</note>
<note type="content">Fig. 6: Raman mapping of the second sample. Raman maps of the background intensity (b), the integrated intensity of the amorphous carbon signal (c), the integrated intensity of the diamond line (d), the frequency of the diamond line (e) and the full-width at half maximum of the diamond line (f). (a) Optical image of the area which was examined (30×40μm).</note>
<note type="content">Fig. 7: Examples of high resolution spectra extracted from the images presented in Fig. 6.</note>
<subject>
<genre>Keywords</genre>
<topic>Confocal Raman spectroscopy</topic>
<topic>Defects</topic>
<topic>Diamond films</topic>
<topic>Strain</topic>
</subject>
<relatedItem type="host">
<titleInfo>
<title>Diamond & Related Materials</title>
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<title>DIAMAT</title>
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<genre type="journal">journal</genre>
<originInfo>
<dateIssued encoding="w3cdtf">199903</dateIssued>
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<identifier type="ISSN">0925-9635</identifier>
<identifier type="PII">S0925-9635(00)X0033-7</identifier>
<part>
<date>199903</date>
<detail type="volume">
<number>8</number>
<caption>vol.</caption>
</detail>
<detail type="issue">
<number>2–5</number>
<caption>no.</caption>
</detail>
<extent unit="issue pages">
<start>123</start>
<end>992</end>
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<extent unit="pages">
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<end>662</end>
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<identifier type="DOI">10.1016/S0925-9635(98)00253-2</identifier>
<identifier type="PII">S0925-9635(98)00253-2</identifier>
<accessCondition type="use and reproduction" contentType="copyright">©1999 Elsevier Science S.A.</accessCondition>
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